公开(公告)号：US5469294A

公开(公告)日：1995-11-21

申请号：US98136

申请日：1993-07-26

申请人： Donald R. Wilt ,  Richard S. Sidell

发明人： Donald R. Wilt ,  Richard S. Sidell

IPC分类号： G06K7/10 ,  H05K13/08 ,  C02B27/02

CPC分类号： G06K7/10722 ,  G06K7/10732 ,  H05K13/08

摘要： An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity.

摘要翻译： 提供一种照明系统，其具有一个或多个光源，不透明挡板和反射镜，用于照射衬底（例如半导体晶片）上的标记，以便通过与衬底平行或成一定角度排列的照相机进行观察。 光源包括用于照亮软痕的发光二极管（LED）和用于照射硬痕的广谱白炽灯。 暗场和光场照明器分别用于增强对浅色背景上的浅标记和浅色背景上的暗标记的读取。 光控单元允许手动或自动控制光源选择和光强度。