公开(公告)号：US20130146225A1

公开(公告)日：2013-06-13

申请号：US13314347

申请日：2011-12-08

Applicant: Xing Chen ,  Youfan Gu ,  Chengxiang Ji ,  Paul Ashby Loomis ,  Ilya Pokidov ,  Kevin Wayne Wenzel

Inventor： Xing Chen ,  Youfan Gu ,  Chengxiang Ji ,  Paul Ashby Loomis ,  Ilya Pokidov ,  Kevin Wayne Wenzel

IPC: B44C1/22 ,  F16L9/00

CPC classification number: H01J37/32449 ,  C23C16/452 ,  H01J37/32495

Abstract: A plasma chamber for use with a reactive gas source that includes a first conduit comprising a wall, an inlet, an outlet, an inner and outer surface, and a plurality of openings through the wall, the inlet receives a first gas for generating a reactive gas in the first conduit with a plasma formed in the first conduit. The plasma chamber also includes a second conduit that includes a wall, an inlet, and an inner surface. The first conduit is disposed in the second conduit defining a channel between the outer surface of the first conduit and the inner surface of the second conduit. A second gas provided to the inlet of the second conduit flows along the channel and through the plurality of openings of the wall of the first conduit into the first conduit to surround the reactive gas and plasma in the first conduit.

Abstract translation: 一种与反应性气体源一起使用的等离子体室，其包括第一导管，其包括壁，入口，出口，内部和外部表面以及穿过壁的多个开口，所述入口容纳用于产生反应性的第一气体 第一导管中的气体在第一导管中形成等离子体。 等离子体室还包括第二导管，其包括壁，入口和内表面。 第一导管设置在第二导管中，限定在第一导管的外表面和第二导管的内表面之间的通道。 设置到第二导管入口的第二气体沿着通道流动并且穿过第一导管的壁的多个开口进入第一导管，以围绕第一导管中的反应气体和等离子体。

公开(公告)号：US07435971B2

公开(公告)日：2008-10-14

申请号：US11437547

申请日：2006-05-19

Applicant: Bo H. Vanderberg ,  Victor M. Beneviste ,  John F. Fallon ,  Ilya Pokidov

Inventor： Bo H. Vanderberg ,  Victor M. Beneviste ,  John F. Fallon ,  Ilya Pokidov

IPC: H01J37/08 ,  H01J7/24 ,  H01J27/20

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J37/304 ,  H01J37/32467 ,  H01J2237/002 ,  H01J2237/082 ,  H01J2237/31701

Abstract: An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.

Abstract translation: 用于产生离子流的示例性离子源具有至少部分地界定电弧室的电离区域的铝合金电弧室体。 电弧室主体与热丝电弧室壳体一起使用，其直接或间接地将阴极加热至足够的温度，以使电子流过电弧室的电离区域。 温度传感器监测电弧室内的温度，并提供与感测温度相关的信号。 控制器监测由传感器测量的感测温度，并调节温度以将感测到的温度保持在一定范围内。

公开(公告)号：US07915597B2

公开(公告)日：2011-03-29

申请号：US12050594

申请日：2008-03-18

Applicant: Yongzhang Huang ,  Ilya Pokidov

Inventor： Yongzhang Huang ,  Ilya Pokidov

IPC: H01J3/14

CPC classification number: H01J37/3171 ,  H01J27/024 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J2237/0458 ,  H01J2237/083 ,  H01J2237/20214 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/30455 ,  H01J2237/30483 ,  H01J2237/31703

Abstract: A system and method extraction electrode system, comprising an extraction electrode, wherein the extraction electrode, further defines an aperture and forms a portion of the outside wall of the ion source and is configured to extract ions from the ion source, a suppression disk half assembly comprising two suppression electrode plate disk halves that form a variable suppression aperture, a ground disk half assembly comprising two ground electrode plate disk halves that form an variable ground aperture, wherein the suppression disk half assembly is configured between the extraction electrode and the ground disk half assembly, wherein the suppression aperture and the ground aperture variable in the direction perpendicular to the ion beam direction of travel, and wherein the extraction electrode system is used with a pendulum reciprocating drive apparatus.

Abstract translation: 一种系统和方法提取电极系统，包括提取电极，其中所述提取电极还限定孔并形成离子源的外壁的一部分，并且被配置为从离子源提取离子，抑制盘半组件 包括形成可变抑制孔径的两个抑制电极板半部，包括形成可变接地孔的两个接地电极板半部的接地盘半组件，其中抑制盘半组件配置在提取电极和接地盘半部之间 组件，其中所述抑制孔径和所述接地孔径在垂直于所述离子束行进方向的方向上可变，并且其中所述引出电极系统与摆锤往复驱动装置一起使用。

公开(公告)号：US20090236547A1

公开(公告)日：2009-09-24

申请号：US12050594

申请日：2008-03-18

Applicant: Yongzhang Huang ,  Ilya Pokidov

Inventor： Yongzhang Huang ,  Ilya Pokidov

IPC: H01J37/08

CPC classification number: H01J37/3171 ,  H01J27/024 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J2237/0458 ,  H01J2237/083 ,  H01J2237/20214 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/30455 ,  H01J2237/30483 ,  H01J2237/31703

Abstract: A system and method extraction electrode system, comprising an extraction electrode, wherein the extraction electrode, further defines an aperture and forms a portion of the outside wall of the ion source and is configured to extract ions from the ion source, a suppression disk half assembly comprising two suppression electrode plate disk halves that form a variable suppression aperture, a ground disk half assembly comprising two ground electrode plate disk halves that form an variable ground aperture, wherein the suppression disk half assembly is configured between the extraction electrode and the ground disk half assembly, wherein the suppression aperture and the ground aperture variable in the direction perpendicular to the ion beam direction of travel, and wherein the extraction electrode system is used with a pendulum reciprocating drive apparatus.

Abstract translation: 一种系统和方法提取电极系统，包括提取电极，其中所述提取电极还限定孔并形成离子源的外壁的一部分，并且被配置为从离子源提取离子，抑制盘半组件 包括形成可变抑制孔径的两个抑制电极板半部，包括形成可变接地孔的两个接地电极板半部的接地盘半组件，其中抑制盘半组件配置在提取电极和接地盘半部之间 组件，其中所述抑制孔径和所述接地孔径在垂直于所述离子束行进方向的方向上可变，并且其中所述引出电极系统与摆锤往复驱动装置一起使用。