摘要:
A semiconductor production system has storage devices for storage of all kinds of information including, but not limited to, the information concerning semiconductor design and information as to semiconductor manufacture along with information relating to semiconductor inspection processes, while representing as a class an instance added with meta data indicative of the role of the information in accordance with a logical expressive form. The system has a network for the storage device use, called the storage area network or “SAN”. The SAN is for interconnection between respective ones of the storage devices, semiconductor manufacturing apparatuses and a semiconductor inspection apparatus. The storage devices are seamlessly accessible from any one of the semiconductor manufacture apparatuses and the semiconductor inspection apparatus and also from a semiconductor design environment associated therewith.
摘要:
A semiconductor production system has storage devices for storage of all kinds of information including, but not limited to, the information concerning semiconductor design and information as to semiconductor manufacture along with information relating to semiconductor inspection processes, while representing as a class an instance added with meta data indicative of the role of the information in accordance with a logical expressive form. The system has a network for the storage device use, called the storage area network or “SAN”. The SAN is for interconnection between respective ones of the storage devices, semiconductor manufacturing apparatuses and a semiconductor inspection apparatus. The storage devices are seamlessly accessible from any one of the semiconductor manufacture apparatuses and the semiconductor inspection apparatus and also from a semiconductor design environment associated therewith.
摘要:
A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.
摘要:
Consumption power control is provided for a system LSI made of a combination of a plurality of reusable logic circuit modules, i.e., Intellectual Property (IP) cores. Hardware resources such as interfaces and registers for the consumption power control of other IP cores are prepared and controlled by software for the consumption power control of a system LSI. The consumption power can be controlled at an IP core level. A method is provided which facilitates a system LSI designer to enter a consumption power control specification of a system LSI when the system LSI is configured.
摘要:
A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.
摘要:
A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates the patterns according to each layer by using design data of the plurality of layers corresponding to the patterns. Consequently, the apparatus can realize inspection with use of only the pattern of a target layer to be inspected, pattern inspection differently for different layers, or detection of a positional offset between the layers.
摘要:
A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
摘要:
A code generation system is provided which optimizes a code generation for a control system applicable to an embedded control system without the need to increase its memory capacity. A total control unit 110 causes to read a model diagram and an operation diagram which depict a software specification stored in a memory 104, and starts specification analysis unit 106 to execute lexical and grammatical analyses thereof. Then, object-oriented function removing unit 107 is started to determine any function which is not used according to a function select item stored in the memory 104. Then, code generation unit 108 is started to generate a code on the basis of the result of the lexical and grammatical analyses of the software specification, and of an output code pattern determined by the object-oriented function removing unit 107.
摘要:
A code generation system is provided which optimizes a code generation for a control system applicable to an embedded control system without the need to increase its memory capacity. A total control unit 110 causes to read a model diagram and an operation diagram which depict a software specification stored in a memory 104, and starts specification analysis unit 106 to execute lexical and grammatical analyses thereof. Then, object-oriented function removing unit 107 is started to determine any function which is not used according to a function select item stored in the memory 104. Then, code generation unit 108 is started to generate a code on the basis of the result of the lexical and grammatical analyses of the software specification, and of an output code pattern determined by the object-oriented function removing unit 107.
摘要:
A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.