Invention Grant
- Patent Title: Component for electromagnetic waves and a method for manufacturing the same
- Patent Title (中): 电磁波用部件及其制造方法
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Application No.: US10500310Application Date: 2002-12-27
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Publication No.: US07192882B2Publication Date: 2007-03-20
- Inventor: Leif Bergstedt , Spartak Gevorgian , Marica Gustafsson
- Applicant: Leif Bergstedt , Spartak Gevorgian , Marica Gustafsson
- Applicant Address: SE Stockholm
- Assignee: Telefonaktiebolaget LM Ericsson (publ)
- Current Assignee: Telefonaktiebolaget LM Ericsson (publ)
- Current Assignee Address: SE Stockholm
- Agency: Nixon & Vanderhye, P.C.
- Priority: SE0104442 20011228
- International Application: PCT/SE02/02457 WO 20021227
- International Announcement: WO03/056657 WO 20030710
- Main IPC: H01L21/302
- IPC: H01L21/302
Abstract:
The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.
Public/Granted literature
- US20050215020A1 Component for electromagnetic waves and a method for manufacturing the same Public/Granted day:2005-09-29
Information query
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