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    Plasma processing apparatus and device manufacturing method
    1.
    发明授权
    Plasma processing apparatus and device manufacturing method 有权

    公开(公告)号：US10685815B2

    公开(公告)日：2020-06-16

    申请号：US13392126

    申请日：2010-08-25

    Applicant: Ryo Matsuhashi ,  Hiroshi Akasaka ,  Yoshimitsu Kodaira ,  Atsushi Sekiguchi ,  Naoko Matsui

    Inventor： Ryo Matsuhashi ,  Hiroshi Akasaka ,  Yoshimitsu Kodaira ,  Atsushi Sekiguchi ,  Naoko Matsui

    IPC: H01J37/32

    Abstract: The present invention provides a plasma processing apparatus which reduces damage from plasma generated in a discharge vessel and lengthens the replacement cycle of the discharge vessel. A plasma processing apparatus 1 is provided with a processing chamber 2 partitioning a processing space, a discharge vessel 3 whose one end opens facing inside the processing chamber 2 and the other end is closed, an antenna 4 which is disposed around the discharge vessel 3 and generates an induced electric field to generate plasma in the discharge vessel 3 under reduced pressure, and an electromagnet 9 which is arranged around the discharge vessel 3 and forms a divergent magnetic field in the discharge vessel 3. The discharge vessel 3 has at its closed end portion a protrusion 15 projecting toward the processing chamber 2.

    Austenitic stainless steel welding wire and welding structure
    4.
    发明申请
    Austenitic stainless steel welding wire and welding structure 有权
    奥氏体不锈钢焊丝和焊接结构

    公开(公告)号：US20060243719A1

    公开(公告)日：2006-11-02

    申请号：US11404413

    申请日：2006-04-13

    Applicant: Hiroshige Inoue ,  Ryuichi Honma ,  Manabu Mizumoto ,  Yuusuke Oikawa ,  Ryo Matsuhashi ,  Shinji Tsuge ,  Shigeo Fukumoto

    Inventor： Hiroshige Inoue ,  Ryuichi Honma ,  Manabu Mizumoto ,  Yuusuke Oikawa ,  Ryo Matsuhashi ,  Shinji Tsuge ,  Shigeo Fukumoto

    IPC: B23K35/22

    CPC classification number: B23K35/26

    Abstract: A welding wire for austenitic stainless steel welding contains, in percent by mass, C: 0.005 through 0.05%, Si: 0.1 through 1.0%, Mn: 1.0 through 3.5%, Cr: 25.0 through 28.0%, Ni: 16.0 through 23.9%, Mo: 1.6 through 3.0%, Cu: 0.1 through 0.5%, Al: 0.001 through 0.02%, and N: more than 0.30 through 0.50%, limiting 0 to 0.03% or less, P to 0.03% or less, and S to 0.005% or less, and having a ratio of a Cr equivalent to Ni equivalent (Cr equivalent/Ni equivalent) within a range between 0.85 and 1.2 and a PI value of 35 or more, the remainder being iron and unavoidable impurities.

    Abstract translation: 奥氏体不锈钢焊接用焊丝以质量％计含有C：0.005〜0.05％，Si：0.1〜1.0％，Mn：1.0〜3.5％，Cr：25.0〜28.0％，Ni：16.0〜23.9％ Mo：1.6〜3.0％，Cu：0.1〜0.5％，Al：0.001〜0.02％，N：大于0.30〜0.50％，0〜0.03％以下，P：0.03％以下，S：0.005以下 ％以下，Cr相当于Ni当量（Cr当量/ Ni当量）在0.85〜1.2的范围内，PI值为35以上，剩余部分为铁和不可避免的杂质。

    Fluid controller
    5.
    发明申请
    Fluid controller 审中-公开
    流体控制器

    公开(公告)号：US20060102867A1

    公开(公告)日：2006-05-18

    申请号：US10519674

    申请日：2003-07-09

    Applicant: Ryo Matsuhashi ,  Kazuhiro Suetsugu ,  Hideyuki Miyagawa ,  Toshio Kita ,  Kyota Sogabe ,  Kazuhiro Yoshikawa ,  Akihiro Morimoto ,  Jyunji Sato ,  Kunihiko Daido ,  Hirokatsu Maeda

    Inventor： Ryo Matsuhashi ,  Kazuhiro Suetsugu ,  Hideyuki Miyagawa ,  Toshio Kita ,  Kyota Sogabe ,  Kazuhiro Yoshikawa ,  Akihiro Morimoto ,  Jyunji Sato ,  Kunihiko Daido ,  Hirokatsu Maeda

    IPC: F16K25/00

    CPC classification number: F16K1/385 ,  F16K1/04 ,  F16K1/38 ,  F16K1/482 ,  F16K25/005

    Abstract: A fluid control device 1 comprises a metal body 2 having a fluid inlet channel 2a, a fluid outlet channel 2b and a communication channel 2c for holding the two channels in communication, and a metal slide member 3 vertically movable in a vertical passage 11 including the communication channel 2c for closing or opening the communication channel 2c with an end portion thereof. At least the end portion 3a of the slide member 3 is made of an alloy comprising, in % by weight, 0.001 to 0.01% of C, up to 5% of Si, up to 2% of Mn, up to 0.03% of P, up to 100 ppm of S, up to 50 ppm of O, 18 to 25% of Cr, 15 to 25% of Ni, 4.5 to 7.0% of Mo, 0.5 to 3.0% of Cu, 0.1 to 0.3% of N, and the balance substantially Fe and other inevitable impurities.

    Abstract translation: 流体控制装置1包括具有流体入口通道2a，流体出口通道2b和用于保持两个通道连通的连通通道2c的金属体2以及在垂直通道中垂直移动的金属滑动构件3 包括用于关闭或打开具有其端部的通信信道2c的通信信道2c。 至少滑动构件3的端部3a由合金制成，其以重量％计含有0.001至0.01％的C，至多5％的Si，至多2％的Mn，至多0.03％的 P，高达100ppm的S，高达50ppm的O，18〜25％的Cr，15〜25％的Ni，4.5〜7.0％的Mo，0.5〜3.0％的Cu，0.1〜0.3％的N ，余量基本上为Fe等不可避免的杂质。

    Austenitic stainless hot-rolled steel material with excellent corrosion resistance, proof stress, and low-temperature toughness
    6.
    发明授权
    Austenitic stainless hot-rolled steel material with excellent corrosion resistance, proof stress, and low-temperature toughness 有权
    奥氏体不锈钢热轧钢材具有优异的耐腐蚀性，耐应力和低温韧性

    公开(公告)号：US08105447B2

    公开(公告)日：2012-01-31

    申请号：US12391045

    申请日：2009-02-23

    Applicant: Yuusuke Oikawa ,  Shinji Tsuge ,  Shigeo Fukumoto ,  Kazuhiro Suetsugu ,  Ryo Matsuhashi ,  Hiroshige Inoue

    Inventor： Yuusuke Oikawa ,  Shinji Tsuge ,  Shigeo Fukumoto ,  Kazuhiro Suetsugu ,  Ryo Matsuhashi ,  Hiroshige Inoue

    IPC: C22C38/44 ,  C22C30/00 ,  C22C38/42 ,  C22C38/48 ,  C22C38/50 ,  C22C38/54

    CPC classification number: C22C38/001 ,  C22C38/002 ,  C22C38/004 ,  C22C38/02 ,  C22C38/04 ,  C22C38/42 ,  C22C38/44

    Abstract: An austenitic stainless steel hot-rolled steel material can be provided which has sea-water resistance and strength superior to conventional steel. Low-temperature toughness can be maintained, which is preferable in a structural member of speedy craft. The steel material can include an austenitic stainless steel hot-rolled steel material which excels in the properties of corrosion resistance, proof stress, and low-temperature toughness. In such austenitic stainless steel hot-rolling steel material, e.g., PI [=Cr+3.3(Mo+0.5W)+16N] ranges from 35 to 40, δ cal [=2.9(Cr+0.3Si+Mo+0.5W)−2.6(Ni+0.3Mn+0.25Cu+35C+20N)−18] ranges from −6 to +2, and a 0.2% proof stress at room temperature is not less than 550 MPa, Charpy impact value measured using a V-notch test piece at −40° C. is not less than 100 J/cm2, and the pitting potential measured in a deaerated aqueous solution of 10% NaCl at 50° C. (Vc′100) is not less than 500 mV (as it relates to saturated Ag/AgCl).

    Abstract translation: 可以提供具有优于常规钢的耐海水性和强度的奥氏体不锈钢热轧钢材。 可以保持低温韧性，这在快速工艺的结构构件中是优选的。 钢材可以包括耐腐蚀性，耐应力性和低温韧性优异的奥氏体不锈钢热轧钢材。 在这种奥氏体不锈钢热轧钢材中，例如PI [= Cr + 3.3（Mo + 0.5W）+ 16N]为35〜40，δcal[= 2.9（Cr + 0.3Si + Mo + 0.5W） -2.6（Ni + 0.3Mn + 0.25Cu + 35C + 20N）-18]的范围为-6至+2，室温下的0.2％屈服应力不低于550MPa，夏比冲击值使用V- 在-40℃下的切口试验片不小于100J / cm 2，在50℃的10％NaCl的脱气水溶液（Vc'100）中测定的点蚀电位不小于500mV 它涉及饱和Ag / AgCl）。

    Austenite-type stainless steel hot-rolling steel material with excellent corrosion resistance, proof-stress, and low-temperature toughness and production method thereof
    9.
    发明授权
    Austenite-type stainless steel hot-rolling steel material with excellent corrosion resistance, proof-stress, and low-temperature toughness and production method thereof 有权
    具有优异的耐腐蚀性，耐应力和低温韧性的奥氏体型不锈钢热轧钢材及其制造方法

    公开(公告)号：US08506729B2

    公开(公告)日：2013-08-13

    申请号：US13349866

    申请日：2012-01-13

    Applicant: Yuusuke Oikawa ,  Shinji Tsuge ,  Shigeo Fukumoto ,  Kazuhiro Suetsugu ,  Ryo Matsuhashi ,  Hiroshige Inoue

    Inventor： Yuusuke Oikawa ,  Shinji Tsuge ,  Shigeo Fukumoto ,  Kazuhiro Suetsugu ,  Ryo Matsuhashi ,  Hiroshige Inoue

    IPC: C22C38/44 ,  C22C30/00 ,  C22C38/42 ,  C22C38/48 ,  C22C38/50 ,  C22C38/54

    CPC classification number: C22C38/001 ,  C22C38/002 ,  C22C38/004 ,  C22C38/02 ,  C22C38/04 ,  C22C38/42 ,  C22C38/44

    Abstract: An austenitic stainless steel hot-rolled steel material can be provided which has sea-water resistance and strength superior to conventional steel. Low-temperature toughness can be maintained, which is preferable in a structural member of speedy craft. The steel material can include an austenitic stainless steel hot-rolled steel material which excels in the properties of corrosion resistance, proof stress, and low-temperature toughness. In such austenitic stainless steel hot-rolling steel material, e.g., PI [=Cr+3.3(Mo+0.5W)+16N] ranges from 35 to 40, δ cal [=2.9 (Cr+0.3Si+Mo+0.5W)−2.6 (Ni+0.3Mn+0.25Cu+35C+20N)−18] ranges from −6 to +2, and a 0.2% proof stress at room temperature is not less than 550 MPa, Charpy impact value measured using a V-notch test piece at −40° C. is not less than 100 J/cm2, and the pitting potential measured in a deaerated aqueous solution of 10% NaCl at 50° C. (Vc′100) is not less than 500 mV (as it relates to saturated Ag/AgCl).

    Abstract translation: 可以提供具有优于常规钢的耐海水性和强度的奥氏体不锈钢热轧钢材。 可以保持低温韧性，这在快速工艺的结构构件中是优选的。 钢材可以包括耐腐蚀性，耐应力性和低温韧性优异的奥氏体不锈钢热轧钢材。 在这种奥氏体不锈钢热轧钢材中，例如PI [= Cr + 3.3（Mo + 0.5W）+ 16N]的范围为35至40，δcal[= 2.9（Cr + 0.3Si + Mo + 0.5W） -2.6（Ni + 0.3Mn + 0.25Cu + 35C + 20N）-18]的范围为-6至+2，室温下的0.2％屈服应力不低于550MPa，夏比冲击值使用V- 在-40℃下的切口试验片不小于100J / cm 2，在50℃的10％NaCl的脱气水溶液（Vc'100）中测定的点蚀电位不小于500mV 它涉及饱和Ag / AgCl）。

    PLASMA PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
    10.
    发明申请
    PLASMA PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    等离子体加工设备和设备制造方法

    公开(公告)号：US20120145671A1

    公开(公告)日：2012-06-14

    申请号：US13392126

    申请日：2010-08-25

    Applicant: Ryo Matsuhashi ,  Hiroshi Akasaka ,  Yoshimitsu Kodaira ,  Atsushi Sekiguchi ,  Naoko Matsui

    Inventor： Ryo Matsuhashi ,  Hiroshi Akasaka ,  Yoshimitsu Kodaira ,  Atsushi Sekiguchi ,  Naoko Matsui

    IPC: B44C1/22 ,  B05C5/02

    CPC classification number: H01J37/3266 ,  H01J37/321

    Abstract: The present invention provides a plasma processing apparatus which reduces damage from plasma generated in a discharge vessel and lengthen the replacement cycle of the discharge vessel.A plasma processing apparatus 1 is provided with a processing chamber 2 partitioning a processing space, a discharge vessel 3 whose one end opens facing inside the processing chamber 2 and the other end is closed, an antenna 4 which is disposed around the discharge vessel 3 and generates an induced electric field to generate plasma in the discharge vessel 3 under reduced pressure, and an electromagnet 9 which is arranged around the discharge vessel 3 and forms a divergent magnetic field in the discharge vessel 3. The discharge vessel 3 has at is closed end portion a protrusion 15 projecting toward the processing chamber 2.

    Abstract translation: 本发明提供一种等离子体处理装置，其减少了在放电容器中产生的等离子体的损伤，并延长了放电容器的更换周期。 等离子体处理装置1设置有分隔处理空间的处理室2，一端朝向处理室2内侧开口而另一端封闭的放电室3，设置在放电容器3周围的天线4和 产生感应电场，在减压下在放电容器3内产生等离子体;以及电磁体9，其布置在放电容器3的周围，并在放电容器3内形成发散磁场。放电容器3具有闭合端 将朝向处理室2突出的突起部分15分开。

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