公开(公告)号：US6100971A

公开(公告)日：2000-08-08

申请号：US841037

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9506

Abstract: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. Although slightly offset the reflected beam is routed back through the telecentric lens and scanner which are used for the incident beam. Preferably an aperture mask is placed in the path of the reflected beam and the incident beam to limit the cone of scattered light. Since the incident and reflected beams are physically separated, there may be an aperture for each beam, but the two masks may be physically connected. The aperture masks may also be used for alignment adjustments of the beams.

Abstract translation: 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的实施例中，入射光束以与垂直稍微偏移的角度被引导到要检查的表面上，使得反射光束与入射光束物理分离。 虽然稍微偏移，但是反射光束通过用于入射光束的远心透镜和扫描仪返回。 优选地，孔径掩模被放置在反射光束和入射光束的路径中以限制散射光的锥体。 由于事件和反射光束在物理上是分开的，所以每个光束可能有孔径，但是两个掩模可以物理连接。 光圈掩模也可用于光束的对准调整。

公开(公告)号：US5986761A

公开(公告)日：1999-11-16

申请号：US110925

申请日：1998-07-06

Applicant: Linden Crawforth ,  Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Hal Jervis Rosen

Inventor： Linden Crawforth ,  Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Hal Jervis Rosen

IPC: G01B11/30 ,  G01N21/88

CPC classification number: G01B11/306 ,  G01N21/88

Abstract: A laser-based inspection tool (LIT) for disks that allows simultaneous inspection of disk surfaces for defects and curvature. The laser beam is directed by a rotating scanner, such as a rotating polygon mirror, to the input of a telecentric lens assembly that provides an output beam parallel to its optical axis as the beam is being scanned. The output beam from the telecentric lens strikes the disk surface substantially perpendicularly. The beam is then reflected from the disk surface and passes back through a collection lens to the sensing surface of an optical detector. The detector outputs analog signals that represent the X and Y positions on the sensing surface where the reflected light beam is incident, which thus correspond to the slope of the disk surface at the point where the laser beam was incident. A mechanical disk lifter moves the disk in a plane parallel to the disk surface so that different scan lines can be generated on the disk surface. A processor, such as a personal computer, receives the output signals from the detector and calculates the slope values, and from the slope values, the curvature of the disk surface. A large number of points on each scan line are sampled, and a large number of scan lines are generated, so that the disk surface curvature can be calculated at various locations and over various ranges of the disk surface. The large number of sample points and the rapid calculation of slope values enables the shape of disk surface defects to be determined, which allows the disk defects to be classified as pits or bumps.

Abstract translation: 用于磁盘的基于激光的检测工具（LIT），允许同时检查磁盘表面的缺陷和曲率。 激光束由诸如旋转多面镜的旋转扫描器引导到远心透镜组件的输入端，当远射镜被扫描时，其提供平行于其光轴的输出光束。 来自远心透镜的输出光束大致垂直地撞击盘表面。 光束然后从盘表面反射并通过收集透镜返回到光学检测器的感测表面。 检测器输出表示反射光束入射的感测表面上的X和Y位置的模拟信号，其因此对应于激光束入射点处的盘表面的斜率。 机械盘式升降机使盘在平行于盘表面的平面内移动，从而可以在盘表面上产生不同的扫描线。 诸如个人计算机的处理器从检测器接收输出信号并计算斜率值，并从斜率值计算出盘表面的曲率。 对每个扫描线上的点数进行采样，并产生大量的扫描线，从而可以在各种位置和盘表面的各种范围内计算盘表面曲率。 大量采样点和斜率值的快速计算可以确定磁盘表面缺陷的形状，从而可以将磁盘缺陷分类为凹坑或凸块。

公开(公告)号：US5847823A

公开(公告)日：1998-12-08

申请号：US840355

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  James Hammond Brannon

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  James Hammond Brannon

IPC: G01N21/93 ,  G01N21/95 ,  G11B7/0037 ,  G11B7/26 ,  G02B5/00 ,  G01N21/88

CPC classification number: G01N21/93 ,  G01N21/9506 ,  G11B7/00375 ,  G11B7/26 ,  Y10S430/146

Abstract: A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.

Abstract translation: 描述了用于检查平面的激光检测工具（LIT）的校准盘。 校准盘具有形成具有一个凸块的宽度的圆环的多个重叠凸块。 凸起的圆形环形成了盘上已知宽度和位置的特征，其可用于调节一个或多个LIT以产生校正结果。

公开(公告)号：US5898492A

公开(公告)日：1999-04-27

申请号：US937886

申请日：1997-09-25

Applicant: Wayne Isami Imaino ,  Milton Russell Latta

Inventor： Wayne Isami Imaino ,  Milton Russell Latta

IPC: G01N21/94 ,  G01N21/88

CPC classification number: G01N21/94

Abstract: A laser based inspection tool is described which is particularly useful for inspecting one or both planar surfaces of disks for use in disk drives. The tool uses low angle reflected light and large angle scattered (LAS) light from the surface which are separately detected and pixelated to create a reflected light image and a scattered light image. The tool uses a mechanical lifter which moves the disk through the laser scan lines to allow the surface on one or both sides of the disk to be scanned. The line scanning is performed using a rotating polygon mirror (scanner) which also captures the beam reflected from the disk surface. A telecentric lens assembly (TLA) acts to ensure that the laser beam is incident at a substantially constant, nearly perpendicular angle as the beam scans across the disk and to direct the reflected and scattered light back onto the scanner. The LAS light is captured by a pair of plano mirrors disposed above and below the scan line. The two cones of LAS light from the plano mirrors are directed back through the TLA along with the reflected light onto the polygon. The LAS light is then separated from the reflected light by a beam splitter and the intensities of the two separated beams are converted into sampled digital values which are processed to form two images of the surface. These two images are used in combination to detect defects in the disk surface and to avoid false rejections. The LAS image is useful in determining that deviations in the reflected light are likely to be a particle adhering to the surface and not a true defect. The LAS image and the reflected light image are available for various types of analysis and comparison making the tool adaptable for a wide variety of surface inspection techniques.

Abstract translation: 描述了一种基于激光的检测工具，其特别适用于检查在盘驱动器中使用的盘的一个或两个平面。 该工具使用来自表面的低角度反射光和大角度散射（LAS）光，这些光被单独检测和像素化，以产生反射光图像和散射光图像。 该工具使用一个机械提升器，它通过激光扫描线移动光盘，以便扫描光盘一面或两面的表面。 使用旋转多面镜（扫描仪）执行线扫描，旋转多面镜还捕获从盘表面反射的光束。 远心透镜组件（TLA）用于确保激光束以大致恒定的近似垂直的角度入射，因为光束扫过光盘并将反射和散射光引导回扫描仪。 LAS光被放置在扫描线上方和下方的一对平面镜捕获。 来自平面镜的LAS光的两个锥体被反射通过TLA以及多个反射光。 然后通过分束器将LAS光与反射光分离，并且将两个分离的光束的强度转换为被处理以形成表面的两个图像的采样数字值。 这两个图像组合使用以检测磁盘表面中的缺陷并避免错误拒绝。 LAS图像可用于确定反射光中的偏差可能是附着在表面上的颗粒而不是真实缺陷。 LAS图像和反射光图像可用于各种类型的分析和比较，使得该工具适用于各种表面检查技术。

公开(公告)号：US6117620A

公开(公告)日：2000-09-12

申请号：US205667

申请日：1998-12-04

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  James Hammond Brannon

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  James Hammond Brannon

IPC: G01N21/93 ,  G01N21/95 ,  G11B7/0037 ,  G11B7/26 ,  G03C5/16

CPC classification number: G01N21/93 ,  G01N21/9506 ,  G11B7/00375 ,  G11B7/26 ,  Y10S430/146

Abstract: A method of making a calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results. The ring of overlapping bumps is preferably formed by rotating a disk substrate under a stationary pulsing laser beam.

Abstract translation: 描述了一种制造用于检查平面的激光检测工具（LIT）的校准盘的方法。 校准盘具有形成具有一个凸块的宽度的圆环的多个重叠凸块。 凸起的圆形环形成了盘上已知宽度和位置的特征，其可用于调节一个或多个LIT以产生校准结果。 优选地，通过在静止的脉冲激光束下旋转盘基片来形成重叠凸块的环。

公开(公告)号：US5969370A

公开(公告)日：1999-10-19

申请号：US840358

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

IPC: G01N21/88 ,  G11B7/0037 ,  G11B7/26

CPC classification number: G01N21/88 ,  G11B7/00375 ,  G11B7/26

Abstract: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, a disk is moved into an inspection subcompartment between a pair of air knives which blow partially ionized air onto the planar sides of the disk to remove loose particles adhering thereto. After the disk moves through the air knife streams, the two laser beams scan the two sides of the disk. Preferably the scan occurs after the air knives have been turned off and as the disk moves out of the inspection subcompartment. The subcompartment may optionally have an air source which forces air to flow out of the subcompartment to aid in maintaining a clean environment for inspection.

Abstract translation: 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，盘被移动到一对气刀之间的检查子舱中，所述气刀将部分电离空气吹送到盘的平面侧以除去附着在其上的松散颗粒。 在磁盘移动通过气刀流之后，两个激光束扫描磁盘的两侧。 优选地，扫描发生在气刀已经关闭之后并且当盘移出检查子舱室时。 子舱可以可选地具有迫使空气流出子舱的空气源，以帮助保持清洁的环境以供检查。

公开(公告)号：US5933230A

公开(公告)日：1999-08-03

申请号：US840354

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen

IPC: G01N21/88 ,  G01N21/94 ,  G01N21/00

CPC classification number: G01N21/94 ,  G01N21/8806

Abstract: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The choice of a polygon scanner is preferred, but other scanning means such as a galvonometer mirror could be used. A separate polygon scanner is used for each side of the disk. The polygons are arranged in a common plane, but rotate in opposite directions to reduce the inteference which might otherwise result when the beams pass through the central hole in the disk and impinge on the detection channel for the other side. Preferably the rotation of the polygons is synchonized and angularly offset so that the two beams are synchonized and offset. The rotating polygons may conveniently be included in a system which scans each of the two laser beams through a telecentric lens assembly onto the surface and which routes the reflected light which passes back through the telecentric lens and is reflected from the polygons to the detection component.

Abstract translation: 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 多边形扫描器的选择是优选的，但是可以使用诸如电流计镜之类的其它扫描装置。 磁盘的每一侧都使用单独的多边形扫描器。 多边形布置在公共平面中，但是沿相反方向旋转以减小当光束通过盘中的中心孔并且撞击到另一侧的检测通道时可能导致的干涉。 优选地，多边形的旋转被同步并且成角度地偏移，使得两个光束被同步和偏移。 旋转的多边形可以方便地包括在将两个激光束中的每一个通过远心透镜组件扫描到表面上并且将穿过远心透镜返回的反射光路由并从多边形反射到检测部件的系统中。

公开(公告)号：US06704435B1

公开(公告)日：2004-03-09

申请号：US08841214

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

Inventor： Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

IPC: G06K900

CPC classification number: G01N21/9506

Abstract: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. The reflected beam is routed to a detector which converts the intensity of the reflected into an analog signal. The analog signal is sampled and digitized to generate pixel data stored in a buffer. Various analyses are performed on the data including calculating a rate of change in the pixel data. If the rate of change in the pixel data exceeds a selected threshold that indicates a possible defect if it occurs in the data area of the disk.

Abstract translation: 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，入射光束以与垂直稍微偏移的角度被引导到待检查的表面上，使得反射光束与入射光束物理分离。 反射光束被路由到检测器，该检测器将反射的强度转换成模拟信号。 模拟信号被采样和数字化以产生存储在缓冲器中的像素数据。 对包括计算像素数据的变化率的数据进行各种分析。 如果像素数据的变化率超过选择的阈值，如果在磁盘的数据区域中发生可能的缺陷则表示可能的缺陷。

公开(公告)号：US06614519B1

公开(公告)日：2003-09-02

申请号：US09696864

申请日：2000-10-25

Applicant: Milton Russell Latta ,  Wai Cheung Leung ,  Bob C. Robinson ,  Timothy Carl Strand ,  Andrew Ching Tam

Inventor： Milton Russell Latta ,  Wai Cheung Leung ,  Bob C. Robinson ,  Timothy Carl Strand ,  Andrew Ching Tam

IPC: G01N2188

CPC classification number: G01N21/9506

Abstract: An inspection system using laser light directed at an off-axis parabolic mirror which focuses the beam on the surface being inspected and also serves as the collector for scattered and specular light returned from the surface is described. Specular and scattered light returned from the surface onto the parabolic mirror is divided into appropriate fields and directed onto detectors. In the preferred embodiment a polarized laser is used in conjunction with a polarizing beam splitter and a quarter-wave plate to route the reflected beam to a detector while allowing the original beam to be directed through the same optics. The parabolic mirror and selected additional components may be commonly mounted on a translatable stage which is moved along a radius of the disk when the optical inspection is being performed. Other components of the system such as the laser can remain in a fixed position. The system of the invention can be used to inspect one or both planar surfaces of the disk by providing duplication of selected components appropriately oriented with respect to the second surface.

Abstract translation: 描述了一种使用指向离轴抛物面镜的激光的检查系统，其将光束聚焦在被检查的表面上，并且还用作用于从表面返回的散射和镜面光的收集器。 从表面返回到抛物面镜的镜面和散射光被划分成适当的场并被引导到探测器上。 在优选实施例中，偏振激光器与偏振分束器和四分之一波长板结合使用以将反射光束路由到检测器，同时允许原始光束被引导通过相同的光学器件。 抛物面镜和所选择的附加部件可以通常安装在可平移台上，当可执行光学检查时，抛物面镜沿着盘的半径移动。 诸如激光器的系统的其他部件可以保持在固定位置。 本发明的系统可用于通过提供相对于第二表面适当取向的选定部件的复制来检查盘的一个或两个平面。

公开(公告)号：US06624884B1

公开(公告)日：2003-09-23

申请号：US08840351

申请日：1997-04-28

Applicant: Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

Inventor： Wayne Isami Imaino ,  Anthony Juliana, Jr. ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

IPC: G01N2188

CPC classification number: G01N21/88

Abstract: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.

Abstract translation: 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，从表面以从垂直方向稍微偏离的角度反射的光通过远心透镜被路由到检测器，该检测器将反射光束的强度转换为模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。 可选的校准系统周期性地将扫描光束反射回检测器以形成用于绝对反射率测量的参考信号。