公开(公告)号：US20220205935A1

公开(公告)日：2022-06-30

申请号：US17550440

申请日：2021-12-14

申请人： INEL S.A.S.

发明人： Henry PILLIERE

IPC分类号： G01N23/2204 ,  G01N23/223 ,  G01N23/207 ,  G01N23/20025

摘要： An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

公开(公告)号：US11796492B2

公开(公告)日：2023-10-24

申请号：US17550440

申请日：2021-12-14

申请人： INEL S.A.S.

发明人： Henry Pilliere

IPC分类号： G01N23/2206 ,  G01N23/20025 ,  G01N23/207 ,  G01N23/2204 ,  G01N23/2209 ,  G01N23/223 ,  G01N21/17 ,  G01N21/63

CPC分类号： G01N23/2206 ,  G01N23/207 ,  G01N23/20025 ,  G01N23/2076 ,  G01N23/223 ,  G01N23/2204 ,  G01N23/2209 ,  G01N21/17 ,  G01N21/63 ,  G01N2223/056 ,  G01N2223/071 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/304 ,  G01N2223/306 ,  G01N2223/307 ,  G01N2223/309 ,  G01N2223/314 ,  G01N2223/32 ,  G01N2223/321 ,  G01N2223/3306 ,  G01N2223/3308 ,  G01N2223/501 ,  G01N2223/509 ,  G01N2223/605 ,  G01N2223/616

摘要： An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

公开(公告)号：US20220206024A1

公开(公告)日：2022-06-30

申请号：US17335339

申请日：2021-06-01

申请人： INEL S.A.S.

发明人： Anas EL MENDILI

IPC分类号： G01N35/00

摘要： A method comprises: causing a sample to occupy each of a plurality of analysis positions, each corresponding to a respective analysis apparatus; with the sample at each position: determining at least one transfer matrix that describes a transport motion to the analysis position from a prior position and generating an analysis data set derived by analyzing the sample using the apparatus corresponding to the position, the data set comprising a respective array of scalar values at each analyzed location; using the transfer matrices, calculating a plurality of composite transformation matrices, each expressing sample coordinates as determined by a metrological apparatus or sensor in a local coordinate system of a respective one of the other analysis apparatuses; mapping, within each data set, apparatus-specific coordinates of a feature on the sample to the data; and constructing a composite data set comprising all of the arrays of scalar values that correspond to the feature.