发明申请
US20110050806A1 CRACK-RESISTANT THERMAL BEND ACTUATOR 有权
防爆热弯头执行器

CRACK-RESISTANT THERMAL BEND ACTUATOR
摘要:
A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.
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