Method Of Manufacturing Semiconductor Device Including Wiring Layout And Semiconductor Device
    1.
    发明申请
    Method Of Manufacturing Semiconductor Device Including Wiring Layout And Semiconductor Device 失效
    包括布线和半导体器件的半导体器件的制造方法

    公开(公告)号:US20100295184A1

    公开(公告)日:2010-11-25

    申请号:US12771067

    申请日:2010-04-30

    CPC classification number: H01L23/53295 H01L23/528 H01L2924/0002 H01L2924/00

    Abstract: A method of manufacturing a semiconductor device having a first wiring layer, a first interlayer insulating film, a second interlayer insulating film, a third interlayer insulating film, and a second wiring layer, in which the method includes depositing the second wiring layer on the third interlayer insulating film and, where the widths of first wiring layer and the second wiring layer are 10.0 μm or greater, executing one of etching the second wiring layer to set a width of 1.0 μm or greater in a portion where the first wiring layer and the second wiring layer overlap and etching the second wiring layer to seta horizontal distance of 2.0 μm or greater between adjacent portions of the first wiring layer and the second wiring layer.

    Abstract translation: 一种制造具有第一布线层,第一层间绝缘膜,第二层间绝缘膜,第三层间绝缘膜和第二布线层的半导体器件的方法,其中所述方法包括在第三布线层上沉积第二布线层 层间绝缘膜,并且其中第一布线层和第二布线层的宽度为10.0μm以上,在第一布线层和第二布线层的部分中执行蚀刻第二布线层以设定1.0μm以上的宽度 第二布线层重叠并蚀刻第二布线层,以在第一布线层和第二布线层的相邻部分之间设定2.0μm以上的水平距离。

    Image forming system
    4.
    发明授权
    Image forming system 失效
    图像形成系统

    公开(公告)号:US4739231A

    公开(公告)日:1988-04-19

    申请号:US8133

    申请日:1987-01-22

    CPC classification number: G03G15/041 G05B19/108

    Abstract: There is provided a moving body control device comprising a motor for driving a moving body, detector for detecting the speed of the motor, memory for storing a program for the phase comparison control of the speed of the motor, and control means for controlling the motor according to said program by inputting the output from the detector.

    Abstract translation: 提供了一种移动体控制装置,包括用于驱动移动体的马达,用于检测马达的速度的检测器,用于存储用于马达的速度的相位比较控制的程序的存储器,以及用于控制马达的控制装置 根据所述程序,通过输入来自检测器的输出。

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