Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing
    1.
    发明授权
    Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing 失效
    用于控制化学机械抛光抛光表面特性的方法和设备

    公开(公告)号:US07040954B1

    公开(公告)日:2006-05-09

    申请号:US10952608

    申请日:2004-09-28

    CPC classification number: B24B37/005 B24B49/18

    Abstract: Apparatus and methods control CMP to uniformly polish a series of wafers. Average motor current I(avg) drawn by, and related average work W(avg) performed by, motors during CMP on the wafers reliably indicate quality of a roughness polishing characteristic of a polishing surface of a polishing pad. A conditioner controller controls a rate at which the quality of the polishing surface is restored by conditioning in relation to a rate of change of the quality of the polishing surface due to the CMP. Motor current is measured and averaged over many CMP-processed wafers. The method defines a baseline range of values of average work and controls conditioning according to whether average work is within the baseline range. When the polishing surface moves at constant velocity relative to each of the wafers that are being polished, a control signal based on average motor current represents the quality of the polishing characteristic.

    Abstract translation: 设备和方法控制CMP以均匀抛光一系列晶片。 平均电动机电流I(avg),以及在晶圆上的CMP期间电动机执行的相关的平均功率W(avg)可靠地指示抛光垫的抛光表面的粗糙度抛光特性的质量。 调节器控制器通过调节相对于由CMP引起的抛光表面的质量的变化率来控制抛光表面的质量恢复的速率。 在许多CMP处理的晶片上测量和平均电动机电流。 该方法根据平均工作是否在基线范围内定义了平均工作值和控制条件的基准范围。 当抛光表面相对于被抛光的每个晶片以恒定速度移动时,基于平均电动机电流的控制信号表示抛光特性的质量。

    Load cell and seat occupant weight sensing system
    2.
    发明申请
    Load cell and seat occupant weight sensing system 审中-公开
    称重传感器和座椅乘员重量感应系统

    公开(公告)号:US20050067828A1

    公开(公告)日:2005-03-31

    申请号:US10991619

    申请日:2004-11-18

    Applicant: Peter Norton

    Inventor: Peter Norton

    Abstract: Four load cells supporting a seat or part thereof provide four signals that are added to determine the weight of the seat occupant. Each load cell has two flanged springs stressed to provide preload. The two springs operate in concert to resist side forces and moments, making the load cell responsive to both compressive and tensile forces while being substantially unresponsive to lateral forces and moments tending to cause angular misalignment between input elements. A preferred load cell has a liquid filled chamber and a pressure sensor providing an electric signal indicating the pressure in the liquid, which is related to the applied force. Preferred manufacturing methods make the cost low. A seat belt tension sensor may close a switch at a predetermined seat belt tension or may measure the seat belt tension. A preferred mounting limits side forces to the load cells.

    Abstract translation: 支撑座椅或其一部分的四个称重传感器提供四个信号,其被添加以确定座椅乘客的重量。 每个称重传感器都有两个法兰弹簧,用于提供预载荷。 两个弹簧一致地操作以抵抗侧力和力矩,使得称重传感器响应于压缩力和拉力两者,同时对横向力和对于输入元件之间的角度偏移倾向的力矩基本上没有响应。 优选的称重传感器具有液体填充室和提供指示液体中的压力的​​电信号的压力传感器,其与所施加的力相关。 优选的制造方法使成本低。 安全带张力传感器可以以预定的安全带张力关闭开关,或者可以测量安全带张力。 优选的安装限制了对称重传感器的侧向力。

    Seat occupant weight sensing system
    3.
    发明授权
    Seat occupant weight sensing system 失效
    座椅重量感应系统

    公开(公告)号:US06820896B1

    公开(公告)日:2004-11-23

    申请号:US10104556

    申请日:2002-03-22

    Applicant: Peter Norton

    Inventor: Peter Norton

    Abstract: A seat occupant weight sensing system includes load cells that receive the weight of a seat occupant. A microprocessor receives indication of force applied to the load cells and may also receive output from a seat belt tension sensor and/or an atmospheric pressure sensor. In a first preferred embodiment four load cells supporting a seat each have a fluid filled chamber, and a pressure sensor in each load cell provides an electric signal indicating the pressure in the fluid. The four signals are added to determine the weight of the seat occupant. In a second preferred embodiment fluid conduits connect the four fluid filled chambers to a common pressure sensor. The load cells comprise two flanged conical springs stressed to provide preload. In the preferred embodiments, a spring is part of the surface of the chamber that confines the fluid. The two springs operate in concert to resist side forces and moments. The load cell is responsive to both compressive and tensile forces while being substantially unaffected by lateral forces and moments tending to cause angular misalignment. The seat belt tension sensor enables distinction between apparent weight caused by force applied by a seat belt to a child seat and the actual weight of a person. A first seat belt tension sensor comprises a switch that closes at a predetermined seat belt tension. A second seat belt tension sensor measures seat belt tension.

    Abstract translation: 座椅乘员权重感测系统包括承重座椅重量的称重传感器。 微处理器接收施加到称重传感器的力的指示,并且还可以接收来自安全带张力传感器和/或大气压力传感器的输出。 在第一优选实施例中,支撑座椅的四个称重传感器每个都具有流体填充室,并且每个称重传感器中的压力传感器提供指示流体中的压力的​​电信号。 添加四个信号以确定座椅乘客的重量。 在第二优选实施例中,流体导管将四个充满液体的腔室连接到公共压力传感器。 称重传感器包括两个凸缘锥形弹簧,用于提供预载荷。 在优选实施例中,弹簧是限制流体的室的表面的一部分。 两个弹簧协调一致地抵抗侧力和时刻。 负载传感器响应于压缩力和拉力两者,而基本上不受横向力的影响,并且倾向于引起角度未对准的力矩。 安全带张力传感器能够区分由安全带施加到儿童座椅上的力引起的表观重量和人的实际重量。 第一座椅安全带张力传感器包括在预定的安全带张力下关闭的开关。 第二个安全带张力传感器测量安全带张力。

    Seat occupant weight sensing system
    4.
    发明授权
    Seat occupant weight sensing system 失效
    座椅重量感应系统

    公开(公告)号:US06364352B1

    公开(公告)日:2002-04-02

    申请号:US09289048

    申请日:1999-04-09

    Applicant: Peter Norton

    Inventor: Peter Norton

    CPC classification number: B60R21/01516 B60R21/0152 G01G19/4142 G01L1/02

    Abstract: A system for determining the weight of the occupant of a vehicle seat includes a hinge near the forward edge of the seat and a force sensor responsive to downward force at a point well to the rear of the hinge thereby indicating torque about the hinge. The system includes a microprocessor connected for receiving the output of the force sensor. The microprocessor may also receive outputs from an accelerometer responsive to vertical accelerations, a seat back recline angle sensor, a seat track position sensor, a seat belt tension sensor and an atmospheric pressure sensor. In a first embodiment the microprocessor determines the weight of the seat occupant from the outputs of the force sensor and the seat back recline sensor. In a second embodiment the microprocessor determines the weight of the seat occupant from the outputs of the force sensor, the seat back recline sensor and the seat track position sensor. A force sensor comprises a compressible bottle with a Belleville spring thereby being responsive to both compression and tension while resisting lateral forces and being insensitive to angular misalignment and temperature fluctuations. The microprocessor may use the accelerometer or the seat belt tension indicator or the two in combination to establish whether the force being sensed derives from seat belt tension applied to a child seat or from the weight of a person.

    Abstract translation: 用于确定车辆座椅的乘客的重量的系统包括靠近座椅的前边缘的铰链和响应于在铰链的后部的点处的向下的力的力传感器,从而指示关于铰链的扭矩。 该系统包括连接用于接收力传感器的输出的微处理器。 微处理器还可以响应于垂直加速度从座椅靠背斜角传感器,座椅轨道位置传感器,座椅安全带张力传感器和大气压力传感器接收来自加速度计的输出。 在第一实施例中,微处理器根据力传感器和座椅靠背倾斜传感器的输出来确定座椅乘客的重量。 在第二实施例中,微处理器根据力传感器,座椅靠背倾斜传感器和座椅轨迹位置传感器的输出来确定座椅乘客的重量。 力传感器包括具有贝氏弹簧的可压缩瓶,因此可以抵抗横向力并对角度不对准和温度波动不敏感,同时压缩和拉伸两者。 微处理器可以使用加速度计或座椅安全带张力指示器或两者组合来确定被感测的力是否来自施加到儿童座椅上的安全带张力或者人的重量。

    Electricity generator and heat source for vehicles
    5.
    发明授权
    Electricity generator and heat source for vehicles 失效
    发电机和车辆用热源

    公开(公告)号:US06232679B1

    公开(公告)日:2001-05-15

    申请号:US09412253

    申请日:1999-10-05

    Applicant: Peter Norton

    Inventor: Peter Norton

    Abstract: A combined heat and electricity generating unit is suitable for use in class 8 trucks and the like. When it is operating it provides heat for keeping the engine and cabin warm and electricity for use by the electricity consuming devices in the cabin. It is a closed cycle system that includes a radial inlet turbine driven by a low pressure vaporized and superheated working fluid, an oil fired heater for vaporizing the working fluid, a pump for pumping condensed working fluid, a heat exchanger for heating engine coolant with heat from the condensing working fluid and an electric generator for converting energy produced by the turbine to electricity.

    Abstract translation: 组合式发电机组适用于8类卡车等。 当它运行时,其提供热量以保持发动机和舱室的温暖和电力供舱室内的电力消耗装置使用。 它是一个封闭循环系统,其包括由低压汽化和过热工作流体驱动的径向入口涡轮机,用于蒸发工作流体的燃油加热器,用于泵送冷凝工作流体的泵,用于加热发动机冷却剂的热交换器 来自冷凝工作流体和用于将由涡轮机产生的能量转换成电力的发电机。

    Force sensor for seat occupant weight sensor
    6.
    发明授权
    Force sensor for seat occupant weight sensor 失效
    用于座椅乘员重量传感器的力传感器

    公开(公告)号:US06224094B1

    公开(公告)日:2001-05-01

    申请号:US09081194

    申请日:1998-05-19

    Applicant: Peter Norton

    Inventor: Peter Norton

    CPC classification number: B60R21/01516 G01G19/4142 G01L1/02

    Abstract: A force sensor for sensing the weight of a vehicle seat occupant for a vehicle's occupant protection system has a pressure sensor responsive to hydraulic pressure resulting from axial force applied to the force sensor. A constant force spring in the form of a diaphragm with two flanges simultaneous functions as a seal, a constant force bias spring, an armature support resistant to radial forces and a piston for converting force to hydraulic pressure. Two studs receive applied force. An electrical insulator is sealed to the walls of a passage inside of one of the studs to provide electrical communication while sealing against liquid leakage. A pressure sensor is mounted on the electrical insulator and connected to electrical conductors in the insulator by stitch bonding. The diaphragm resists radial movement while allowing axial movement thereby making the sensor insensitive to radial forces. By being a constant force spring the diaphragm makes the sensor insensitive to temperature variations.

    Abstract translation: 用于感测车辆乘员保护系统的车辆座椅乘员的重量的力传感器具有响应于施加到力传感器的轴向力产生的液压的压力传感器。 具有隔膜形式的恒力弹簧具有两个法兰,同时用作密封件,恒定力偏置弹簧,抵抗径向力的电枢支架和用于将力转换为液压的活塞。 两个螺柱受到施加的力。 电绝缘体被密封到一个螺柱内部的通道的壁上以提供电连通,同时密封以防止液体泄漏。 压力传感器安装在电绝缘体上,并通过缝合连接到绝缘体中的电导体上。 隔膜抵抗径向移动,同时允许轴向运动,从而使传感器对径向力不敏感。 通过作为恒力弹簧,隔膜使传感器对温度变化不敏感。

    Small heat and electricity generating plant
    7.
    发明授权
    Small heat and electricity generating plant 失效
    小型发电厂

    公开(公告)号:US5903060A

    公开(公告)日:1999-05-11

    申请号:US464392

    申请日:1995-06-05

    Applicant: Peter Norton

    Inventor: Peter Norton

    CPC classification number: F02G5/02 F24H1/186 F24H2240/00 Y02E20/14 Y02T10/166

    Abstract: A combined heat and electricity generating unit is suitable for use in single family homes and the like. When it is operating it provides heat for heating the home and electricity for use by the electricity consuming devices in the home and the excess is available for sale to the power utility. It includes an air compressor, a fuel pump, a turbine driven by heated combustion products and an electric motor-generator for driving the fuel pump and air compressor and converting energy produced by the turbine to electricity. In an alternate embodiment the electric motor-generator is replaced by an electric motor and an electric generator. In the case where gaseous fuel is used the fuel pump may be a positive displacement gas compressor. The pressurized combustion products enable a particularly efficient and inexpensive heat exchanger. The air compressor maintains a slight vacuum in the housing thereby eliminating risk of combustion products escaping.

    Abstract translation: 联合发电机组适用于单户住宅等。 当它运行时,它提供用于加热住宅和用电的热量供住宅中的电力消耗装置使用,并且剩余物可以出售给电力公司。 其包括空气压缩机,燃料泵,由加热燃烧产物驱动的涡轮机和用于驱动燃料泵和空气压缩机的电动发电机,并且将由涡轮机产生的能量转换成电力。 在替代实施例中,电动发电机由电动机和发电机代替。 在使用气体燃料的情况下,燃料泵可以是容积式气体压缩机。 加压燃烧产物能够实现特别有效和便宜的热交换器。 空气压缩机在壳体中保持轻微的真空,从而消除了燃烧产物逸出的风险。

    Compact crash sensing switch with air ducts and diagnostic system
    8.
    发明授权
    Compact crash sensing switch with air ducts and diagnostic system 失效
    紧凑型碰撞检测开关带有风道和诊断系统

    公开(公告)号:US5892193A

    公开(公告)日:1999-04-06

    申请号:US464407

    申请日:1995-06-05

    Applicant: Peter Norton

    Inventor: Peter Norton

    Abstract: A crash sensor for automobiles of the type including a ball moving against viscous damping in a closed tube has a much smaller ball than known designs and a power transistor to switch power in the firing circuit. A resistance sensing circuit enables the crash sensor to monitor the firing circuit and indicate a change in the resistance of the firing circuit. In two embodiments simple message patterns allow communication of diagnostic information through existing wiring. A latching circuit maintains the switch in its closed state after initial closing. The small size of the ball enables use of a plastic or aluminum tube. The tube may have fluted walls that form air ducts that viscously conduct much of the air displaced when the ball moves. Routing most of the air through the ducts eliminates the uncertainty in the viscous resistance resulting when all of the air flows between the ball and the inner diameter of the tube. The movable element may be a sensing mass having a nonspherical shape. Compensation for the variation of air viscosity with temperature may be obtained by varying the normal resting position of the sensing mass as a function of temperature or by varying the size of the air ducts. The small sensing mass and electronic components allow simple contacts. The combination of these elements provides a crash sensing and diagnostic system costing much less than known systems.

    Abstract translation: 用于汽车的碰撞传感器包括在封闭管中抵抗粘性阻尼的球移动的球具有比已知设计小得多的球和用于切换点火回路中的动力的功率晶体管。 电阻感测电路使得​​碰撞传感器能够监测点火电路并指示点火电路的电阻的变化。 在两个实施例中,简单的消息模式允许通过现有布线来传送诊断信息。 闭锁电路在初次关闭后将开关保持在关闭状态。 小尺寸的球可以使用塑料或铝管。 管可以具有形成空气管道的槽纹壁,其在球移动时粘性地传导大部分被移动的空气。 通过导管路由大部分空气消除了当所有空气在球体和管内径之间流动时产生的粘性阻力的不确定性。 可移动元件可以是具有非球形形状的感测块。 通过改变感测质量的正常静止位置作为温度的函数或通过改变空气管道的尺寸,可以获得空气粘度随温度变化的补偿。 小型传感质量和电子元件允许简单的接触。 这些元件的组合提供了比已知系统低得多的碰撞感测和诊断系统。

    Vibrator for subjecting an object to vibration
    9.
    发明授权
    Vibrator for subjecting an object to vibration 失效
    用于使物体振动的振动器

    公开(公告)号:US5386728A

    公开(公告)日:1995-02-07

    申请号:US840762

    申请日:1992-02-24

    CPC classification number: B06B1/045 G01M7/06 H02K33/18

    Abstract: Apparatus is disclosed for subjecting a test object to a vibration test. A preferred embodiment of the apparatus uses a flat coil assembly with an arrangement of permanent magnets. The vibrator is small and light weight. Hinge structures are disclosed which permit the vibrator to be used in conjunction with a shock testing machine or with other vibrators. This vibrator design is easily adapted for use for cross-axis testing of airbag crash sensors and for one, two or three axis screening applications.

    Abstract translation: 公开了用于使测试对象进行振动测试的装置。 该装置的优选实施例使用具有永磁体布置的扁平线圈组件。 振动器体积小,重量轻。 公开了铰链结构,其允许振动器与冲击试验机或与其它振动器结合使用。 该振动器设计易于适用于气囊碰撞传感器和一个,两个或三个轴筛选应用的横轴测试。

    Dual or single voltage vehicular power supply with improved switch
driver and load dump
    10.
    发明授权
    Dual or single voltage vehicular power supply with improved switch driver and load dump 失效
    双电源或单电压车载电源,具有改进的开关驱动器和负载突降

    公开(公告)号:US5166538A

    公开(公告)日:1992-11-24

    申请号:US585582

    申请日:1990-09-19

    Applicant: Peter Norton

    Inventor: Peter Norton

    Abstract: A dual voltage power supply is disclosed for vehicles equipped with a DC generator, a single storage battery, a low voltage load circuit including the storage battery, and a high voltage load circuit including load devices designed to be powered by voltages higher than the battery voltage. At times when higher voltage power is required a low voltage regulator that includes a high current semiconductor switch converts power at the generator output voltage to power at a lower voltage for charging the battery and supplying the low voltage load circuit. There is a single voltage mode of operation when higher voltage power is not required in which the alternator is regulated to supply power at the voltage required by the low voltage load circuit and the high current semiconductor switch is held in its closed state to directly connect the generator output with the low voltage load circuit. The low voltage regulator is a switching DC to DC voltage converter with an N channel mosfet power transistor switch controlled by an improved driver circuit. The driver circuit has a floating totem pole output and a capacitively coupled input and is assisted by a pull down circuit and current from a low current supply. An input accepts a signal controlling whether the system operates in dual or single voltage mode. One or more transient absorbing semiconductors and a circuit for rapidly decreasing rotor current limit the duration of alternator overvoltage.

    Abstract translation: 公开了一种双电压电源,用于配备有DC发电机,单个蓄电池,包括蓄电池的低压负载电路的车辆,以及高压负载电路,其包括被设计为由高于电池电压的电压供电的负载装置 。 有时需要较高的电压电源时,包括高电流半导体开关的低电压调节器将发电机输出电压的功率转换为较低的电压,以对电池充电并提供低压负载电路。 当不需要更高的电压功率时,交流发电机被调节为以低电压负载电路所需的电压供电并且高电流半导体开关保持在其闭合状态以直接连接 发电机输出与低压负载电路。 低压稳压器是一个开关直流到直流电压转换器,由改进的驱动电路控制的N沟道MOSFET功率晶体管开关。 驱动器电路具有浮动图腾柱输出和电容耦合输入,并由下拉电路和来自低电流源的电流辅助。 一个输入接受控制系统是在双电压还是单电压模式下工作的信号。 一个或多个瞬态吸收半导体和用于快速减小转子电流的电路限制交流发电机过电压的持续时间。

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