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公开(公告)号：US10060718B2
公开(公告)日：2018-08-28
申请号：US14786218
申请日：2014-04-24
发明人： Werner Volz
摘要： A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.
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公开(公告)号：US20150316459A1
公开(公告)日：2015-11-05
申请号：US14703914
申请日：2015-05-05
发明人： Werner Volz , Henry Thiele , Paul Boos
IPC分类号： G01N3/42
摘要： The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).
摘要翻译： 本发明涉及一种将旋转对称体（28）相对于测量装置（19）定位和对准的装置，用于在旋转对称体（28）上执行测量，具有基本元件（24） 其在销（23）上具有接触表面（22）或被分配给接触表面（22），所述旋转对称体（28）被支撑在所述接触表面上，以用于实施所述测量，其中定位元件（41） 所述定位元件（41）包括棱柱形接收器（64），其中所述接触表面（22）位于棱柱形接收器（22）内， 64）或邻接于该位置，并且定位元件（41）朝向基本元件（22）的移动路径至少对应于棱柱形接收器（64）的高度。
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公开(公告)号：US09885676B2
公开(公告)日：2018-02-06
申请号：US14634979
申请日：2015-03-02
发明人： Volker Roessiger
IPC分类号： G01N23/223 , G01B15/02
CPC分类号： G01N23/223 , G01B15/02 , G01N2223/076 , G01N2223/6113 , G01N2223/633
摘要： A method for measurement of the thickness of thin layers or determination of an element concentration of a measurement object. A primary beam is directed from an X-ray radiation source onto the measurement object. A secondary radiation emitted by the measurement object is detected by a detector and is relayed to an evaluation device. The primary beam is moved within a grid surface which is divided into grid partial surfaces as well as subdivided into at least one line and at least one column. For each grid partial surface a primary beam is directed onto the grid surface. A measuring spot of the primary beam fills at least the grid point. A lateral dimension of the measurement surface is detected and compared to the size of the measuring spot of the primary beam appearing on the measurement object, for size determination of the measurement surface of the measurement object.
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公开(公告)号：US09513238B2
公开(公告)日：2016-12-06
申请号：US14648264
申请日：2013-10-22
发明人： Jens Kessler
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076 , G01N2223/313 , G01N2223/61 , G01N2223/633
摘要： The invention relates to a method for performing an x-ray fluorescence analysis, in which method a primary radiation (16) is directed at a specimen (12) by an x-radiation source (14) and in which method a secondary radiation (18) emitted by the specimen (12) is detected by a detector (20) and evaluated by means of an evaluating unit (21), wherein at least one filter (23) having at least one filter layer (25) forming a filter plane is brought into the beam path of the secondary radiation (18) and acts as a band-pass filter in dependence on an angle α of the filter layer (25) to the secondary radiation (18) and an interfering wavelength of the secondary radiation (18) is coupled out by Bragg reflection, the angle α of the filter layer (25) of the filter (23) is set by means of a setting apparatus (31) to reflect at least one interfering wavelength of the secondary radiation (18) by Bragg reflection, and the coupled-out wavelength of the secondary radiation (18) is detected by a second detector (32) and the signals determined therefrom are forwarded to the evaluating unit (21).
摘要翻译： 本发明涉及一种用于进行X射线荧光分析的方法，其中主辐射（16）通过x辐射源（14）指向样本（12），并且在该方法中，辅助辐射（18） ）由检测器（20）检测并通过评估单元（21）进行评估，其中至少一个具有至少一个形成过滤器平面的过滤层（25）的过滤器（23）是 进入次级辐射（18）的光束路径，并且根据过滤层（25）与次级辐射（18）的角度α和次级辐射（18）的干涉波长而作为带通滤波器 ）通过布拉格反射耦合出来，滤波器（23）的滤波器层（25）的角度α通过设定装置（31）设定，以将二次辐射（18）的至少一个干涉波长反射到 二次辐射（18）的布拉格反射和耦合输出波长被检测 检测器（32）和从其确定的信号被转发到评估单元（21）。
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公开(公告)号：US10707112B2
公开(公告)日：2020-07-07
申请号：US15420690
申请日：2017-01-31
发明人： Werner Volz , Paul Boos
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , G01N23/223 , H01L21/67
摘要： A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
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7.发明申请公开(公告)号：US20170219504A1
公开(公告)日：2017-08-03
申请号：US15420690
申请日：2017-01-31
发明人： Werner Volz , Paul Boos
IPC分类号： G01N23/223 , B25B11/00 , H01L21/687 , H01L21/66 , H01L21/683 , H01L21/67
摘要： The invention relates to a vacuum chuck for clamping workpieces (19), in particular wafers, and a measuring device and a method for checking workpieces, in particular wafers, by means of X-ray fluorescent radiation.
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公开(公告)号：US10078060B2
公开(公告)日：2018-09-18
申请号：US14805926
申请日：2015-07-22
发明人： Udo Geier , Bernhard Nensel
IPC分类号： G01N23/223 , G01T7/00
CPC分类号： G01N23/223 , G01N2223/301 , G01T7/00
摘要： A handheld instrument and a mobile device for x-ray fluorescence analysis has a housing and a handle, having an x-ray fluorescence measurement device by which a primary beam is directed onto a measurement surface of a measurement object through an outlet window, a detector which detects the secondary radiation emitted by the measurement surface, and a data processing device which controls a display. The outlet window on a front-side end of a first housing section and a positioning element is on the first housing section. A support element is on a further housing section, at a distance to the outlet window. The handheld instrument is aligned with respect to the measurement surface after the positioning on the measurement surface by the positioning element. The support element is positioned autonomously with respect to the measurement surface in a measurement position.
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公开(公告)号：US09976943B2
公开(公告)日：2018-05-22
申请号：US14703914
申请日：2015-05-05
发明人： Werner Volz , Henry Thiele , Paul Boos
摘要： The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).
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公开(公告)号：US09835439B2
公开(公告)日：2017-12-05
申请号：US15061283
申请日：2016-03-04
发明人： Helmut Fischer
IPC分类号： G01B5/02 , G01B11/06 , G01B21/04 , G01B5/00 , G05B19/401
CPC分类号： G01B11/06 , G01B5/0004 , G01B21/047 , G05B19/401 , G05B2219/37008
摘要： The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on the measurement object (14), a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of the determined pulses of the drive path and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.
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