公开(公告)号：US20110156514A1

公开(公告)日：2011-06-30

申请号：US12974662

申请日：2010-12-21

申请人： Kazuhito WATANABE ,  Yukihito TASHIRO ,  Naoyuki NOZAWA ,  Daisuke KOBINATA ,  Hideo MANO

发明人： Kazuhito WATANABE ,  Yukihito TASHIRO ,  Naoyuki NOZAWA ,  Daisuke KOBINATA ,  Hideo MANO

IPC分类号： H02K5/128

CPC分类号： H02K5/128 ,  H01L21/67742

摘要： A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.

摘要翻译： 真空致动器包括真空分隔壁，其内部可以被抽真空，由真空分隔壁支撑以便自由旋转的转子，设置在转子的外周面上的永久磁铁，相对的线圈 到永磁体，以及设置有线圈的定子。 定子和真空分隔壁彼此一体地形成。

公开(公告)号：US20120145724A1

公开(公告)日：2012-06-14

申请号：US13315585

申请日：2011-12-09

申请人： Daisuke Kobinata

发明人： Daisuke Kobinata

IPC分类号： B65D6/40

CPC分类号： C23C16/4409 ,  C23C14/56 ,  H01L21/67376

摘要： A vacuum container which has a seal member in fitting faces of the vacuum container to be divided into half, has a labyrinth forming device inside the vacuum container in the fitting faces, and a labyrinth forming device has a concave member in which a concave portion is formed, a convex member which has a convex portion arranged to have a slight gap between the inner surface of the concave portion, and a vertically moving mechanism which operates the convex member in a direction close to the concave member.

摘要翻译： 在真空容器的配合面上具有密封部件的真空容器被分成一半的真空容器在配合面的真空容器内具有迷宫式成形装置，迷宫式成形装置具有：凹部，凹部 形成有凸部，该凸部具有布置成在凹部的内表面之间具有微小间隙的凸部和沿着靠近凹构件的方向操作凸部的垂直移动机构。

公开(公告)号：US20120014770A1

公开(公告)日：2012-01-19

申请号：US13182578

申请日：2011-07-14

申请人： Kazuhito Watanabe ,  Yukihito Tashiro ,  Naoyuki Nozawa ,  Daisuke Kobinata

发明人： Kazuhito Watanabe ,  Yukihito Tashiro ,  Naoyuki Nozawa ,  Daisuke Kobinata

IPC分类号： B25J9/00 ,  B25J18/00 ,  B25J15/06 ,  B25J11/00

CPC分类号： H01L21/67742

摘要： A substrate conveyance apparatus includes a first driving shaft, an arm portion having one end connected to the first driving shaft, a substrate holding unit capable of holding a substrate, and a connecting portion that connects the other end of the arm portion and the substrate holding unit. The connecting portion includes a rotating support portion that supports the substrate holding unit rotatably with respect to the arm portion, and a moving unit that moves the substrate holding unit upward or downward with respect to the arm portion in the direction of the rotating shaft about which the substrate holding unit is rotated by the rotating support portion.

摘要翻译： 一种基板输送装置，包括：第一驱动轴，具有与第一驱动轴连接的一端的臂部;能够保持基板的基板保持单元;连接臂部的另一端与基板保持用的连接部; 单元。 连接部分包括相对于臂部分可旋转地支撑基板保持单元的旋转支撑部分和移动单元，该移动单元使基板保持单元相对于臂部沿着旋转轴的方向向上或向下移动， 基板保持单元通过旋转支撑部旋转。

公开(公告)号：US08912697B2

公开(公告)日：2014-12-16

申请号：US12974662

申请日：2010-12-21

申请人： Kazuhito Watanabe ,  Yukihito Tashiro ,  Naoyuki Nozawa ,  Daisuke Kobinata ,  Hideo Mano

发明人： Kazuhito Watanabe ,  Yukihito Tashiro ,  Naoyuki Nozawa ,  Daisuke Kobinata ,  Hideo Mano

IPC分类号： H02K5/10 ,  H02K3/00 ,  H01L21/677 ,  H02K5/128

CPC分类号： H02K5/128 ,  H01L21/67742

摘要： A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.

摘要翻译： 真空致动器包括真空分隔壁，其内部可以被抽真空，由真空分隔壁支撑以便自由旋转的转子，设置在转子的外周面上的永久磁铁，相对的线圈 到永磁体，以及设置有线圈的定子。 定子和真空分隔壁彼此一体地形成。