公开(公告)号：US20070273288A1

公开(公告)日：2007-11-29

申请号：US11622966

申请日：2007-01-12

申请人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

发明人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

IPC分类号： H01J7/24

CPC分类号： H01J27/022 ,  H01J1/42 ,  H01J27/14 ,  H01J2237/03 ,  H01J2237/08

摘要： A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal control plate may support a gas distributor and an anode in the anode assembly. The thermal control plate may have a port for passing working gas from one side of the thermal control plate to the other. An interface surface on the thermal control plate may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor.

摘要翻译： 热控制板可以在离子源中轻松拆卸和更换。 离子源具有可移除的阳极组件，包括热控制板，其可分离并且与基座组件相隔离，以便易于维护阳极组件的可消耗部件。 热控制板可以支撑阳极组件中的气体分配器和阳极。 热控制板可以具有用于将工作气体从热控制板的一侧传递到另一侧的端口。 热控制板上的界面可以具有凹槽的图案，以允许工作气体分散在气体分配器下面。

公开(公告)号：US20050045035A1

公开(公告)日：2005-03-03

申请号：US10896747

申请日：2004-07-21

申请人： Daniel Siegfried ,  David Burtner ,  Scott Townsend ,  John Keem ,  Mark Krivoruchko ,  Valery Alexeyey ,  Vsevolod Zelenkov

发明人： Daniel Siegfried ,  David Burtner ,  Scott Townsend ,  John Keem ,  Mark Krivoruchko ,  Valery Alexeyey ,  Vsevolod Zelenkov

IPC分类号： B03C3/00 ,  F03H20060101 ,  H01J7/24

CPC分类号： H01J27/143 ,  H01J27/022 ,  H01J2237/08

摘要： A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular components allow for easier manufacturing and further result in a final assembly having better precision (e.g., a uniform gap dimensions along the longitudinal axis of the ion source). Modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A modular gas distribution system uniformly distributes a working gas to the ionization region of the module ion source. For each gas distribution module, gas distribution channels and baffles are laid out relative to the module joints to prevent gas leakage. Furthermore, gas manifolds and supply channels are used to bridge module joints while uniformly distributing the working gas to the ALS.

公开(公告)号：US20050248284A1

公开(公告)日：2005-11-10

申请号：US11061254

申请日：2005-02-18

申请人： David Burtner ,  Scott Townsend ,  Daniel Siegfried ,  Viacheslav Zhurin

发明人： David Burtner ,  Scott Townsend ,  Daniel Siegfried ,  Viacheslav Zhurin

IPC分类号： H01J7/24

CPC分类号： H01J27/04 ,  H01J2237/002 ,  H01J2237/08

摘要： An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally protected by the cooling plate. A thermally conductive material in a thermal transfer interface component can enhance the cooling capacity of the cooling plate. Furthermore, the seperation of the cooling plate and the anode allows the cooling plate and cooling lines to be electrically isolated from the high voltage of the anode (e.g., using a thermally conductive, electrically insulating material). Combining these structures into an anode subassembly and magnet subassembly can also facilitate assembly and maintenance of the ion source, particularly as the anode is free of coolant lines, which can present some difficulty during maintenance.

摘要翻译： 使用独立于阳极的冷却板来冷却离子源。 冷却板形成冷却剂腔，流体冷却剂（例如，液体或气体）可通过其流动以冷却阳极。 在这种构造中，磁体可以被冷却板热保护。 传热接口部件中的导热材料可以提高冷却板的冷却能力。 此外，冷却板和阳极的分离允许冷却板和冷却管线与阳极的高电压电隔离（例如，使用导热的电绝缘材料）。 将这些结构组合到阳极子组件和磁体子组件中也可以促进离子源的组装和维护，特别是当阳极没有冷却剂管线时，这在维护过程中可能存在一些困难。

公开(公告)号：US20050057166A1

公开(公告)日：2005-03-17

申请号：US10896745

申请日：2004-07-21

申请人： Daniel Siegfried ,  David Burtner ,  Scott Townsend ,  John Keem ,  Valery Alexeyev ,  Vsevolod Zelenkov ,  Mark Krivoruchko

发明人： Daniel Siegfried ,  David Burtner ,  Scott Townsend ,  John Keem ,  Valery Alexeyev ,  Vsevolod Zelenkov ,  Mark Krivoruchko

IPC分类号： H01J20060101 ,  H01J7/24 ,  H01J27/00

CPC分类号： H01J27/143

摘要： An ion source design and manufacturing techniques allows longitudinal cathode expansion along the length of the anode layer source (ALS). Cathode covers are used to secure the cathode plates to the source body assembly of an ion source. The cathode covers allow the cathode plate to expand along the longitudinal axis of the ion source, thereby relieving the stress introduced by differential thermal expansion. In addition, the cathode cover configuration allows for less expensive cathode plates, including modular cathode plates. Such plates can be adjusted relative to the cathode-cathode gap to prolong the life of a given cathode plate and maintain source performance requirements. A cathode plate in a linear section of an ion source has symmetrical edges and can, therefore, be flipped over to exchange the first (worn) cathode edge with the second (unworn) cathode edge.

摘要翻译： 离子源设计和制造技术允许纵向阴极沿阳极层源（ALS）的长度膨胀。 阴极盖用于将阴极板固定到离子源的源体组件。 阴极盖允许阴极板沿着离子源的纵向轴线膨胀，从而减轻由差动热膨胀引入的应力。 此外，阴极盖构造允许较便宜的阴极板，包括模块化阴极板。 这样的板可以相对于阴极 - 阴极间隙进行调节，以延长给定阴极板的使用寿命并保持源性能要求。 离子源的线性部分中的阴极板具有对称的边缘，因此可以翻转以与第二（未损坏的）阴极边缘交换第一（磨损）的阴极边缘。

公开(公告)号：US07914603B2

公开(公告)日：2011-03-29

申请号：US12147078

申请日：2008-06-26

申请人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

发明人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

IPC分类号： B01D46/46

CPC分类号： H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。

公开(公告)号：US20070273289A1

公开(公告)日：2007-11-29

申请号：US11622981

申请日：2007-01-12

申请人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

发明人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

IPC分类号： H01J49/02

CPC分类号： H01J27/146

摘要： A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.

摘要翻译： 气体分配器易于在离子源中移除和更换。 离子源具有可拆卸阳极组件，包括气体分配器，其可分离并且与基座组件相接触，以便易于维护阳极组件的可消耗部件。 气体分配器可以用多个固定螺钉安装在阳极组件中的热控制板上。 气体分配器可以是盘形的，在表面中具有沉孔以使固定螺钉的头部凹陷。 或者，气体分配器可以被离子源的其它结构或部件夹紧或保持就位。

公开(公告)号：US20070166599A1

公开(公告)日：2007-07-19

申请号：US11622949

申请日：2007-01-12

申请人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

发明人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

IPC分类号： H01M4/86 ,  H01M8/04

CPC分类号： H01J27/022 ,  H01J27/146

摘要： An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.

摘要翻译： 离子源具有可拆卸的可拆卸的阳极组件，并且与基座组件相接触，以便易于维护阳极组件的可消耗部件。 这种消耗品可以包括气体分配器，热控制板，阳极和插入在其它部件之间的一个或多个热转印片。 极片和阴极也可以是阳极组件的一部分。 阳极组件可以经由极片附接到基座组件。

公开(公告)号：US20050040031A1

公开(公告)日：2005-02-24

申请号：US10918865

申请日：2004-08-16

申请人： David Burtner ,  Daniel Siegfried ,  Richard Blacker ,  Valery Alexeyev ,  John Keem ,  Vsevolod Zelenkov ,  Mark Krivoruchko

发明人： David Burtner ,  Daniel Siegfried ,  Richard Blacker ,  Valery Alexeyev ,  John Keem ,  Vsevolod Zelenkov ,  Mark Krivoruchko

IPC分类号： C23C14/32 ,  C23C14/35 ,  C23C14/56 ,  H01J37/09

CPC分类号： C23C14/564 ,  C23C14/35 ,  H01J37/09 ,  H01J2237/022 ,  H01J2237/08

摘要： Shielding associated with an ion source, such as an anode layer source, reduces the amount and/or concentration of sputtered contaminants impinging and remaining on the surface of a target substrate. While passing the ion beam through to the target substrate, shielding can reduce the total amount of sputtered contaminants impinging the substrate before, during, and/or after passage of the substrate through the envelope of the etching beam. Particularly, a shield configuration that blocks the contaminants from impinging the substrate after the substrate passes through the etching beam (i.e., outside of the envelope of the etching beam) yields a higher quality substrate with reduced substrate contamination.

摘要翻译： 与离子源（例如阳极层源）相关联的屏蔽减少了撞击并残留在目标衬底表面上的溅射污染物的量和/或浓度。 当将离子束通过目标衬底时，屏蔽可以减少在衬底通过蚀刻束的外壳之前，之中和/或之后撞击衬底的溅射污染物的总量。 特别地，在衬底通过蚀刻光束（即，蚀刻光束的外壳之外）阻挡污染物撞击衬底的屏蔽结构产生具有降低的衬底污染的较高质量的衬底。

公开(公告)号：US20090320677A1

公开(公告)日：2009-12-31

申请号：US12147078

申请日：2008-06-26

申请人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

发明人： Ali Shajii ,  Xing Chen ,  Andrew Cowe ,  David Burtner ,  William Robert Entley ,  ShouQian Shao

IPC分类号： B01D53/22 ,  B01J19/08 ,  B01D46/46 ,  B01D45/08 ,  B01D50/00

CPC分类号： H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。

公开(公告)号：US20070125966A1

公开(公告)日：2007-06-07

申请号：US11622989

申请日：2007-01-12

申请人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

发明人： David Burtner ,  Scott Townsend ,  Daniel Siegfried

IPC分类号： H01J37/08

CPC分类号： H01J27/022 ,  H01J27/04 ,  H01J27/146 ,  H01J2237/002 ,  H01J2237/08

摘要： One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.

摘要翻译： 一个或多个热转印片可以在离子源中容易地移除和替换。 离子源具有可移除的阳极组件，其包括热分解片，其是可分离的并且与基底组件相容以便于维护阳极组件的可消耗部件。 热转印片材可以介于阳极组件内的消耗部件之间。 热转印片材可以是导热的并且是电绝缘的或导电的。