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    Injection locking Q-switched and Q-switched cavity dumped CO2 lasers for extreme UV generation
    1.
    发明授权
    Injection locking Q-switched and Q-switched cavity dumped CO2 lasers for extreme UV generation 有权
    注射锁定Q开关和Q开关腔倾倒二氧化碳激光器用于极端的紫外线发生

    公开(公告)号：US07327769B2

    公开(公告)日：2008-02-05

    申请号：US11542466

    申请日：2006-10-03

    申请人： Robert Henschke ,  Joel Fontanella ,  Anthony J. DeMaria

    发明人： Robert Henschke ,  Joel Fontanella ,  Anthony J. DeMaria

    IPC分类号： H01S3/10 ,  H01S3/13

    CPC分类号： H01S3/10092 ,  H01S3/005 ,  H01S3/10015 ,  H01S3/115 ,  H01S3/134 ,  H01S3/1398 ,  H01S3/2232

    摘要： A CO2 laser reference oscillator (RO) can provide injection seeding to a Q-switched (QS) or Q-switched cavity dumped (QSCD) CO2 laser, where the output frequency of the RO laser is locked to the peak of the laser line by the use of appropriate electronics to dither one of the resonator mirrors of the reference oscillator. This injected radiation seeds the radiation building up within the Q-switched laser cavity, such that the oscillating frequency favors the wavelength of the injected radiation. An electronic feedback control circuit can be used to lock an axial mode of the Q-switched laser to line center. The change in build-up time of the pulses within the QS laser can be used to maintain cavity length at a value that enables oscillating at the peak of the same laser line that is injected into QS laser.

    摘要翻译： CO 2激光参考振荡器（RO）可以向Q开关（QS）或Q开关腔倾倒（QSCD）CO 2激光器提供注入接种，其中 RO激光器的输出频率通过使用适当的电子装置来锁定到激光线的峰值，以抖动基准振荡器的谐振镜之一。 这种注入的辐射使辐射建立在Q开关激光腔内，使得振荡频率有利于注入的辐射的波长。 可以使用电子反馈控制电路将Q开关激光器的轴向模式锁定到线路中心。 可以使用QS激光器内的脉冲的积聚时间的变化来将腔体长度保持在能够在注入到QS激光器中的相同激光线的峰值处振荡的值。

    Injection locking Q-switched and Q-switched cavity dumped CO2 lasers for extreme UV generation
    2.
    发明申请
    Injection locking Q-switched and Q-switched cavity dumped CO2 lasers for extreme UV generation 有权
    注射锁定Q开关和Q开关腔倾倒二氧化碳激光器用于极端的紫外线发生

    公开(公告)号：US20070091973A1

    公开(公告)日：2007-04-26

    申请号：US11542466

    申请日：2006-10-03

    申请人： Robert Henschke ,  Joel Fontanella ,  Anthony DeMaria

    发明人： Robert Henschke ,  Joel Fontanella ,  Anthony DeMaria

    IPC分类号： H01S3/08

    CPC分类号： H01S3/10092 ,  H01S3/005 ,  H01S3/10015 ,  H01S3/115 ,  H01S3/134 ,  H01S3/1398 ,  H01S3/2232

    摘要： A CO2 laser reference oscillator (RO) can provide injection seeding to a Q-switched (QS) or Q-switched cavity dumped (QSCD) CO2 laser, where the output frequency of the RO laser is locked to the peak of the laser line by the use of appropriate electronics to dither one of the resonator mirrors of the reference oscillator. This injected radiation seeds the radiation building up within the Q-switched laser cavity, such that the oscillating frequency favors the wavelength of the injected radiation. An electronic feedback control circuit can be used to lock an axial mode of the Q-switched laser to line center. The change in build-up time of the pulses within the QS laser can be used to maintain cavity length at a value that enables oscillating at the peak of the same laser line that is injected into QS laser.

    摘要翻译： CO 2激光参考振荡器（RO）可以向Q开关（QS）或Q开关腔倾倒（QSCD）CO 2激光器提供注入接种，其中 RO激光器的输出频率通过使用适当的电子装置来锁定到激光线的峰值，以抖动基准振荡器的谐振镜之一。 这种注入的辐射使辐射建立在Q开关激光腔内，使得振荡频率有利于注入的辐射的波长。 可以使用电子反馈控制电路将Q开关激光器的轴向模式锁定到线路中心。 可以使用QS激光器内的脉冲的积聚时间的变化来将腔体长度保持在能够在注入到QS激光器中的相同激光线的峰值处振荡的值。

    Pulsed RF high pressure CO2 lasers
    5.
    发明授权
    Pulsed RF high pressure CO2 lasers 有权
    脉冲RF高压CO 2激光器

    公开(公告)号：US07453918B2

    公开(公告)日：2008-11-18

    申请号：US11484916

    申请日：2006-07-12

    申请人： Lanny Laughman ,  Vernon Seguin ,  Peter P. Chenausky ,  Robert Henschke ,  Eric R. Mueller

    发明人： Lanny Laughman ,  Vernon Seguin ,  Peter P. Chenausky ,  Robert Henschke ,  Eric R. Mueller

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2232 ,  H01S3/0315 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/076 ,  H01S3/0975

    摘要： An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser that avoids problems typically associated with obtaining a diffused discharge at high gas pressures, without arcing and without corona, while maintaining the unsaturated gain and gas temperature experienced at low pressures and scaling to higher pressures. Such a system has a long operating life-time, and is capable of operation at high gas pressures to obtain relative fast rise and fall time pulses. The system emits relatively short pulse widths, with pulse energies up to and exceeding 30 mJ, with reasonably high pulse repetition rates. The system also has a low pulsed RF power duty cycle, thereby enabling the generation of high peak power pulses, as well as reasonable average power and reasonably high peak powers.

    摘要翻译： 改进的激光系统包括密封的，RF激发的，扩散冷却的，高压的，短脉冲的，高峰值功率波导和平板CO 2激光器，其避免了通常与在高处获得扩散放电有关的问题 气体压力，没有电弧和没有电晕，同时保持在低压下经历的不饱和增益和气体温度，并将其缩放到更高的压力。 这样的系统具有长的使用寿命，并且能够在高气体压力下操作以获得相对快速的上升和下降时间脉冲。 系统发射脉冲宽度相对较短，脉冲能量可达30 mJ，脉冲重复率相当高。 该系统还具有低脉冲RF功率占空比，从而能够产生高峰值功率脉冲，以及合理的平均功率和合理的高峰值功率。

    Pulsed RF high pressure CO2 lasers
    8.
    发明申请
    Pulsed RF high pressure CO2 lasers 有权
    脉冲RF高压CO2激光器

    公开(公告)号：US20070041418A1

    公开(公告)日：2007-02-22

    申请号：US11484916

    申请日：2006-07-12

    申请人： Lanny Laughman ,  Vernon Seguin ,  Peter Chenausky ,  Robert Henschke ,  Eric Mueller

    发明人： Lanny Laughman ,  Vernon Seguin ,  Peter Chenausky ,  Robert Henschke ,  Eric Mueller

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2232 ,  H01S3/0315 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/076 ,  H01S3/0975

    摘要： An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser that avoids problems typically associated with obtaining a diffused discharge at high gas pressures, without arcing and without corona, while maintaining the unsaturated gain and gas temperature experienced at low pressures and scaling to higher pressures. Such a system has a long operating life-time, and is capable of operation at high gas pressures to obtain relative fast rise and fall time pulses. The system emits relatively short pulse widths, with pulse energies up to and exceeding 30 mJ, with reasonably high pulse repetition rates. The system also has a low pulsed RF power duty cycle, thereby enabling the generation of high peak power pulses, as well as reasonable average power and reasonably high peak powers.

    摘要翻译： 改进的激光系统包括密封的，RF激发的，扩散冷却的，高压的，短脉冲的，高峰值功率波导和平板CO 2激光器，其避免了通常与在高处获得扩散放电有关的问题 气体压力，没有电弧和没有电晕，同时保持在低压下经历的不饱和增益和气体温度，并将其缩放到更高的压力。 这样的系统具有长的使用寿命，并且能够在高气体压力下操作以获得相对快速的上升和下降时间脉冲。 系统发射脉冲宽度相对较短，脉冲能量可达30 mJ，脉冲重复率相当高。 该系统还具有低脉冲RF功率占空比，从而能够产生高峰值功率脉冲，以及合理的平均功率和合理的高峰值功率。