公开(公告)号：US20110227457A1

公开(公告)日：2011-09-22

申请号：US13031107

申请日：2011-02-18

申请人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki ,  Mitoshi Umeki ,  Kenichi Kikuchi

发明人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki ,  Mitoshi Umeki ,  Kenichi Kikuchi

IPC分类号： H01L41/047 ,  H01L41/053 ,  C23F1/12

CPC分类号： H03H9/177 ,  H03H3/02 ,  H03H9/1014 ,  H03H9/131 ,  H03H2003/022

摘要： Piezoelectric vibrating pieces are disclosed having selectively roughened surfaces. An exemplary piece is made of a piezoelectric material configured as a piezoelectric substrate. The piece also includes at least one excitation electrode and at least one extraction electrode. The substrate has opposing main surfaces initially having low surface roughness. At least one main surface is formed in a mesa or reverse mesa manner, wherein the central region has a different thickness than the peripheral region. The central region has relatively low surface roughness (irregular unevenness), while the peripheral region has relatively high surface roughness. The excitation electrode is formed on the central region (mesa or reverse mesa) while the extraction electrode (connected to the excitation electrode) is formed on the peripheral region.

摘要翻译： 公开了具有选择性粗糙表面的压电振动片。 示例性部件由构造为压电基板的压电材料制成。 该片还包括至少一个激励电极和至少一个引出电极。 基板具有相对的主表面，最初具有低的表面粗糙度。 至少一个主表面以台面或反台面方式形成，其中中心区域的厚度与周边区域不同。 中心区域具有相对低的表面粗糙度（不规则凹凸），而周边区域具有较高的表面粗糙度。 激发电极形成在中心区域（台面或反向台面）上，而引出电极（连接到激励电极）形成在周边区域上。

公开(公告)号：US20110203083A1

公开(公告)日：2011-08-25

申请号：US13030394

申请日：2011-02-18

申请人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

发明人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

IPC分类号： H01L41/22

CPC分类号： H03H3/02 ,  H01L41/332 ,  H03H9/1014 ,  H03H9/1021 ,  H03H9/1035 ,  H03H9/131 ,  H03H9/177 ,  H03H2003/022 ,  Y10T29/42

摘要： An exemplary method for a producing a piezoelectric vibrating piece having at least one mesa step includes forming a metal film on a main surface of a piezoelectric wafer. A through-groove is formed through the thickness of the wafer to form a plan profile of a desired piezoelectric substrate. A film of photoresist is formed on the surface of the metal film. A resist is applied, exposed, and formed into a resist pattern that defines a first mesa step along at least a portion of the plan profile. In regions not protected by the metal film, the piezoelectric substrate is etched to a defined depth to form a mesa step. The denuded edge surface of the metal film is edge-etched. A second mesa step, inboard of the first mesa step, can be formed by repeating the edge-etching and substrate-etching steps using the metal film as an etch protective film.

摘要翻译： 用于生产具有至少一个台面台阶的压电振动片的示例性方法包括在压电晶片的主表面上形成金属膜。 通过晶片的厚度形成通槽，以形成期望的压电基板的平面轮廓。 在金属膜的表面上形成光致抗蚀剂膜。 抗蚀剂被施加，暴露并形成为沿着平面轮廓的至少一部分限定第一台面台阶的抗蚀剂图案。 在未被金属膜保护的区域中，将压电基板蚀刻到规定的深度以形成台面台阶。 金属膜的裸露边缘表面被边缘蚀刻。 可以通过重复使用金属膜作为蚀刻保护膜的边缘蚀刻和衬底蚀刻步骤来形成第一台面台阶内的第二台面台阶。

公开(公告)号：US08580126B2

公开(公告)日：2013-11-12

申请号：US13030394

申请日：2011-02-18

申请人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

发明人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

IPC分类号： C23F1/00

CPC分类号： H03H3/02 ,  H01L41/332 ,  H03H9/1014 ,  H03H9/1021 ,  H03H9/1035 ,  H03H9/131 ,  H03H9/177 ,  H03H2003/022 ,  Y10T29/42

摘要： An exemplary method for a producing a piezoelectric vibrating piece having at least one mesa step includes forming a metal film on a main surface of a piezoelectric wafer. A through-groove is formed through the thickness of the wafer to form a plan profile of a desired piezoelectric substrate. A film of photoresist is formed on the surface of the metal film. A resist is applied, exposed, and formed into a resist pattern that defines a first mesa step along at least a portion of the plan profile. In regions not protected by the metal film, the piezoelectric substrate is etched to a defined depth to form a mesa step. The denuded edge surface of the metal film is edge-etched. A second mesa step, inboard of the first mesa step, can be formed by repeating the edge-etching and substrate-etching steps using the metal film as an etch protective film.

摘要翻译： 用于生产具有至少一个台面台阶的压电振动片的示例性方法包括在压电晶片的主表面上形成金属膜。 通过晶片的厚度形成通槽，以形成期望的压电基板的平面轮廓。 在金属膜的表面上形成光致抗蚀剂膜。 抗蚀剂被施加，暴露并形成为沿着平面轮廓的至少一部分限定第一台面台阶的抗蚀剂图案。 在未被金属膜保护的区域中，将压电基板蚀刻到规定的深度以形成台面台阶。 金属膜的裸露边缘表面被边缘蚀刻。 可以通过重复使用金属膜作为蚀刻保护膜的边缘蚀刻和衬底蚀刻步骤来形成第一台面台阶内的第二台面台阶。

公开(公告)号：US08405286B2

公开(公告)日：2013-03-26

申请号：US13197937

申请日：2011-08-04

申请人： Kenji Shimao ,  Manabu Ishikawa ,  Hiroyuki Sasaki

发明人： Kenji Shimao ,  Manabu Ishikawa ,  Hiroyuki Sasaki

IPC分类号： H01L41/08

CPC分类号： H03H9/1021 ,  H03H9/02023 ,  H03H9/02157 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/177 ,  H03H9/19

摘要： The present disclosure provides a mesa-type AT-cut quartz-crystal vibrating piece, in which amount of the vibrating unit is adjusted to appropriate amount, in order to inhibit unnecessary vibration and to prevent degradation. The mesa-type AT-cut quartz-crystal vibrating piece (30) for vibrating piece vibrates at 38.400 MHz comprises a rectangular excitation unit (31), a peripheral region (32) formed in periphery of the excitation unit and thinner than the excitation unit. The thickness difference h (μm) between one principal surface of the excitation unit and the adjacent peripheral region is obtained by the following equation: h=(0.2×Mx)−143 The length of the x-axis direction of the crystallographic X-axis is Mx (μm).

摘要翻译： 本公开提供了一种台面型AT切割石英振动片，其中将振动单元的量调整到适当的量，以便抑制不必要的振动并防止劣化。 用于振动片的台面型AT切割石英振动片（30）在38.400MHz振动时，包括矩形激励单元（31），形成在激励单元周围的周边区域（32），并且比激励单元薄 。 激发单元的一个主表面与相邻周边区域之间的厚度差h（μm）通过以下等式获得：h =（0.2×M×）-143结晶X轴的x轴方向的长度 是Mx（μm）。

公开(公告)号：US20110049093A1

公开(公告)日：2011-03-03

申请号：US12806968

申请日：2010-08-25

申请人： Kenji Shimao

发明人： Kenji Shimao

IPC分类号： H01L41/22

CPC分类号： H03H9/1035

摘要： An object of the invention is to provide a method of manufacturing a stacked crystal resonator whereby a large number of stacked crystal resonators formed on a wafer can be easily broken away from the wafer, and the risk of damage to the outside surfaces and the like of the stacked crystal resonators is reduced. There is formed a framed crystal plate connected to a first wafer by a first support section, a cover connected to a second wafer by a second support section, and a base connected to a third wafer by a third support section, and a thickness of at least one of the first support section through third support section is thinner than a thickness the connected wafer.

摘要翻译： 本发明的目的是提供一种制造堆叠晶体谐振器的方法，由此可以容易地将从晶片上形成的大量层叠晶体谐振器从晶片上分离出来，并且损坏外表面等的风险 堆叠的晶体谐振器减少。 通过第一支撑部分形成与第一晶片连接的框架晶体板，通过第二支撑部分连接到第二晶片的盖子，以及通过第三支撑部分连接到第三晶片的基板， 通过第三支撑部分的第一支撑部分中的至少一个比连接的晶片的厚度薄。

公开(公告)号：US08525394B2

公开(公告)日：2013-09-03

申请号：US13223463

申请日：2011-09-01

申请人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki

发明人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki

IPC分类号： H01L41/09

CPC分类号： H03H9/1021 ,  H03H9/02157 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/177 ,  H03H9/19 ,  H03H2003/0435

摘要： To provide an AT-cut quartz-crystal vibrating piece in which size of the vibrating unit is adjusted to appropriate value, so that the unnecessary vibration is inhibited and degradation of its characteristics is prevented. A mesa-type AT-cut quartz-crystal vibrating piece for vibrating at 38.400 MHz comprising a rectangular excitation unit (31) and a peripheral region (32) formed on the periphery of the excitation unit and having a thickness less than the thickness of the excitation unit, is represented by the following equation: Mx/Gx=0.09×n−0.06 (n: natural number) . . . (1). Length of a crystallographic x-axis direction of the excitation unit is defined as Mx (mm) and length of the crystallographic x-axis direction of the peripheral region and excitation unit is defined as Gx (mm).

摘要翻译： 为了提供将振动单元的尺寸调节到适当值的AT切割石英振动片，从而抑制不必要的振动并防止其特性的劣化。 一种用于在38.400MHz振动的台式AT切割石英振动片，包括矩形激励单元（31）和形成在激励单元周围的外围区域（32），并且具有小于 励磁单元由下式表示：Mx / Gx = 0.09×n-0.06（n：自然数）。 。 。 （1）。 激发单元的结晶X轴方向的长度被定义为Mx（mm），周边区域的结晶x轴方向的长度和激励单元被定义为Gx（mm）。

公开(公告)号：US08519601B2

公开(公告)日：2013-08-27

申请号：US13426613

申请日：2012-03-22

申请人： Kenji Shimao ,  Manabu Ishikawa ,  Hiroyuki Sasaki

发明人： Kenji Shimao ,  Manabu Ishikawa ,  Hiroyuki Sasaki

IPC分类号： H01L41/08

CPC分类号： H03H9/1021 ,  H03H9/0519

摘要： A crystal device and an inspection method for inspecting the crystal device are provided. The crystal device includes: a crystal plate; excitation electrodes formed on the crystal plate; extraction electrodes extending from the excitation electrodes; electrode pads electrically connected with the extraction electrodes; a package including mounting terminals formed on a mounting surface and connection terminals formed on a bottom surface, which is on the other side of the mounting surface, and electrically connected with the mounting terminals; and an electrically-conductive adhesive agent bonding and fixing the connection terminals to the electrode pads. An bonding status inspection region, on which no metal film is formed, is formed in the crystal plate, and the bonding status inspection region is surrounded by or adjacent to the electrode pads. In addition, the bonding status inspection region occupies not more than 25% of the area of the electrode pads.

摘要翻译： 提供了一种用于检查晶体装置的晶体装置和检查方法。 晶体装置包括：晶体板; 形成在晶体板上的激励电极; 从激励电极延伸的提取电极; 与提取电极电连接的电极焊盘; 包括形成在安装表面上的安装端子和形成在底面上的连接端子的封装，所述连接端子位于所述安装表面的另一侧上并与所述安装端子电连接; 以及将连接端子接合并固定到电极焊盘的导电粘合剂。 在该晶体板中形成没有形成金属膜的接合状态检查区域，并且接合状态检查区域被电极焊盘包围或邻近。 此外，接合状态检查区域不超过电极焊盘面积的25％。

公开(公告)号：US09018826B2

公开(公告)日：2015-04-28

申请号：US13584829

申请日：2012-08-14

申请人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

发明人： Hiroyuki Sasaki ,  Kenji Shimao ,  Manabu Ishikawa

IPC分类号： H01L41/053 ,  H01L41/047 ,  H03H9/05 ,  H03H9/19 ,  H03H9/10 ,  H03H9/09

CPC分类号： H03H9/0595 ,  H03H9/09 ,  H03H9/1035 ,  H03H9/19

摘要： A mesa-type quartz-crystal vibrating piece includes a vibrator in a quadrangular shape with both main surfaces, a pair of excitation electrodes on both the main surfaces, a thin portion outside of the quadrangular shape, and a pair of extraction electrodes. The thin portion has a thickness thinner than a thickness of the vibrator. The pair of extraction electrodes are extracted from the excitation electrodes to a predetermined direction. A center of a first length in the predetermined direction of the excitation electrode is decentered from a center of a second length in the predetermined direction. The second length includes a length of the vibrator and a length of the thin portion. The center of the first length is decentered toward an opposite side of the extraction electrode by 25 μm to 65 μm.

摘要翻译： 台面型石英振动片包括具有两个主表面的四边形振动器，两个主表面上的一对激励电极，四边形外部的薄部分和一对提取电极。 该薄壁部的厚度比振动体的厚度薄。 将一对提取电极从激励电极提取到预定方向。 在激励电极的预定方向上的第一长度的中心从预定方向上的第二长度的中心偏心。 第二长度包括振动器的长度和薄部分的长度。 第一长度的中心朝向引出电极的相对侧偏心25μm至65μm。

公开(公告)号：US08541928B2

公开(公告)日：2013-09-24

申请号：US13419074

申请日：2012-03-13

申请人： Kenji Shimao ,  Takehiro Takahashi ,  Hiroyuki Sasaki ,  Manabu Ishikawa ,  Shinobu Yoshida

发明人： Kenji Shimao ,  Takehiro Takahashi ,  Hiroyuki Sasaki ,  Manabu Ishikawa ,  Shinobu Yoshida

IPC分类号： H01L41/08

CPC分类号： H03H9/1021 ,  H03H9/19

摘要： Quartz-crystal devices are disclosed, of which the CI value is reduced by adjusting the shortest distance between an edge of electrically conductive adhesive and an edge of the excitation electrode. The device has a quartz-crystal plate having long-edges and short-edges. Excitation electrodes are on first and second surfaces of the plate. Conductive pads are electrically connected to respective excitation electrodes and extend to the short-edge of the quartz-crystal plate. A package having a pair of external mounting terminals and respective connecting electrodes are situated on opposing sides of the mounting terminals for making electrical connections to the mounting terminals. An electrically conductive adhesive bonds the connecting terminals and respective conductive pads together, and the quartz-crystal plate onto the package. The shortest distance between an edge of the adhesive and an edge of the excitation electrode is 10%-15% the length of the quartz-crystal plate in the long-edge direction.

摘要翻译： 公开了石英晶体器件，其中通过调节导电粘合剂的边缘和激发电极的边缘之间的最短距离来减小CI值。 该装置具有长边缘和短边缘的石英晶片。 激励电极在板的第一和第二表面上。 导电垫电连接到各个激励电极并延伸到石英晶片的短边。 具有一对外部安装端子和相应的连接电极的封装设置在安装端子的相对侧上，用于与安装端子电连接。 导电粘合剂将连接端子和相应的导电焊盘接合在一起，并将石英晶片连接到封装上。 粘合剂的边缘与激发电极的边缘之间的最短距离在长边方向上为石英晶体板的长度的10％-15％。

公开(公告)号：US08415858B2

公开(公告)日：2013-04-09

申请号：US13031107

申请日：2011-02-18

申请人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki ,  Mitoshi Umeki ,  Kenichi Kikuchi

发明人： Manabu Ishikawa ,  Kenji Shimao ,  Hiroyuki Sasaki ,  Mitoshi Umeki ,  Kenichi Kikuchi

IPC分类号： H01L41/047

CPC分类号： H03H9/177 ,  H03H3/02 ,  H03H9/1014 ,  H03H9/131 ,  H03H2003/022

摘要： Piezoelectric vibrating pieces are disclosed having selectively roughened surfaces. An exemplary piece is made of a piezoelectric material configured as a piezoelectric substrate. The piece also includes at least one excitation electrode and at least one extraction electrode. The substrate has opposing main surfaces initially having low surface roughness. At least one main surface is formed in a mesa or reverse mesa manner, wherein the central region has a different thickness than the peripheral region. The central region has relatively low surface roughness (irregular unevenness), while the peripheral region has relatively high surface roughness. The excitation electrode is formed on the central region (mesa or reverse mesa) while the extraction electrode (connected to the excitation electrode) is formed on the peripheral region.

摘要翻译： 公开了具有选择性粗糙表面的压电振动片。 示例性部件由构造为压电基板的压电材料制成。 该片还包括至少一个激励电极和至少一个引出电极。 基板具有相对的主表面，最初具有低的表面粗糙度。 至少一个主表面以台面或反台面方式形成，其中中心区域的厚度与周边区域不同。 中心区域具有相对低的表面粗糙度（不规则凹凸），而周边区域具有较高的表面粗糙度。 激发电极形成在中心区域（台面或反向台面）上，而引出电极（连接到激励电极）形成在周边区域上。