公开(公告)号：US5894530A

公开(公告)日：1999-04-13

申请号：US707631

申请日：1996-09-05

申请人： Donald R. Wilt

发明人： Donald R. Wilt

IPC分类号： G06K7/10 ,  G06K9/20

CPC分类号： G06K7/10594 ,  G06K7/10722

摘要： An optical system is disclosed that permits the viewing and reading of indicia, such as OCR scribes and/or barcodes, disposed on either side of a substrate, such as a semiconductor wafer, with a single camera. In one embodiment of the invention, optical elements are selectively positioned such that images of indicia fields disposed on either side of a substrate can be viewed (at the same magnification) whenever the substrate is in a given orientation, or such that images of indicia fields disposed on both sides of the substrate may be viewed at the same magnification, simultaneously. Optical paths may be folded to reduce the overall size of the optical viewing system.

摘要翻译： 公开了一种光学系统，其允许使用单个照相机来观察和读取设置在诸如半导体晶片的基板的任一侧上的标记，例如OCR划线条和/或条形码。 在本发明的一个实施例中，选择性地定位光学元件，使得每当衬底处于给定取向时，可以观察设置在衬底的任一侧上的标记场的图像（以相同的放大率），或者使得标记场的图像 可以同时放置在基板的两侧。 可以折叠光路以减小光学观察系统的整体尺寸。

公开(公告)号：US5231536A

公开(公告)日：1993-07-27

申请号：US877843

申请日：1992-05-01

申请人： Donald R. Wilt ,  Richard S. Sidell

发明人： Donald R. Wilt ,  Richard S. Sidell

IPC分类号： G06K7/10 ,  H05K13/08

CPC分类号： H05K13/08 ,  G06K7/10722 ,  G06K7/10732

摘要： Double banks of LED's, opaque baffles, and a camera having a field of view are disclosed for reading laser-etched character strings and other indicia on semiconductor wafers and other substrates. The LED's of the banks may be integrally or separably lensed, and masks may be provided proximate the banks and in the nearfield of the LED's.

摘要翻译： 公开了双层LED，不透明挡板和具有视野的照相机，用于在半导体晶片和其它基板上读取激光蚀刻字符串和其它标记。 银行的LED可以是整体的或可分离的透镜，并且可以在银行附近和LED的近场提供掩模。

公开(公告)号：US06407363B2

公开(公告)日：2002-06-18

申请号：US09823922

申请日：2001-03-30

申请人： Corey M. Dunsky ,  Ho W. Lo ,  Ken Whiteman ,  Donald R. Wilt ,  Spencer Barrett ,  Raman Sudhakar

发明人： Corey M. Dunsky ,  Ho W. Lo ,  Ken Whiteman ,  Donald R. Wilt ,  Spencer Barrett ,  Raman Sudhakar

IPC分类号： B23K2600

CPC分类号： B23K26/046 ,  B23K26/02 ,  B23K26/042 ,  B23K26/073 ,  B23K26/08 ,  B23K26/082 ,  B23K26/3568 ,  B23K26/384 ,  B23K26/389 ,  B23K26/702 ,  B23K26/707 ,  H01L21/486 ,  H05K3/0038 ,  H05K3/384 ,  H05K2203/108

摘要： A single pass actuator (70, 200), such as a deformable mirror (70), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output (66) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers (264) at higher fluences and underlying dielectric layers (266) at lower fluences to protect bottom metallic layers (268). The focus change is accomplished without requiring Z-axis movement of the laser positioning system (62). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.

摘要翻译： 诸如可变形反射镜（70）的单程致动器（70,200）优选地在焦点上优选地在少于1毫秒内改变，因此，紫外或可见波长激光脉冲的光点尺寸改变激光器的注量 在至少两个不同的注量级之间的工件表面处输出（66），以便于以更低的流量处理顶部金属层（264）并且以较低的流量处理下面的介电层（266）以保护底部金属层（268）。 在不需要激光定位系统（62）的Z轴移动的情况下实现聚焦改变。 另外，在切割操作期间可以有利地改变光斑尺寸，以减小通过锥度，减少唇形成，增加生产量和/或最小化损伤。

公开(公告)号：US5737122A

公开(公告)日：1998-04-07

申请号：US561181

申请日：1995-11-20

申请人： Donald R. Wilt ,  Richard S. Sidell

发明人： Donald R. Wilt ,  Richard S. Sidell

IPC分类号： G06K9/20 ,  G06K7/10 ,  H05K13/08 ,  G02B27/02

CPC分类号： G06K7/10722 ,  G06K7/10732 ,  H05K13/08

摘要： An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity. Opposing mirrors extending along the optical paths of the light sources, reflect light emitted from the light sources into the camera field of view, thereby increasing the illumination efficiency and permitting the use of fewer light sources.

摘要翻译： 提供一种照明系统，其具有一个或多个光源，不透明挡板和反射镜，用于照射衬底（例如半导体晶片）上的标记，以便通过与衬底平行或成一定角度排列的照相机进行观察。 光源包括用于照亮软痕的发光二极管（LED）和用于照射硬痕的广谱白炽灯。 暗场和光场照明器分别用于增强对浅色背景上的浅标记和浅色背景上的暗标记的读数。 光控单元允许手动或自动控制光源选择和光强度。 沿着光源的光路延伸的反射镜将从光源发射的光反射到照相机的视野内，从而提高照明效率并允许使用更少的光源。

公开(公告)号：US5469294A

公开(公告)日：1995-11-21

申请号：US98136

申请日：1993-07-26

申请人： Donald R. Wilt ,  Richard S. Sidell

发明人： Donald R. Wilt ,  Richard S. Sidell

IPC分类号： G06K7/10 ,  H05K13/08 ,  C02B27/02

CPC分类号： G06K7/10722 ,  G06K7/10732 ,  H05K13/08

摘要： An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity.

摘要翻译： 提供一种照明系统，其具有一个或多个光源，不透明挡板和反射镜，用于照射衬底（例如半导体晶片）上的标记，以便通过与衬底平行或成一定角度排列的照相机进行观察。 光源包括用于照亮软痕的发光二极管（LED）和用于照射硬痕的广谱白炽灯。 暗场和光场照明器分别用于增强对浅色背景上的浅标记和浅色背景上的暗标记的读取。 光控单元允许手动或自动控制光源选择和光强度。

公开(公告)号：US4312502A

公开(公告)日：1982-01-26

申请号：US143973

申请日：1980-04-25

申请人： Donald R. Wilt

发明人： Donald R. Wilt

IPC分类号： B65H15/02 ,  B65H1/22

CPC分类号： B65H15/02 ,  B65H2301/33214

摘要： The apparatus lifts a stack of sheets, turns the stack, and then places the side edges of the sheets on a conveyor. The lifting device is generally Z-shaped and is supported for unidirectional rotation about a horizontal axis adjacent one end of the conveyor. Two stacks of sheets are delivered to the conveyor per revolution of said device. The sheets are fed from said conveyor to a shingling conveyor which delivers a uniform shingle to a converting machine. The shingle density is controlled by a metering gate.

摘要翻译： 设备提升一叠纸张，转动纸堆，然后将纸张的侧边缘放在输送机上。 提升装置通常为Z形并且被支撑用于围绕邻近输送机的一端的水平轴线的单向旋转。 每一转所述装置将两堆纸张输送到输送机。 纸张从所述输送机供给到将均匀瓦片输送到转换机器的带状输送机。 木瓦密度由计量门控制。