CRACK-RESISTANT THERMAL BEND ACTUATOR
    1.
    发明申请
    CRACK-RESISTANT THERMAL BEND ACTUATOR 有权
    防爆热弯头执行器

    公开(公告)号:US20110050806A1

    公开(公告)日:2011-03-03

    申请号:US12546682

    申请日:2009-08-25

    IPC分类号: B41J2/05

    摘要: A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.

    摘要翻译: 热弯曲致动器包括用于连接到驱动电路的有源光束和与有源光束机械协作的无源光束。 当电流通过有源光束时,有源光束相对于被动光束膨胀,导致致动器的弯曲。 被动束包括由氮化硅组成的第一层和由二氧化硅组成的第二层。 第二层被夹在第一层和活性梁之间,为第一层提供热绝缘。

    METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY
    2.
    发明申请
    METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY 审中-公开
    微米镜组件的制作方法

    公开(公告)号:US20100149623A1

    公开(公告)日:2010-06-17

    申请号:US12336530

    申请日:2008-12-17

    IPC分类号: G02B26/08 B29D11/00

    摘要: A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.

    摘要翻译: 一种制造微镜组件的方法。 该方法包括以下步骤:(a)在衬底的表面上形成间隔开的一对电极; (b)在电极和基底上沉积牺牲材料层; (c)在所述牺牲材料中限定茎开口以形成支架; (d)在支架上沉积弹性柔性材料层; (e)在柔性层上沉积金属层; (f)通过金属层和柔性层蚀刻以限定单独的微镜; 和(g)去除牺牲材料以提供微镜组件。 该方法产生具有最少数量的MEMS制造步骤的微镜组件。

    FILTER HOUSING ASSEMBLY
    4.
    发明申请
    FILTER HOUSING ASSEMBLY 有权
    过滤器外壳组件

    公开(公告)号:US20080216457A1

    公开(公告)日:2008-09-11

    申请号:US11682580

    申请日:2007-03-06

    IPC分类号: B01D35/31

    摘要: A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.

    摘要翻译: 通常提供具有气密密封的过滤器壳体组件和更换过滤器的方法。 在一个实施例中,过滤器壳体组件包括具有适于容纳过滤器和入口的开口的壳体。 密封构件联接到壳体并且可在第一位置和至少第二位置之间移动,第二位置密封入口。 过滤器壳体组件可以被配置为保持室侧可更换过滤器或者使过滤器永久地粘附在开口内。

    Filter housing assembly
    5.
    发明授权
    Filter housing assembly 有权
    过滤器外壳组件

    公开(公告)号:US07220291B2

    公开(公告)日:2007-05-22

    申请号:US10863629

    申请日:2004-06-08

    摘要: A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.

    摘要翻译: 通常提供具有气密密封的过滤器壳体组件和更换过滤器的方法。 在一个实施例中,过滤器壳体组件包括具有适于容纳过滤器和入口的开口的壳体。 密封构件联接到壳体并且可在第一位置和至少第二位置之间移动,第二位置密封入口。 过滤器壳体组件可以被配置为保持室侧可更换过滤器或者使过滤器永久地粘附在开口内。

    Exhaust Filter Module, and a Method and Apparatus for Efficiency Testing the Same
    6.
    发明申请
    Exhaust Filter Module, and a Method and Apparatus for Efficiency Testing the Same 有权
    排气过滤器模块,以及用于效率测试的方法和装置

    公开(公告)号:US20060276120A1

    公开(公告)日:2006-12-07

    申请号:US11277079

    申请日:2006-03-21

    摘要: A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.

    摘要翻译: 提供了一种用于排气应用的过滤器模块,以及用于测试该过滤器模块的方法和装置。 在一个实施例中,过滤器模块包括下游采样端口,该下游采样端口被配置为允许技术人员从过滤器模块的洁净室侧采样流过滤器模块的下游。 在另一个实施例中,提供适于密封接合被测试的过滤器模块的护罩,并且包括设置在护罩中的管,其将端口连接到过滤器模块的下游取样端口。

    Filter housing assembly
    7.
    发明申请
    Filter housing assembly 有权
    过滤器外壳组件

    公开(公告)号:US20050268585A1

    公开(公告)日:2005-12-08

    申请号:US10863629

    申请日:2004-06-08

    摘要: A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.

    摘要翻译: 通常提供具有气密密封的过滤器壳体组件和更换过滤器的方法。 在一个实施例中,过滤器壳体组件包括具有适于容纳过滤器和入口的开口的壳体。 密封构件联接到壳体并且可在第一位置和至少第二位置之间移动,第二位置密封入口。 过滤器壳体组件可以被配置为保持室侧可更换过滤器或者使过滤器永久地粘附在开口内。

    LIGHTNING DIVERTER SYSTEM AND METHODS

    公开(公告)号:US20220014008A1

    公开(公告)日:2022-01-13

    申请号:US17373962

    申请日:2021-07-13

    申请人: Sean O'Reilly

    发明人: Sean O'Reilly

    IPC分类号: H02G13/00 B63B43/00

    摘要: A lightning diverter system is disclosed including an outer rod having a first outer rod segment, a second outer rod segment, and a housing cabinet; and an inner rod having a first inner rod segment and a second inner rod segment. The second inner rod segment is in attachment with the second outer rod segment. The inner rod and the outer rod are concentric and configured to move between a rod extended configuration and a rod retracted configuration. A conductive break is in attachment with the outer rod and the inner rod. The lightning diverter system further includes a sensor configured for monitoring an environmental parameter and sending a first signal to a processor configured for determining if the environmental parameter fails satisfy an environmental parameter threshold and sending a second signal to move the lightning diverter system between the rod retracted configuration and rod extended configuration.

    DIGITAL MICRO-MIRROR DEVICE
    10.
    发明申请
    DIGITAL MICRO-MIRROR DEVICE 审中-公开
    数字微镜器件

    公开(公告)号:US20100149622A1

    公开(公告)日:2010-06-17

    申请号:US12336529

    申请日:2008-12-17

    IPC分类号: G02B26/02

    CPC分类号: G02B26/0841

    摘要: A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.

    摘要翻译: 一种数字微镜装置,包括位于基底上的微镜组件阵列。 每个微反射镜组件包括:与衬底间隔开的反射镜; 支撑镜子的杆; 以及位于杆的两侧的第一和第二电极。 杆由弹性柔性材料组成,使得反射镜可以通过静电力朝向第一电极或朝向第二电极倾斜。 数字微镜装置可以用在数据投影仪等中。