公开(公告)号：US20090231563A1

公开(公告)日：2009-09-17

申请号：US12399737

申请日：2009-03-06

Applicant: Frank Staals ,  Paulus Antonius Andreas Teunissen ,  Ronald Albert John Van Doorn

Inventor： Frank Staals ,  Paulus Antonius Andreas Teunissen ,  Ronald Albert John Van Doorn

IPC: G03B27/42

CPC classification number: G03F7/70758 ,  G03F7/70725

Abstract: A lithographic apparatus includes a level sensor for use in positioning a target portion of the substrate with respect to a focal plane of the projection system, a pair of actuators, configured to move a substrate table of the lithographic apparatus, and a controller for moving the substrate relative to the level sensor by controlling the actuators. The controller combines motions of the first and second actuators to produce a combined movement having a speed higher than a maximum speed of at least one of the actuators individually.

Abstract translation: 平版印刷设备包括用于相对于投影系统的焦平面定位基板的目标部分的液位传感器，配置成移动光刻设备的基板台的一对致动器，以及用于移动 通过控制致动器相对于液位传感器的基板。 控制器组合第一和第二致动器的运动，以产生具有高于致动器中的至少一个致动器的最大速度的组合运动。

公开(公告)号：US06504860B2

公开(公告)日：2003-01-07

申请号：US09837150

申请日：2001-04-18

Applicant: Peter C. Newman ,  John Van Doorn ,  Darrel W. Fullen ,  William H. Clopton ,  Shahryar Rokni

Inventor： Peter C. Newman ,  John Van Doorn ,  Darrel W. Fullen ,  William H. Clopton ,  Shahryar Rokni

IPC: H01S322

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225

Abstract: A laser component purge system for discharge lasers. The LNP, the output coupler and the wavemeter are contained in sealed chambers each having a purge inlet port and a purge outlet port. Purge gas such as N2 is directed to each of the inlet ports. A purge monitoring system is provided which monitors the purge flow and provides one or more signals to a processor which is programmed to minimize laser timeouts attributable to purge conditions without endangering the purged optical components. In a preferred embodiment, gas exiting the outlet ports are directed to flow monitors which provide the one or more signals to the processor. Purge gas may be exhausted or recirculated.

公开(公告)号：US08582082B2

公开(公告)日：2013-11-12

申请号：US12399737

申请日：2009-03-06

Applicant: Frank Staals ,  Paulus Antonius Andreas Teunissen ,  Ronald Albert John Van Doorn

Inventor： Frank Staals ,  Paulus Antonius Andreas Teunissen ,  Ronald Albert John Van Doorn

IPC: G03B27/52 ,  G03B27/32

CPC classification number: G03F7/70758 ,  G03F7/70725

Abstract: A lithographic apparatus includes a level sensor for use in positioning a target portion of the substrate with respect to a focal plane of the projection system, a pair of actuators, configured to move a substrate table of the lithographic apparatus, and a controller for moving the substrate relative to the level sensor by controlling the actuators. The controller combines motions of the first and second actuators to produce a combined movement having a speed higher than a maximum speed of at least one of the actuators individually.

Abstract translation: 平版印刷设备包括用于相对于投影系统的焦平面定位基板的目标部分的液位传感器，配置成移动光刻设备的基板台的一对致动器，以及用于移动 通过控制致动器相对于液位传感器的基板。 控制器组合第一和第二致动器的运动，以产生具有高于致动器中的至少一个致动器的最大速度的组合运动。