公开(公告)号：US07192882B2

公开(公告)日：2007-03-20

申请号：US10500310

申请日：2002-12-27

Applicant: Leif Bergstedt ,  Spartak Gevorgian ,  Marica Gustafsson

Inventor： Leif Bergstedt ,  Spartak Gevorgian ,  Marica Gustafsson

IPC: H01L21/302

CPC classification number: H01P11/008

Abstract: The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.

Abstract translation: 本发明涉及一种用于制造用于电磁波部件的衬底中的空腔的方法，所述方法包括通过将衬底浸入化学蚀刻剂的液体浴中去除材料来从所述衬底移除材料来提供所述腔体， 使得所得到的空腔具有顶侧和底侧以及侧壁，并且所述顶部和/或底侧中的一个处的所述空腔具有至少四边形开口，该开口具有至少两个不同相邻角度的开口。 本发明还涉及用于微波应用的组件。

公开(公告)号：US20050215020A1

公开(公告)日：2005-09-29

申请号：US10500310

申请日：2002-12-27

Applicant: Leif Bergstedt ,  Spartak Gevorgian ,  Marica Gustafsson

Inventor： Leif Bergstedt ,  Spartak Gevorgian ,  Marica Gustafsson

IPC: B81C1/00 ,  H01P11/00 ,  H01L21/8222

CPC classification number: H01P11/008

Abstract: The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.

Abstract translation: 本发明涉及一种用于制造用于电磁波部件的衬底中的空腔的方法，所述方法包括通过将衬底浸入化学蚀刻剂的液体浴中去除材料来从所述衬底去除材料来提供所述空腔， 使得所得到的空腔具有顶侧和底侧以及侧壁，并且所述顶部和/或底侧中的一个处的所述空腔具有至少四边形开口，该开口具有至少两个不同相邻角度的开口。 本发明还涉及用于微波应用的组件。