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公开(公告)号:US20200149766A1
公开(公告)日:2020-05-14
申请号:US16628215
申请日:2018-07-05
发明人: Toshiro Kisakibaru , Isao Honbori , Akira Yamazaki
摘要: A device that can accurately detect clogging of a filter and that has a simple structure is provided. A device for measuring clogging of a filter in an air conditioner (2) having a blower (30) that blows gas (40), (42) through a duct (10) and a filter (20) that is provided in the duct (10) and filters dust floating in the gas, comprises a device (26) for measuring a sound pressure that is provided in the duct (10), a data processor (70) that extracts data on the sound pressure at a specific frequency from the data on the sound pressure that have been measured by means of the device (26) for measuring a sound pressure, and an estimating device (70) that estimates clogging of the filter based on the data on the sound pressure at the specific frequency that have been extracted by means of the data processor (70).
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公开(公告)号:US20170292107A1
公开(公告)日:2017-10-12
申请号:US15512667
申请日:2015-09-15
摘要: An object of the present invention is to provide: an algae water concentration system that efficiently concentrates algae water in a culture pond into algae water containing algae having a desired size, with a simple structure and at low cost; and a method for operating the same. A cultured algae water concentration system 100 comprises: an algae water supply unit 17 that has an algae water supply container 18 that stores algae water sent from the culture pond therein, and a supply container outlet port 19 through which the algae water is taken out from the algae water supply container; and an algae water concentration unit that has a concentration container 1 for receiving and concentrating the algae water from the algae water supply unit, a filter 3 which divides the concentration container into upper and lower spaces and does not pass algae having a predetermined size or larger therethrough, a vibration device 5 that vibrates the filter in an out-of-plane direction, a concentration container algae water inlet port 7 which takes in the algae water to the concentration container and is arranged below the filter of the concentration container, a concentrated algae water outlet port 9 that is arranged below the filter of the concentration container and takes out algae water therethrough that has been concentrated in the concentration container, and a filtered water discharge port 8 that is arranged above the filter of the concentration container and discharges filtered water having passed through the filter.
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公开(公告)号:US10508261B2
公开(公告)日:2019-12-17
申请号:US15512667
申请日:2015-09-15
摘要: An object of the present invention is to provide: an algae water concentration system that efficiently concentrates algae water in a culture pond into algae water containing algae having a desired size, with a simple structure and at low cost; and a method for operating the same. A cultured algae water concentration system 100 comprises: an algae water supply unit 17 that has an algae water supply container 18 that stores algae water sent from the culture pond therein, and a supply container outlet port 19 through which the algae water is taken out from the algae water supply container; and an algae water concentration unit that has a concentration container 1 for receiving and concentrating the algae water from the algae water supply unit, a filter 3 which divides the concentration container into upper and lower spaces and does not pass algae having a predetermined size or larger therethrough, a vibration device 5 that vibrates the filter in an out-of-plane direction, a concentration container algae water inlet port 7 which takes in the algae water to the concentration container and is arranged below the filter of the concentration container, a concentrated algae water outlet port 9 that is arranged below the filter of the concentration container and takes out algae water therethrough that has been concentrated in the concentration container, and a filtered water discharge port 8 that is arranged above the filter of the concentration container and discharges filtered water having passed through the filter.
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公开(公告)号:US20190206704A1
公开(公告)日:2019-07-04
申请号:US16322365
申请日:2017-08-03
发明人: Toshiro KISAKIBARU , Kouta UENO , Isao HONBORI , Satoki SUGIYAMA
IPC分类号: H01L21/67 , H01L21/677 , H01L21/687 , B06B1/06 , B65G47/90
CPC分类号: H01L21/67092 , B06B1/0607 , B65G47/90 , H01L21/02 , H01L21/67115 , H01L21/677 , H01L21/6773 , H01L21/68707
摘要: An apparatus for manufacturing semiconductors is provided by which adhesion of moisture to a wafer in an EFEM is easily prevented. The apparatus 1 for manufacturing the semiconductors comprises processing equipment 30 that processes a wafer 90, a FOUP 40 that supplies the wafer 90 and that houses the wafer 90 that has been processed, an EFEM 10 that transfers the wafer 90 between the FOUP 40 and the processing equipment 30, a fan and filter unit 20 that sends an airflow 72 from above to the EFEM 10, an ultrasonic oscillator 52 that generates high-frequency power, and a vibrator 54 that generates ultrasonic waves 80 by using the high-frequency power that is generated by the ultrasonic oscillator 52 and that applies the ultrasonic waves 80 to the wafer 90 that is transported in the EFEM 10 and that has been processed.
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