公开(公告)号：US20100081079A1

公开(公告)日：2010-04-01

申请号：US12416973

申请日：2009-04-02

Applicant: Hyunsang JOO ,  Jinho KIM ,  Yonghwa HONG ,  Changsoo LEE

Inventor： Hyunsang JOO ,  Jinho KIM ,  Yonghwa HONG ,  Changsoo LEE

IPC: G03F7/004 ,  C08F24/00

CPC classification number: C08F220/28 ,  C08F224/00 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0395 ,  G03F7/0397 ,  Y10S430/115 ,  Y10S430/122

Abstract: Disclosed are a polymer for a chemically amplified resist represented as and a resist composition using the same. In the above Chemical formula 1, X represents vinyl ether derivatives or olefin derivatives, at least one of R1, R2, R3 and R4 is an alkyl group with 1 to 30 carbon atoms containing at least one functional group of a hydrogen atom, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitryl group (—CN), and an aldehyde group, l, m, n, o and p respectively represent repeating units, l represents a real number of 0.05 to 0.5, m and n respectively represent real numbers of 0.1 to 0.7, o and p respectively represent real numbers of 0 to 0.7, and a sum of l, m, n, o and p is 1.

Abstract translation: 公开了用于化学增幅抗蚀剂的聚合物和使用其的抗蚀剂组合物。 在上述化学式1中，X表示乙烯基醚衍生物或烯烃衍生物，R 1，R 2，R 3和R 4中的至少一个为含有至少一个氢原子官能团的碳原子数1〜30的烷基， 基团，酯基，羰基，缩醛基，环氧基，硝基（-CN）和醛基，l，m，n，o和p分别表示重复单元，l表示实数 为0.05〜0.5，m和n分别表示实数为0.1〜0.7，o和p分别表示0〜0.7的实数，l，m，n，o和p的和为1。

公开(公告)号：US06639036B2

公开(公告)日：2003-10-28

申请号：US10056124

申请日：2002-01-24

Applicant: JooHyeon Park ,  DongChul Seo ,  YoungTaek Lim ,  HyunSang Joo ,  SeongDuk Cho ,  SeongJu Kim

Inventor： JooHyeon Park ,  DongChul Seo ,  YoungTaek Lim ,  HyunSang Joo ,  SeongDuk Cho ,  SeongJu Kim

IPC: C08F1000

CPC classification number: G03F7/0397 ,  C08F222/06 ,  C08F232/00 ,  G03F7/0392 ,  G03F7/0395

Abstract: A chemically amplified resist composition consists of an acid generating agent, additive, solvent and a copolymer represented by the following formula: where R1, R2 and R6 are independent of each other and respectively include a hydrogen atom or an alkyl, alkoxymethylene, alkoxyethylene, phenyl, alkoxyalkylene, alkylphenyl, alkoxyphenyl, allyl, benzyl, alkylbenzyl, alkoxybenzyl containing 1 to 34 carbon atoms having or not having an hydroxy, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde; R5 is a hydrogen atom, an alkyl or alkoxy group containing 1 to 18 carbon atoms; R7 is a hydrogen atom, an alkyl group containing 1 to 18 carbon atoms, an alkyl group containing alkoxy 1 to 18 carbon atoms or an alkyl group containing ester of 1 to 18 carbon atoms; R3 and R4 are independent and respectively include a hydrogen atom, hydroxy, nitrile, aldehyde, hydroxymethylene, and alkylcarbonyloxy, alky, hydroxyalkylene, alkoxycarbonyl, alkoxymethylene or alkoxyalkanyl group containing 1 to 18 carbon atoms; X is olefin derivatives, vinyl ether derivatives or styrene derivatives containing 1 to 40 carbon atoms, alternatively these derivatives may be comprised of hydroxy, ester, alkoxyalkyloxycarbonyl, ketone or ether; a, b, c, d, e and f are a number represented a repeating unit in the main chain, wherein a+b+c+d+e+f=1, the content of a and b are 0 to 0.7, respectively, (a+b)/(a+b+c+d+e+f)>0.3, and the content of c, d, e and f are 0 to 0.9, respectively; and n is an integer of 0 or 1.

Abstract translation: 化学放大抗蚀剂组合物由酸产生剂，添加剂，溶剂和由下式表示的共聚物组成：其中R1，R2和R6彼此独立，分别包括氢原子或烷基，烷氧基亚甲基，烷氧基亚乙基，苯基 烷基苯基，烷氧基苯基，烯丙基，苄基，烷基苄基，含有或不具有羟基，醚，酯，羰基，缩醛，环氧，腈或醛的1至34个碳原子的烷氧基苄基; R5是氢原子，含有1至18个碳原子的烷基或烷氧基; R7是氢原子，含有1至18个碳原子的烷基，含有1至18个碳原子的烷氧基的烷基或含有1至18个碳原子的烷基的酯; R3和R4独立地分别包括含有1至18个碳原子的氢原子，羟基，腈，醛，羟基亚甲基和烷基羰基氧基，烷基，羟基亚烷基，烷氧基羰基，烷氧基亚甲基或烷氧基烷基; X是含有1至40个碳原子的烯烃衍生物，乙烯基醚衍生物或苯乙烯衍生物，或者这些衍生物可以由羟基，酯，烷氧基烷氧基羰基，酮或醚组成。 a，b，c，d，e和f是主链中重复单元的数字，其中a + b + c + d + e + f = 1，a和b的含量分别为0〜0.7 ，（a + b）/（a + b + c + d + e + f）> 0.3，c，d，e和f的含量分别为0〜0.9， n为0或1的整数。

公开(公告)号：US08187790B2

公开(公告)日：2012-05-29

申请号：US12416973

申请日：2009-04-02

Applicant: Hyunsang Joo ,  Jinho Kim ,  Yonghwa Hong ,  Changsoo Lee

Inventor： Hyunsang Joo ,  Jinho Kim ,  Yonghwa Hong ,  Changsoo Lee

IPC: G03F7/038 ,  G03F7/039 ,  C08F24/00 ,  C08G59/68

CPC classification number: C08F220/28 ,  C08F224/00 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0395 ,  G03F7/0397 ,  Y10S430/115 ,  Y10S430/122

Abstract: Disclosed are a polymer for a chemically amplified resist represented as and a resist composition using the same. In the above Chemical formula 1, X represents vinyl ether derivatives or olefin derivatives, at least one of R1, R2, R3, and R4 is an alkyl group with 1 to 30 carbon atoms containing at least one functional group of a hydrogen atom, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitryl group (—CN), and an aldehyde group, l, m, n, o and p respectively represent repeating units, l represents a real number of 0.05 to 0.5, m and n respectively represent real numbers of 0.1 to 0.7, o and p respectively represent real numbers of 0 to 0.7, and a sum of l, m, n, o and p is 1.

Abstract translation: 公开了用于化学增幅抗蚀剂的聚合物和使用其的抗蚀剂组合物。 在上述化学式1中，X表示乙烯基醚衍生物或烯烃衍生物，R 1，R 2，R 3和R 4中的至少一个为含有至少一个氢原子官能团的碳原子数1〜30的烷基， 醚基，酯基，羰基，缩醛基，环氧基，硝基（-CN）和醛基，l，m，n，o和p分别表示重复单元，l表示实际 0.05至0.5，m和n分别表示实数为0.1至0.7，o和p分别表示0至0.7的实数，并且l，m，n，o和p的和为1。