Abstract:
A method for fabricating a semiconductor device includes sequentially forming an interlayer insulating layer and a hard mask pattern including a first opening on a substrate including a lower pattern, forming a trench exposing the lower pattern in the interlayer insulating layer using the hard mask pattern, forming a liner layer including a first part formed along sidewalls and a bottom surface of the trench and a second part formed along a top surface of the hard mask pattern, forming a sacrificial pattern exposing the second part of the liner layer in the trench, removing the second part of the liner layer and the hard mask pattern using the sacrificial pattern, and after the removing of the hard mask pattern, removing the sacrificial pattern to expose the first part of the liner layer.
Abstract:
A rechargeable battery pack for portable electronic equipment is includes a battery coupled to a charge/discharge circuit and includes a a first substrate for mounting parts positioned on a high-current path and a second substrate for mounting peripheral circuits for controlling a charge/discharge of the battery. Accordingly, heat sensitive parts on low current paths may be thermally isolated from heat generating parts on high current paths.
Abstract:
A pumping voltage generating circuit of a semiconductor memory apparatus, the pumping voltage generating circuit includes a detecting unit configured to compare a level of a pumping voltage with a level of a reference voltage to generate a detection signal, an oscillating signal generator configured to sequentially generate a first oscillating signal and a second oscillating signal in response to the detection signal, and to elevate frequencies of the first and second oscillating signals when the second oscillating signal is generated, a first pump configured to perform a pumping operation in response to the first oscillating signal, and a second pump configured to perform a pumping operation in response to the second oscillating signal, wherein output terminals of the first pump and the second pump are commonly connected, and the pumping voltage is output at the output terminals of the first pump and the second pump.
Abstract:
A protective circuit for a secondary battery pack advantageously having a simple circuit configuration while maintaining the safety of banks in the circuit. Each protective circuit has banks adapted to be charged or to discharge voltage, each bank being coupled to a controller that senses the charging or discharging voltage of the bank and outputs a predetermined value if overcharging or over-discharging is sensed. A level shifter is adapted to shift the voltage output from the controller to an adjusted voltage approximately equal to the voltage output from one of the other controllers. A switching means controls the stopping of charging or discharging of the banks.
Abstract:
The present invention relates to diffractive light modulators and, more particularly, to a diffractive light modulator in which the lower support for mirrors is configured in consideration of the internal intrinsic stress of a mirror, thus improving the flatness of a mirror surface and enhancing the optical efficiency of the light modulator.
Abstract:
A method for fabricating a semiconductor device includes sequentially forming an interlayer insulating layer and a hard mask pattern including a first opening on a substrate including a lower pattern, forming a trench exposing the lower pattern in the interlayer insulating layer using the hard mask pattern, forming a liner layer including a first part formed along sidewalls and a bottom surface of the trench and a second part formed along a top surface of the hard mask pattern, forming a sacrificial pattern exposing the second part of the liner layer in the trench, removing the second part of the liner layer and the hard mask pattern using the sacrificial pattern, and after the removing of the hard mask pattern, removing the sacrificial pattern to expose the first part of the liner layer.
Abstract:
A test apparatus includes a test fuse unit for generating a test fuse signal in response to a test mode signal during a test time and generating a test fuse signals according to a fuse cutting after a termination of the test time, a combination signal generating unit for storing a test signal and inactivating a combination signal when the test mode signal is inactivate and for outputting the stored test signal as the combination signal when the test mode signal is activate, and a code signal generating unit for activating a test code signal when one of the test fuse signal and the combination signal is activated.
Abstract:
A method for manufacturing an array of thin film actuated mirrors capable of ensuring an optimum optical efficiency is disclosed. The method includes the steps of: forming a thin film sacrificial layer on top of an active matrix; forming an array of semifinished actuating structures on top of the thin film sacrificial layer, wherein each of the semifinished actuating structures includes a thin film electrodisplacive member, a second thin film electrode and an elastic member; forming selectively a polymer layer; depositing a first thin film layer on top of each of the semifinished actuating structures; removing the polymer layer, thereby forming an array of actuating structures, each of the actuating structures having a first thin film electrode and the semifinished actuating structure; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors. Since the formation of the array of semifinished actuating structures is followed by the formation of the first thin film electrode, it may prevent the first thin film electrode, which also functions as a mirror, from chemically or physically damaged during the formation of the array of semifinished actuating structures, thereby ensuring the optical efficiency of the array of thin film actuated mirrors.
Abstract:
An internal voltage control circuit includes active drivers, a control unit, and a time interval adjustment unit. The active drivers are configured to receive a common internal voltage. The control unit is configured to control respective enable operations of the active drivers. The time interval adjustment unit is configured to respectively supply enable signals, generated by the control unit, to the active drivers at respective predetermined time intervals.
Abstract:
A test apparatus includes a test fuse unit for generating a test fuse signal in response to a test mode signal during a test time and generating a test fuse signals according to a fuse cutting after a termination of the test time, a combination signal generating unit for storing a test signal and inactivating a combination signal when the test mode signal is inactivate and for outputting the stored test signal as the combination signal when the test mode signal is activate, and a code signal generating unit for activating a test code signal when one of the test fuse signal and the combination signal is activated.