Magnetostrictive MEMS based magnetometer
    2.
    发明申请
    Magnetostrictive MEMS based magnetometer 审中-公开
    磁致伸缩MEMS基磁力计

    公开(公告)号:US20070001671A1

    公开(公告)日:2007-01-04

    申请号:US11478481

    申请日:2006-06-29

    IPC分类号: G01R33/02

    CPC分类号: G01R33/18

    摘要: A magnetostrictive microelectromechanical system (MEMS) element based magnetometer includes a MEMS element with any type of magnetostrictive material. The MEMS element can be made with or coated by the magnetostrictive material. The magnetometer can include a frequency measuring device, such as an oscilloscope, a frequency counter, a wave meter, a spectrum analyzer or the like. The magnetostrictive MEMS element can be used as a resonator in any type of oscillator circuit, such as a Pierce, a Colpitts, or a Clapp oscillator circuit. The magnetometer can be calibrated. The magnetostrictive MEMS element can be placed proximate a magnetic field, a resonant frequency of the magnetostrictive MEMS element proximate the magnetic field can be determined, and a property of the magnetic field can be determined based on a change in the resonant frequency of the magnetostrictive MEMS element proximate the magnetic field.

    摘要翻译: 基于磁致伸缩微机电系统(MEMS)元件的磁强计包括具有任何类型的磁致伸缩材料的MEMS元件。 MEMS元件可以由磁致伸缩材料制成或涂覆。 磁力计可以包括频率测量装置,例如示波器,频率计数器,波表,频谱分析仪等。 磁致伸缩MEMS元件可以用作任何类型的振荡器电路中的谐振器,例如Pierce,Colpitts或Clapp振荡器电路。 磁力计可以校准。 磁致伸缩MEMS元件可以靠近磁场放置,可以确定磁致伸缩MEMS元件在磁场附近的共振频率,并且可以基于磁致伸缩MEMS的谐振频率的变化来确定磁场的性质 靠近磁场的元件。