Method and apparatus for matching of bracketed patterns in test strings
    4.
    发明授权
    Method and apparatus for matching of bracketed patterns in test strings 失效
    用于匹配测试串中的括号图案的方法和装置

    公开(公告)号:US08189931B2

    公开(公告)日:2012-05-29

    申请号:US11969451

    申请日:2008-01-04

    IPC分类号: G06K9/00 G06F17/30

    CPC分类号: G06F17/30985

    摘要: A method and system are disclosed for matching input character sequences in a set of input patterns. The method comprises the steps of analyzing the set of input patterns, creating a pattern cluster look-up table (PCLT) based on said input patterns, and defining an offset value k. The PCLT is used to find, for each sequence s and offset k, a set of candidate patterns that can possibly match s, the set of candidate patterns is searched for patterns that match s, and all found matching patterns and sequences are reported.

    摘要翻译: 公开了一种用于在一组输入模式中匹配输入字符序列的方法和系统。 该方法包括以下步骤:分析输入模式集,基于所述输入模式创建模式集群查找表(PCLT),并定义偏移值k。 PCLT用于针对每个序列s和偏移k找到一组可能匹配s的候选模式,搜索匹配s的模式的候选模式集合,并且报告所有找到的匹配模式和序列。

    DETECTING DOSE AND FOCUS VARIATIONS DURING PHOTOLITHOGRAPHY
    5.
    发明申请
    DETECTING DOSE AND FOCUS VARIATIONS DURING PHOTOLITHOGRAPHY 失效
    在光刻技术中检测剂量和焦点变化

    公开(公告)号:US20120065765A1

    公开(公告)日:2012-03-15

    申请号:US12881548

    申请日:2010-09-14

    IPC分类号: G06F19/00

    CPC分类号: G03F7/705 G03F7/70658

    摘要: A method, system, and computer usable program product for detecting dose and focus variations during photolithography are provided in the illustrative embodiments. A test shape is formed on a wafer, the wafer being used to manufacture integrated circuits, the test shape being formed using a dose value and a focus value that are predetermined for the manufacturing. A capacitance of the test shape is measured. The capacitance is resolved to a second dosing value and a second focus value using an extraction model. A difference between the dosing value and the second dosing value is computed. A recommendation is made for dosing adjustment in the manufacturing based on the difference.

    摘要翻译: 在说明性实施例中提供了用于在光刻期间检测剂量和聚焦变化的方法,系统和计算机可用程序产品。 在晶片上形成测试形状,该晶片用于制造集成电路,该测试形状使用为制造预定的剂量值和聚焦值形成。 测量测试形状的电容。 使用提取模型将电容解析为第二计量值和第二焦点值。 计算给药值和第二给药值之间的差异。 基于差异,建议制造中的剂量调整。

    Piezoelectric-based nanopore device for the active control of the motion of polymers through the same
    8.
    发明授权
    Piezoelectric-based nanopore device for the active control of the motion of polymers through the same 有权
    用于主动控制聚合物运动的压电基纳米孔装置

    公开(公告)号:US08039250B2

    公开(公告)日:2011-10-18

    申请号:US12723724

    申请日:2010-03-15

    IPC分类号: C12M1/34 C12M3/00

    摘要: Apparatus, system, and methods are provided for utilizing piezoelectric material for controlling a polymer through a nanopore. A reservoir is formed filled with conductive fluid. A membrane is formed that separates the reservoir. A nanopore is formed through the membrane. The membrane comprises electrical conductive layers, piezoelectric layers, and insulating layers. The piezoelectric layers are operative to control a size of the nanopore for clamping/releasing a polymer as well as to control the thickness of part of the membrane when a voltage is applied to the piezoelectric layers. Combinations of clamping/releasing the polymer and changing the thickness of part of the membrane can move a polymer through the nanopore at any electrically controlled speed and also stretch or break a polymer in the nanopore.

    摘要翻译: 提供了利用压电材料通过纳米孔控制聚合物的装置,系统和方法。 形成填充有导电流体的储存器。 形成隔离储存器的膜。 通过膜形成纳米孔。 膜包括导电层,压电层和绝缘层。 压电层可操作以控制用于夹紧/释放聚合物的纳米孔的尺寸,以及当向压电层施加电压时控制膜的一部分的厚度。 夹持/释放聚合物和改变膜的一部分厚度的组合可以以任何电控速度移动聚合物通过纳米孔,并且还拉伸或破坏纳米孔中的聚合物。

    PIEZOELECTRIC-BASED NANOPORE DEVICE FOR THE ACTIVE CONTROL OF THE MOTION OF POLYMERS THROUGH THE SAME
    9.
    发明申请
    PIEZOELECTRIC-BASED NANOPORE DEVICE FOR THE ACTIVE CONTROL OF THE MOTION OF POLYMERS THROUGH THE SAME 有权
    用于主动控制聚合物运动的基于压电陶瓷的纳米器件

    公开(公告)号:US20110223652A1

    公开(公告)日:2011-09-15

    申请号:US12723724

    申请日:2010-03-15

    摘要: Apparatus, system, and methods are provided for utilizing piezoelectric material for controlling a polymer through a nanopore. A reservoir is formed filled with conductive fluid. A membrane is formed that separates the reservoir. A nanopore is formed through the membrane. The membrane comprises electrical conductive layers, piezoelectric layers, and insulating layers. The piezoelectric layers are operative to control a size of the nanopore for clamping/releasing a polymer as well as to control the thickness of part of the membrane when a voltage is applied to the piezoelectric layers. Combinations of clamping/releasing the polymer and changing the thickness of part of the membrane can move a polymer through the nanopore at any electrically controlled speed and also stretch or break a polymer in the nanopore.

    摘要翻译: 提供了利用压电材料通过纳米孔控制聚合物的装置,系统和方法。 形成填充有导电流体的储存器。 形成隔离储存器的膜。 通过膜形成纳米孔。 膜包括导电层,压电层和绝缘层。 压电层可操作以控制用于夹紧/释放聚合物的纳米孔的尺寸,以及当向压电层施加电压时控制膜的一部分的厚度。 夹持/释放聚合物和改变膜的一部分厚度的组合可以以任何电控速度移动聚合物通过纳米孔,并且还拉伸或破坏纳米孔中的聚合物。