公开(公告)号：US20070075243A1

公开(公告)日：2007-04-05

申请号：US11241093

申请日：2005-09-30

Applicant: David Kneeburg ,  Rohit Jain ,  Jason Osborne ,  Wei Yao ,  Matthew Klonowski ,  Ingo Schmitz

Inventor： David Kneeburg ,  Rohit Jain ,  Jason Osborne ,  Wei Yao ,  Matthew Klonowski ,  Ingo Schmitz

IPC: G12B21/20 ,  G01N13/10

CPC classification number: G01Q10/06 ,  G01Q30/04 ,  G01Q60/34 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851 ,  Y10S977/854

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features of a sample. This is accomplished by selecting a step distance between adjacent lines of the survey scan that does not equal the pitch of the features in a direction orthogonal to the direction the survey scan traverses, i.e., does not equal the pitch of the features in the scan direction, XPO. The aspect ratio of the scans can also be modified to further improve sample throughput.

Abstract translation: 优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，以使用小于五行，更优选两行的测量扫描进行样本测量，以精确地定位样本的特征场 。 这是通过选择在与扫描扫描方向正交的方向上不等于特征的间距的测量扫描的步距，即不等于扫描方向上的特征的间距来实现的 ，X PO。 也可以修改扫描的宽高比以进一步提高样品通量。

公开(公告)号：US20130182333A1

公开(公告)日：2013-07-18

申请号：US13812100

申请日：2011-07-21

Applicant: Matthew Meitl ,  Rudolph Bukovnik ,  Etienne Menard ,  Wolfgang Wagner ,  David Kneeburg ,  Jimmy Mark

Inventor： Matthew Meitl ,  Rudolph Bukovnik ,  Etienne Menard ,  Wolfgang Wagner ,  David Kneeburg ,  Jimmy Mark

IPC: G02B3/00

CPC classification number: G02B3/0031 ,  B29C33/3842 ,  B29C33/58 ,  B29C33/62 ,  G02B3/0025 ,  G02B3/0056

Abstract: Coating a machined mold with a flowable, hardenable polymer coating produces an optically-smooth finish and maintains sharpness in upward-pointing features. These procedures produce molds for highly efficient plano-convex silicone-on-glass lens arrays in a fast and inexpensive manner in which an end-mill defines the shape of a lens, and the coating produces its smoothness. End-mill machining and coating lens-shaped features in plates that have movable pins produce molds with eject features disposed inside features that form templates for lens elements without significantly reducing optical performance. Additionally, machining and coating plates that have movable inserts produce molds for lens arrays with reduced volume and one or several rings in each lens element.

Abstract translation: 用可流动的可硬化聚合物涂层涂覆加工的模具产生光学光滑的表面，并保持向上指向特征的清晰度。 这些程序以快速和便宜的方式为高效平凸硅硅玻璃透镜阵列生产模具，其中端铣刀限定透镜的形状，并且涂层产生其平滑度。 端铣加工和具有可移动销的板中的透镜形状特征在具有布置在特征内的弹出特征的模具中，其形成用于透镜元件的模板，而不显着降低光学性能。 此外，具有可移动嵌件的机械加工和涂布板可以产生具有减小体积的透镜阵列的模具和每个透镜元件中的一个或几个环。