XYtheta PRECISION ALIGNMENT PLATFORM
    3.
    发明申请
    XYtheta PRECISION ALIGNMENT PLATFORM 审中-公开
    XYθ精密对准平台

    公开(公告)号:US20130291667A1

    公开(公告)日:2013-11-07

    申请号:US13935562

    申请日:2013-07-05

    申请人: MAU-HSIANG WU

    发明人: MAU-HSIANG WU

    IPC分类号: F16H19/02

    摘要: A xyθ precision alignment platform including three power units and three moving platforms is provided. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrange disposed between the second and third moving platforms to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrange laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.

    摘要翻译: 提供了包括三个动力单元和三个移动平台的xytheta精密对准平台。 两个动力装置可驱动在X或Y方向移动的第三个移动平台。 另一个动力单元具有蜗杆,其可以驱动布置在第二和第三移动平台之间的弧形齿,以驱动第三移动平台旋转。 由于蜗杆被布置为驱动横向布置的弓形齿,所以对准平台较薄,并且可以精确地控制第三移动平台的旋转运动。 此外,每个功率单元可以电连接到控制器,以分别驱动和控制每个功率单元。 当仅需要第三移动平台的旋转时,仅需要驱动一个动力单元,从而简化对准平台的操作并提高工作效率。

    HEIGHT ADJUSTING MECHANISM FOR ELECTRONIC DEVICE AND ELECTRONIC DEVICE PROVIDED WITH THE SAME
    4.
    发明申请
    HEIGHT ADJUSTING MECHANISM FOR ELECTRONIC DEVICE AND ELECTRONIC DEVICE PROVIDED WITH THE SAME 审中-公开
    用于电子设备的高精度调节机构及其提供的电子设备

    公开(公告)号:US20110058317A1

    公开(公告)日:2011-03-10

    申请号:US12736719

    申请日:2008-05-19

    申请人: Yukihiko Oota

    发明人: Yukihiko Oota

    IPC分类号: H05K7/00 F16M11/24

    CPC分类号: F16M7/00 G03B21/145 G12B5/00

    摘要: A height adjusting mechanism (1) according to the present invention includes fixing portion (3a) having through hole (3b) formed therein, tapped member (2) having thread groove (12) formed thereon, wherein a rear side, which is the reverse side of a surface on which thread groove (12) is formed, covers at least a part of an inner wall surface of through hole (3b), and support leg (4) having screw rod (4a) formed with thread ridge (14) thereon in the longitudinal direction, screw rod (4a) being inserted into through hole (3b) such that thread groove (12) is in engaging relation with thread ridge (14), wherein fixing portion (3a) and tapped member (2) are engaged with each other to cause tapped member (2) to be fixed to fixing portion (3a) in the penetrating direction of through hole (3b) and in the radial direction of through hole (3b).

    摘要翻译: 根据本发明的高度调节机构(1)包括其中形成有通孔(3b)的固定部分(3a),其上形成有螺纹槽(12)的螺纹构件(2),其中后侧是相反的 在其上形成有螺纹槽(12)的表面的一侧覆盖通孔(3b)的内壁表面的至少一部分,以及具有形成有螺纹脊(14)的螺杆(4a)的支撑腿(4) 在纵向方向上,螺杆(4a)插入到通孔(3b)中,使得螺纹槽(12)与螺纹脊(14)成啮合关系,其中固定部分(3a)和螺纹构件(2)是 彼此接合以使螺纹构件(2)在通孔(3b)的穿透方向上和通孔(3b)的径向方向上固定到固定部分(3a)。

    Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit
    5.
    发明授权
    Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit 失效
    支撑单元,移动台装置和使用支撑单元的直线运动导向装置

    公开(公告)号:US07624661B2

    公开(公告)日:2009-12-01

    申请号:US10558686

    申请日:2004-06-25

    IPC分类号: G05G11/00

    摘要: A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (Uα) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (Uα) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (Uα) can be easily connected to a base and a table.

    摘要翻译: 提供了一种移动台装置中的支撑单元,其容易地连接到基座和工作台。 支撑单元(Ualpha)具有一对平面支承板。 平面轴承板内分别定位有球面轴承板。 此外,球面轴向构件夹在球面轴承板(34a,34b)之间。 在每个平面支承板和每个球面轴承板之间形成平面轴承。 在每个球面轴承板和球形轴向构件之间形成球面轴承。 因此,支撑单元(Ualpha)在五轴方向上具有一定程度的可移动性。 具有高度的可移动性,支撑单元(Ualpha)可以方便地连接到底座和桌子上。

    Positioner device
    6.
    发明申请
    Positioner device 有权
    定位装置

    公开(公告)号:US20090167113A1

    公开(公告)日:2009-07-02

    申请号:US10589684

    申请日:2005-01-31

    IPC分类号: H01L41/09

    摘要: A positioner (2) for moving a sample platform (6) relative to a base (4) is described. The positioner is driven by a piezoelectric arranged to expand and contract along a drive axis, the piezoelectric element has an input end coupled to the base and an output end coupled to first (14) and second (16) output levers extending away from the drive axis of the piezoelectric element in opposing directions. The output levers each have an inner arm arranged to be acted on by the piezoelectric element as it expands and an outer arm to which the sample platform is mounted via platform supports (26, 28). The output levers are mounted such that the piezoelectric element acts on the inner arms of the output levers to cause the outer arms to move in a plane containing the drive axis. This motion of the output levers is communicated via the platform supports to the sample platform, so moving it relative to the base along a direction parallel to the drive axis.

    摘要翻译: 描述了用于相对于基座(4)移动样品平台(6)的定位器(2)。 定位器由布置成沿驱动轴线膨胀和收缩的压电体驱动,压电元件具有联接到基座的输入端和耦合到远离驱动器的第一(14)和第二(16)输出杆的输出端 压电元件的轴向相反。 输出杆各自具有布置成在压电元件膨胀时被作用在其上的内臂和通过平台支撑件(26,28)安装样品平台的外臂。 输出杆被安装成使得压电元件作用在输出杆的内臂上,以使外臂在包含驱动轴的平面内移动。 输出杆的这种运动通过平台支撑件传送到样品平台,从而沿平行于驱动轴的方向相对于底座移动。

    Apparatus and method for accurate, precise, and adjustable kinematic coupling
    7.
    发明申请
    Apparatus and method for accurate, precise, and adjustable kinematic coupling 有权
    用于准确,精确和可调节运动耦合的装置和方法

    公开(公告)号:US20030086748A1

    公开(公告)日:2003-05-08

    申请号:US10005562

    申请日:2001-11-08

    IPC分类号: F16B001/00 B25G003/00

    摘要: An adjustable kinematic coupling for accurate and precision coupling of mechanical component parts, surfaces or assemblies and the like, where low-cost, accurate, and repeatable coupling are desired. The coupling may be used in applications that require high precision coupling and where the relative location of coupled components must be variable or adjustable. Kinematic interfaces employ convex members assembled to a first component that mate with corresponding concave elements or concave grooves in a second component so that the six relative degrees of freedom (or fewer if desired) between the two components are deterministically constrained. Kinematic elements are attached to the coupled component via a connection that may experience controlled rotation with respect to the component. In addition to rotation, kinematic elements may undergo controlled translation parallel to the mating direction of the coupling. The relative position of the coupled components may be adjusted by revolving one or more of the kinematic elements, thus enabling single or multi-degree of freedom control between the coupled components. Relative movement in additional degrees of freedom may be achieved by controlled translation of the kinematic elements with respect to the component in which they are housed.

    摘要翻译: 一种可调节的运动学联轴器,用于精确和精确地连接机械部件,表面或组件等,其中需要低成本,精确和可重复的耦合。 耦合可用于需要高精度耦合的应用中,耦合部件的相对位置必须是可变的或可调节的。 运动界面使用组装到与第二组件中的相应凹入元件或凹槽配合的第一部件的凸形部件,使得两个部件之间的六个相对自由度(或更少,如果需要的话)被确定地约束。 运动元件经由可能经历相对于部件的受控旋转的连接附接到耦合部件。 除了旋转之外,运动元件可以平行于联接器的配合方向进行受控平移。 可以通过旋转运动元件中的一个或多个来调节耦合部件的相对位置,从而实现耦合部件之间的单自由度或多自由度控制。 另外的自由度的相对运动可以通过运动元件相对于它们被容纳的部件的受控平移来实现。

    Device, in particular a work table for a projector
    8.
    发明授权
    Device, in particular a work table for a projector 失效
    装置,特别是投影仪的工作台

    公开(公告)号:US06434840B1

    公开(公告)日:2002-08-20

    申请号:US09559516

    申请日:2000-04-27

    IPC分类号: G01B500

    摘要: A high-precision device for providing positioning, registration and displacement includes a two-dimensional table for providing positioning and displacement, and a registration unit for bringing markers into registration with one another. The registration unit is attached to a carriage of the table via flexible articulated supports and can be moved by several, preferably seven, drives. The device can be used as a work table for reduction projectors and scanning electron microscopes, for example for investigating structural properties of materials.

    摘要翻译: 用于提供定位,配准和位移的高精度装置包括用于提供定位和位移的二维工作台,以及用于使标记相互对准的对准单元。 配准单元通过柔性铰接支撑件附接到工作台的托架上,并且可由几个,优选七个驱动器移动。 该装置可用作还原投影仪和扫描电子显微镜的工作台,例如用于调查材料的结构特性。

    Positioning mechanism
    9.
    发明授权
    Positioning mechanism 有权
    定位机制

    公开(公告)号:US06193226B1

    公开(公告)日:2001-02-27

    申请号:US09251555

    申请日:1999-02-17

    IPC分类号: B23Q125

    CPC分类号: G12B5/00 G01B3/002 G02B7/004

    摘要: A mechanism for a multi-axis flexure positioner includes a fixed part and a movable part (7), the movable part (7) being connected to the fixed part via a plurality of transmission means, one for each axis, for transmitting actuation forces for the respective axes to the movable part (7). The transmission means for each axis includes a flexure member (2,3,8) arranged to transmit actuation forces for that axis to the movable part (7) and to flex between the fixed part and the movable part in response to actuation forces associated with the or each other axis. There are three flexure members (2,3,8) arranged to extend along three mutually-perpendicular axes so that each flexure member (2,3,8) is flexible along the axes of extent of the other two flexure members (2,3,8). Each of the three flexure members (2,3,8) comprises a pair of flexure linkages arranged to extend parallel to each other, the three pairs of linkages thus defining three mutually-perpendicular planes.

    摘要翻译: 用于多轴挠曲定位器的机构包括固定部分和可移动部分(7),可移动部分(7)通过多个传动装置连接到固定部分,每个传动装置一个用于传递驱动力 各个轴到可动部(7)。 每个轴的传动装置包括弯曲构件(2,3,8),其被布置成将该轴线的致动力传递到可移动部件(7),并且响应于与固定部件和可移动部件之间的致动力而在固定部件和可动部件之间弯曲 或其他轴。 有三个弯曲构件(2,3,8)布置成沿着三个相互垂直的轴线延伸,使得每个挠曲构件(2,3,8)沿着另外两个挠曲构件(2,3)的范围的轴线是柔性的 ,8)。 三个弯曲构件(2,3,8)中的每一个包括布置为彼此平行延伸的一对挠曲连杆,三对连杆因此限定三个相互垂直的平面。