摘要:
A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.
摘要:
A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.
摘要:
A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.
摘要:
A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.
摘要:
A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.
摘要:
A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.
摘要:
A filter housing assembly having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing having an opening adapted to receive a filter and an inlet. A seal member is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.
摘要:
A lightning diverter system is disclosed including an outer rod having a first outer rod segment, a second outer rod segment, and a housing cabinet; and an inner rod having a first inner rod segment and a second inner rod segment. The second inner rod segment is in attachment with the second outer rod segment. The inner rod and the outer rod are concentric and configured to move between a rod extended configuration and a rod retracted configuration. A conductive break is in attachment with the outer rod and the inner rod. The lightning diverter system further includes a sensor configured for monitoring an environmental parameter and sending a first signal to a processor configured for determining if the environmental parameter fails satisfy an environmental parameter threshold and sending a second signal to move the lightning diverter system between the rod retracted configuration and rod extended configuration.
摘要:
A method of fabricating a thermal bend actuator comprises the steps of: (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold; (b) depositing a second layer comprised of silicon dioxide onto the first layer; (c) depositing an active beam layer onto the second layer; (d) etching the active beam layer, the first layer and the second layer to define the thermal bend actuator; and (e) releasing the thermal bend actuator by removing the sacrificial scaffold.
摘要:
A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.