Method for substrate cleaning including movement of substrate below substrate cleaning module
    1.
    发明授权
    Method for substrate cleaning including movement of substrate below substrate cleaning module 有权
    基材清洗方法,包括基板清洗模块下方的基板运动

    公开(公告)号:US08900374B2

    公开(公告)日:2014-12-02

    申请号:US12942446

    申请日:2010-11-09

    IPC分类号: B08B3/04 H01L21/67

    CPC分类号: H01L21/67051 Y10S134/902

    摘要: A substrate is moved below a substrate cleaning module in a direction extending from a leading edge to a trailing edge of the substrate cleaning module. A cleaning material is dispensed downward toward a top surface of the substrate along the leading edge of the substrate cleaning module. A rinsing material is dispensed downward toward the top surface of the substrate along the trailing edge of the substrate cleaning module to generate a rinsing meniscus. Vacuum suction is applied at a vacuum suction location along a bottom surface of the substrate cleaning module and parallel to the leading and trailing edges of the substrate cleaning module. The vacuum location is positioned between a dispense location of the cleaning material and a dispense location of the rinsing material. A plenum region located between the dispense location of the cleaning material and the vacuum location is vented.

    摘要翻译: 衬底沿着从衬底清洁模块的前缘延伸到后缘的方向移动到衬底清洁模块下方。 清洁材料沿着衬底清洁模块的前缘朝向衬底的顶表面向下分配。 冲洗材料沿衬底清洁模块的后缘向下分配到衬底的顶表面,以产生漂洗弯液面。 真空抽吸沿着基板清洁模块的底表面在真空抽吸位置处并且平行于基板清洁模块的前缘和后缘施加。 真空位置位于清洁材料的分配位置和冲洗材料的分配位置之间。 位于清洁材料的分配位置和真空位置之间的集气室区域被排出。

    Process for the manufacture of a colloid of iron oxide
    3.
    发明授权
    Process for the manufacture of a colloid of iron oxide 有权
    制造氧化铁胶体的方法

    公开(公告)号:US08232323B2

    公开(公告)日:2012-07-31

    申请号:US12593337

    申请日:2008-03-07

    IPC分类号: C10L1/22 C09K3/32

    摘要: The invention concerns a two-stage process for the manufacture of a colloid of iron oxide, and results in the dispersion of the desired iron oxide particles within a carrier fluid by a mixture of mono- and polycarboxylic acids providing excellent properties to the colloid. The process also has the advantage of preserving the physical form of the iron oxide particles, allowing any desired properties of the iron oxide core (such as crystal form or magnetism) to be maintained within the colloid.

    摘要翻译: 本发明涉及用于制造氧化铁胶体的两阶段方法,并且通过单体和多元羧酸的混合物将所需氧化铁颗粒分散在载体流体中,从而为胶体提供优异的性质。 该方法还具有保留氧化铁颗粒的物理形式的优点,允许在胶体内保持氧化铁芯(例如晶体形式或磁性)的任何期望的性质。

    Scheduling technique for software pipelining
    6.
    发明授权
    Scheduling technique for software pipelining 失效
    软件流水线调度技术

    公开(公告)号:US07962907B2

    公开(公告)日:2011-06-14

    申请号:US11840371

    申请日:2007-08-17

    IPC分类号: G06F9/44

    CPC分类号: G06F8/4452 G06F9/3838

    摘要: An improved scheduling technique for software pipelining is disclosed which is designed to find schedules requiring fewer processor clock cycles and reduce register pressure hot spots when scheduling multiple groups of instructions (e.g. as represented by multiple sub-graphs of a DDG) which are independent, and substantially identical. The improvement in instruction scheduling and reduction of hot spots is achieved by evenly distributing such groups of instructions around the schedule for a given loop.

    摘要翻译: 公开了一种用于软件流水线的改进的调度技术,其被设计为在调度多个独立的指令组(例如,由DDG的多个子图表示)时,需要更少的处理器时钟周期并减少寄存器压力热点,以及 基本相同。 指令调度的改善和热点的减少是通过围绕给定循环的时间表均匀分布这些指令组来实现的。

    Method and Use for the Prevention of Fuel Injector Deposits
    7.
    发明申请
    Method and Use for the Prevention of Fuel Injector Deposits 审中-公开
    防止燃油喷射器沉积的方法和用途

    公开(公告)号:US20090229176A1

    公开(公告)日:2009-09-17

    申请号:US12471594

    申请日:2009-05-26

    IPC分类号: C10L1/22

    摘要: A method of substantially removing, or reducing the occurrence of, injector deposits in a diesel engine operated using a diesel fuel containing a minor amount of a metal-containing species is disclosed. The method includes adding to a diesel fuel the reaction product between a hydrocarbyl-substituted succinic acid or anhydride and hydrazine. The diesel engine is equipped with fuel injectors having a plurality of spray-holes, each spray-hole having an inlet and an outlet, and the fuel injectors have one or more of the following characteristics: (i) spray-holes which are tapered such that the inlet diameter of the spray-holes is greater than the outlet diameter; (ii) spray-holes having an outlet diameter of 0.10 mm or less; (iii) spray-holes where an inner edge of the inlet is rounded; (iv) 6 or more spray-holes; (v) an operating tip temperature in excess of 250° C.

    摘要翻译: 公开了一种在使用含有少量含金属物质的柴油机操作的柴油发动机中基本上除去或减少了喷射器沉积物的发生的方法。 该方法包括向柴油燃料中加入烃基取代的琥珀酸或酸酐与肼之间的反应产物。 柴油发动机配备有具有多个喷射孔的燃料喷射器,每个喷射孔具有入口和出口,并且燃料喷射器具有以下特征中的一个或多个:(i)锥形的喷射孔 喷孔的入口直径大于出口直径; (ii)出口直径为0.10mm以下的喷孔; (iii)入口内缘倒圆的喷孔; (iv)6个以上的喷孔; (v)操作尖端温度超过250℃

    Extension of swing modulo scheduling to evenly distribute uniform strongly connected components
    8.
    发明授权
    Extension of swing modulo scheduling to evenly distribute uniform strongly connected components 失效
    延伸模数调度以均匀分布均匀的强连接组件

    公开(公告)号:US07444628B2

    公开(公告)日:2008-10-28

    申请号:US10930040

    申请日:2004-08-30

    IPC分类号: G06F9/45

    CPC分类号: G06F8/4452

    摘要: A method, apparatus, and computer instructions for scheduling instructions for execution. Identify a series of instructions in a loop, wherein the series of instructions has a cyclic data dependency. Determine whether the series of instructions is a uniform series of instructions. Schedule execution of the uniform series of instructions within the loop to optimize execution of the loop in response to the identified series of instructions being the uniform series of instructions.

    摘要翻译: 一种用于调度执行指令的方法,装置和计算机指令。 识别循环中的一系列指令,其中该系列指令具有循环数据依赖性。 确定一系列指令是否是统一的指令系列。 计划执行循环内的统一指令序列,以响应于所指定的一系列指令是均匀的一系列指令来优化循环的执行。

    High Power Electrical Connector for a Laminated Heater
    9.
    发明申请
    High Power Electrical Connector for a Laminated Heater 有权
    用于层压加热器的大功率电连接器

    公开(公告)号:US20080227323A1

    公开(公告)日:2008-09-18

    申请号:US11687344

    申请日:2007-03-16

    IPC分类号: H01R13/02

    CPC分类号: H05B3/06

    摘要: An electrical connector has a non-conductive outer housing and a spring-loaded conductive assembly mounted within. The non-conductive outer housing has a longitudinal axis along which the spring-loaded conductive assembly is allowed to move over a limited range, in either direction. The conductive assembly includes a conductive contact pad and an conductive elongated shaft which are mated together within the non-conductive outer housing. A spring mounted along the contact shaft and in abutment therewith biases the contact shaft in a direction away from the contact base. When the electrical connector is employed in a chamber lid of a chamber lid assembly having an integrated laminated heater, such as for use in conjunction with a wafer processing chamber, the spring biases a lower surface of the contact shaft against the heater.

    摘要翻译: 电连接器具有非导电外壳和安装在其内的弹簧加载导电组件。 非导电外壳具有纵向轴线,弹簧加载的导电组件沿着该纵向轴线可在任一方向上在有限的范围内移动。 导电组件包括导电接触垫和导电细长轴,其在非导电外壳内配合在一起。 沿着接触轴安装并抵靠的弹簧沿远离接触基座的方向偏压接触轴。 当电连接器用于具有集成层压加热器的室盖组件的室盖中时,诸如与晶片处理室结合使用时,弹簧将接触轴的下表面偏置抵靠加热器。

    RF ground switch for plasma processing system
    10.
    发明授权
    RF ground switch for plasma processing system 有权
    射频接地开关等离子体处理系统

    公开(公告)号:US07393432B2

    公开(公告)日:2008-07-01

    申请号:US10953229

    申请日:2004-09-29

    IPC分类号: C23F1/00 H01L21/306 C23C16/00

    摘要: An arrangement in a plasma processing system for selectively providing an RF grounding path between an electrode and ground. The arrangement includes an RF conduction path structure and an annular structure. The annular structure and the RF conduction path structure having two relative positions relative to one another. A first relative position of the two relative positions is characterized by the annular structure electrically coupling with the RF conduction path structure to provide a ground to the RF conduction path structure. A second relative position of the two relative positions is characterized by the annular structure being electrically uncoupled from the RF conduction path.

    摘要翻译: 等离子体处理系统中的布置,用于选择性地提供电极和地面之间的RF接地路径。 该装置包括RF传导路径结构和环形结构。 环形结构和RF传导路径结构具有相对于彼此的两个相对位置。 两个相对位置的第一相对位置的特征在于环形结构与RF传导路径结构电耦合以提供到RF传导路径结构的接地。 两个相对位置的第二相对位置的特征在于环形结构与RF传导路径电耦合。