摘要:
An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.
摘要:
An apparatus for obtaining samples from a structure includes a support member, at least one stabilizing member, and at least one moveable member. The stabilizing member has a first portion coupled to the support member and a second portion configured to engage with the structure to restrict relative movement between the support member and the structure. The stabilizing member is radially expandable from a first configuration where the second portion does not engage with a surface of the structure to a second configuration where the second portion engages with the surface of the structure.
摘要:
A xyθ precision alignment platform including three power units and three moving platforms is provided. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrange disposed between the second and third moving platforms to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrange laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.
摘要:
A height adjusting mechanism (1) according to the present invention includes fixing portion (3a) having through hole (3b) formed therein, tapped member (2) having thread groove (12) formed thereon, wherein a rear side, which is the reverse side of a surface on which thread groove (12) is formed, covers at least a part of an inner wall surface of through hole (3b), and support leg (4) having screw rod (4a) formed with thread ridge (14) thereon in the longitudinal direction, screw rod (4a) being inserted into through hole (3b) such that thread groove (12) is in engaging relation with thread ridge (14), wherein fixing portion (3a) and tapped member (2) are engaged with each other to cause tapped member (2) to be fixed to fixing portion (3a) in the penetrating direction of through hole (3b) and in the radial direction of through hole (3b).
摘要:
A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (Uα) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (Uα) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (Uα) can be easily connected to a base and a table.
摘要:
A positioner (2) for moving a sample platform (6) relative to a base (4) is described. The positioner is driven by a piezoelectric arranged to expand and contract along a drive axis, the piezoelectric element has an input end coupled to the base and an output end coupled to first (14) and second (16) output levers extending away from the drive axis of the piezoelectric element in opposing directions. The output levers each have an inner arm arranged to be acted on by the piezoelectric element as it expands and an outer arm to which the sample platform is mounted via platform supports (26, 28). The output levers are mounted such that the piezoelectric element acts on the inner arms of the output levers to cause the outer arms to move in a plane containing the drive axis. This motion of the output levers is communicated via the platform supports to the sample platform, so moving it relative to the base along a direction parallel to the drive axis.
摘要:
An adjustable kinematic coupling for accurate and precision coupling of mechanical component parts, surfaces or assemblies and the like, where low-cost, accurate, and repeatable coupling are desired. The coupling may be used in applications that require high precision coupling and where the relative location of coupled components must be variable or adjustable. Kinematic interfaces employ convex members assembled to a first component that mate with corresponding concave elements or concave grooves in a second component so that the six relative degrees of freedom (or fewer if desired) between the two components are deterministically constrained. Kinematic elements are attached to the coupled component via a connection that may experience controlled rotation with respect to the component. In addition to rotation, kinematic elements may undergo controlled translation parallel to the mating direction of the coupling. The relative position of the coupled components may be adjusted by revolving one or more of the kinematic elements, thus enabling single or multi-degree of freedom control between the coupled components. Relative movement in additional degrees of freedom may be achieved by controlled translation of the kinematic elements with respect to the component in which they are housed.
摘要:
A high-precision device for providing positioning, registration and displacement includes a two-dimensional table for providing positioning and displacement, and a registration unit for bringing markers into registration with one another. The registration unit is attached to a carriage of the table via flexible articulated supports and can be moved by several, preferably seven, drives. The device can be used as a work table for reduction projectors and scanning electron microscopes, for example for investigating structural properties of materials.
摘要:
A mechanism for a multi-axis flexure positioner includes a fixed part and a movable part (7), the movable part (7) being connected to the fixed part via a plurality of transmission means, one for each axis, for transmitting actuation forces for the respective axes to the movable part (7). The transmission means for each axis includes a flexure member (2,3,8) arranged to transmit actuation forces for that axis to the movable part (7) and to flex between the fixed part and the movable part in response to actuation forces associated with the or each other axis. There are three flexure members (2,3,8) arranged to extend along three mutually-perpendicular axes so that each flexure member (2,3,8) is flexible along the axes of extent of the other two flexure members (2,3,8). Each of the three flexure members (2,3,8) comprises a pair of flexure linkages arranged to extend parallel to each other, the three pairs of linkages thus defining three mutually-perpendicular planes.