摘要:
A carbon film laminate 1 having a porous substrate 6 formed of a plurality of particles and a carbon film 2 provided on a surface of the porous substrate 6, wherein the porous substrate 6 includes a surface layer 3 which is in contact with the carbon film 2 and which is formed of particles 3a having a mean particle size of 0.01 to 0.11 μm, and a porous body 5 formed of particles having a mean particle size differing from that of the particles 3a forming the surface layer 3. The invention provides a carbon film laminate which does not generate cracks and pinholes of the carbon film and which is suitable for producing thin film thereof.
摘要:
A carbon film laminate 1 having a porous substrate 6 formed of a plurality of particles and a carbon film 2 provided on a surface of the porous substrate 6, wherein the porous substrate 6 includes a surface layer 3 which is in contact with the carbon film 2 and which is formed of particles 3a having a mean particle size of 0.01 to 0.11 μm, and a porous body 5 formed of particles having a mean particle size differing from that of the particles 3a forming the surface layer 3. The invention provides a carbon film laminate which does not generate cracks and pinholes of the carbon film and which is suitable for producing thin film thereof.