发明授权
US08912697B2 Vacuum actuator including a stator forming a part of a vacuum partition wall
有权
真空致动器包括形成真空分隔壁的一部分的定子
- 专利标题： Vacuum actuator including a stator forming a part of a vacuum partition wall
- 专利标题（中）： 真空致动器包括形成真空分隔壁的一部分的定子
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申请号： US12974662申请日： 2010-12-21
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公开(公告)号： US08912697B2公开(公告)日： 2014-12-16
- 发明人: Kazuhito Watanabe , Yukihito Tashiro , Naoyuki Nozawa , Daisuke Kobinata , Hideo Mano
- 申请人： Kazuhito Watanabe , Yukihito Tashiro , Naoyuki Nozawa , Daisuke Kobinata , Hideo Mano
- 申请人地址： JP Kawasaki-Shi, Kanagawa-Ken
- 专利权人： Canon Anelva Corporation
- 当前专利权人： Canon Anelva Corporation
- 当前专利权人地址： JP Kawasaki-Shi, Kanagawa-Ken
- 代理机构： Buchanan Ingersoll & Rooney PC
- 优先权： JP2009-295148 20091225; JP2010-047573 20100304; JP2010-047574 20100304
- 主分类号： H02K5/10
- IPC分类号： H02K5/10 ; H02K3/00 ; H01L21/677 ; H02K5/128
摘要：
A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.
公开/授权文献
- US20110156514A1 VACUUM ACTUATOR AND SUBSTRATE TRANSPORT ROBOT 公开/授权日：2011-06-30
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