Illumination system for OCR of indicia on a substrate
    1.
    发明授权
    Illumination system for OCR of indicia on a substrate 失效
    基底上标记OCR的照明系统

    公开(公告)号:US5737122A

    公开(公告)日:1998-04-07

    申请号:US561181

    申请日:1995-11-20

    摘要: An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity. Opposing mirrors extending along the optical paths of the light sources, reflect light emitted from the light sources into the camera field of view, thereby increasing the illumination efficiency and permitting the use of fewer light sources.

    摘要翻译: 提供一种照明系统,其具有一个或多个光源,不透明挡板和反射镜,用于照射衬底(例如半导体晶片)上的标记,以便通过与衬底平行或成一定角度排列的照相机进行观察。 光源包括用于照亮软痕的发光二极管(LED)和用于照射硬痕的广谱白炽灯。 暗场和光场照明器分别用于增强对浅色背景上的浅标记和浅色背景上的暗标记的读数。 光控单元允许手动或自动控制光源选择和光强度。 沿着光源的光路延伸的反射镜将从光源发射的光反射到照相机的视野内,从而提高照明效率并允许使用更少的光源。

    Illumination system for OCR of indicia on a substrate
    2.
    发明授权
    Illumination system for OCR of indicia on a substrate 失效
    基底上标记OCR的照明系统

    公开(公告)号:US5469294A

    公开(公告)日:1995-11-21

    申请号:US98136

    申请日:1993-07-26

    IPC分类号: G06K7/10 H05K13/08 C02B27/02

    摘要: An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity.

    摘要翻译: 提供一种照明系统,其具有一个或多个光源,不透明挡板和反射镜,用于照射衬底(例如半导体晶片)上的标记,以便通过与衬底平行或成一定角度排列的照相机进行观察。 光源包括用于照亮软痕的发光二极管(LED)和用于照射硬痕的广谱白炽灯。 暗场和光场照明器分别用于增强对浅色背景上的浅标记和浅色背景上的暗标记的读取。 光控单元允许手动或自动控制光源选择和光强度。

    Robust, LED illumination system for OCR of indicia on a substrate
    4.
    发明授权
    Robust, LED illumination system for OCR of indicia on a substrate 失效
    坚固的LED照明系统,用于基板上的标记OCR

    公开(公告)号:US5231536A

    公开(公告)日:1993-07-27

    申请号:US877843

    申请日:1992-05-01

    IPC分类号: G06K7/10 H05K13/08

    摘要: Double banks of LED's, opaque baffles, and a camera having a field of view are disclosed for reading laser-etched character strings and other indicia on semiconductor wafers and other substrates. The LED's of the banks may be integrally or separably lensed, and masks may be provided proximate the banks and in the nearfield of the LED's.

    摘要翻译: 公开了双层LED,不透明挡板和具有视野的照相机,用于在半导体晶片和其它基板上读取激光蚀刻字符串和其它标记。 银行的LED可以是整体的或可分离的透镜,并且可以在银行附近和LED的近场提供掩模。