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公开(公告)号：US20130234165A1
公开(公告)日：2013-09-12
申请号：US13885761
申请日：2011-10-20
Applicant: Stewes Bourban , David Richard , Beat Gilomen , Detlef Steinmüller , Herwig Drexel , Doris Steinmüller , Slimane Gnodbane
Inventor： Stewes Bourban , David Richard , Beat Gilomen , Detlef Steinmüller , Herwig Drexel , Doris Steinmüller , Slimane Gnodbane
IPC: H01L21/02
CPC classification number: H01L21/02527 , B81B3/0075 , B81B2201/035 , B81C2201/0119 , C23C16/27 , C23C16/278 , C23C16/279 , G04B15/14
Abstract: Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating (3); wherein: said second diamond coating (3) is provided by CVD in a reaction chamber; during CVD deposition, during the last portion of the growth process, a controlled increase of the carbon content within the reaction chamber is provided, thereby providing an increase of the sp2/sp3 carbon (6) bonds up to an sp2 content substantially between 1% and 45%. Corresponding micromechanical components are also provided.
Abstract translation: 用于涂覆微机械系统的微机械部件的方法，特别是手表机芯，包括：提供待涂覆的基底（4）部件; 向所述部件提供掺杂有硼的第一金刚石涂层（2）; 向所述部件提供第二金刚石涂层（3）; 其中：所述第二金刚石涂层（3）通过CVD在反应室中提供; 在CVD沉积期间，在生长过程的最后部分期间，提供了控制在反应室内的碳含量的增加，从而提供sp2 / sp3碳（6）键的增加，直到sp2含量基本上在1％ 和45％。 还提供了相应的微机械部件。
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2.发明申请METHOD FOR COATING MICROMECHANICAL COMPONENTS OF A MICROMECHANICAL SYSTEM, IN PARTICULAR A WATCH AND RELATED MICROMECHANICAL COATED COMPONENT 审中-公开用于涂覆微观系统的微观组分的方法，特别是手表和相关的微电子涂层组分公开(公告)号：US20120141800A1
公开(公告)日：2012-06-07
申请号：US13377320
申请日：2010-06-03
Applicant: Detlef Steinmüller , Doris Steinmüller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
Inventor： Detlef Steinmüller , Doris Steinmüller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
CPC classification number: C23C16/277 , B81B3/0008 , B81B2201/035 , B81C2201/112 , C23C16/27 , C23C16/56 , G04D3/0074 , Y10T428/30
Abstract: Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein said diamond coating conductivity is increased in order to reduce dust attraction by the coated component when used in said micromechanical system. Corresponding micromechanical components and systems are also provided.
Abstract translation: 用于涂覆微机械系统的微机械部件的方法，特别是手表机芯，包括：提供待涂覆的基底部件; 向所述部件提供金刚石涂层; 其中所述金刚石涂层的导电性增加，以便在所述微机械系统中使用时减少所涂覆的部件的吸尘。 还提供了相应的微机械部件和系统。
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3.发明授权Method for coating micromechanical parts with high tribological performances for application in mechanical systems 失效用于涂覆机械系统中具有高摩擦学性能的微机械零件的方法公开(公告)号：US08770827B2
公开(公告)日：2014-07-08
申请号：US13319446
申请日：2010-05-18
Applicant: Detlef Steinmuller , Doris Steinmuller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
Inventor： Detlef Steinmuller , Doris Steinmuller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
CPC classification number: C23C16/279 , C23C16/26 , C23C16/271 , G04B13/02 , G04B15/14 , G04D3/0069
Abstract: Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds in the vicinity of the surface. Corresponding micromechanical components are also provided.
Abstract translation: 用于涂覆微机械系统的微机械部件的方法，特别是手表机芯，包括：提供待涂覆的基底部件; 向所述部件提供金刚石涂层; 其中通过CVD在反应室中和在CVD沉积期间提供金刚石涂层，在生长过程的最后部分期间，提供反应室内碳含量的受控变化，从而提供sp2 / sp3碳键的改变 在表面附近。 还提供了相应的微机械部件。
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4.发明申请METHOD FOR COATING MICROMECHANICAL PARTS WITH HIGH TRIBOLOGICAL PERFORMANCES FOR APPLICATION IN MECHANICAL SYSTEMS 失效用于机械系统应用的具有高度TRIBOLOGICAL性能的微生物部件的涂覆方法公开(公告)号：US20120051192A1
公开(公告)日：2012-03-01
申请号：US13319446
申请日：2010-05-18
Applicant: Detlef Steinmuller , Doris Steinmuller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
Inventor： Detlef Steinmuller , Doris Steinmuller , Herwig Drexel , Slimane Ghodbane , David Richard , Pierre Cusin
CPC classification number: C23C16/279 , C23C16/26 , C23C16/271 , G04B13/02 , G04B15/14 , G04D3/0069
Abstract: Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds in the vicinity of the surface. Corresponding micromechanical components are also provided.
Abstract translation: 用于涂覆微机械系统的微机械部件的方法，特别是手表机芯，包括：提供待涂覆的基底部件; 向所述部件提供金刚石涂层; 其中通过CVD在反应室中和在CVD沉积期间提供金刚石涂层，在生长过程的最后部分期间，提供反应室内碳含量的受控变化，从而提供sp2 / sp3碳键的改变 在表面附近。 还提供了相应的微机械部件。
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