公开(公告)号：US20220205935A1

公开(公告)日：2022-06-30

申请号：US17550440

申请日：2021-12-14

申请人： INEL S.A.S.

发明人： Henry PILLIERE

IPC分类号： G01N23/2204 ,  G01N23/223 ,  G01N23/207 ,  G01N23/20025

摘要： An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.