公开(公告)号：US08443459B2

公开(公告)日：2013-05-14

申请号：US13435086

申请日：2012-03-30

Applicant: Nghi Phan ,  Craig Cusworth ,  Craig Prater

Inventor： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC: G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC classification number: G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

Abstract: A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

Abstract translation: 高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜，以增加感测光束的聚焦深度。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US08166567B2

公开(公告)日：2012-04-24

申请号：US11687304

申请日：2007-03-16

Applicant: Nghi Phan ,  Craig Cusworth ,  Craig Prater

Inventor： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC: G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC classification number: G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

Abstract: A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

Abstract translation: 提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率和小于10μm的感测光束光点小直径。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US07770231B2

公开(公告)日：2010-08-03

申请号：US11832881

申请日：2007-08-02

Applicant: Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

Inventor： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC: G01N23/00

CPC classification number: G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

Abstract: A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

Abstract translation: 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20120204295A1

公开(公告)日：2012-08-09

申请号：US13435086

申请日：2012-03-30

Applicant: Nghi Phan ,  Craig Cusworth ,  Craig Prater

Inventor： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC: G01Q10/00

CPC classification number: G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

Abstract: A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

Abstract translation: 高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜，以增加感测光束的聚焦深度。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US20090032706A1

公开(公告)日：2009-02-05

申请号：US11832881

申请日：2007-08-02

Applicant: Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

Inventor： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC: G01N23/00

CPC classification number: G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

Abstract: A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

Abstract translation: 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20080223119A1

公开(公告)日：2008-09-18

申请号：US11687304

申请日：2007-03-16

Applicant: Nghi Phan ,  Craig Cusworth ,  Craig Prater

Inventor： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC: G01B5/28

CPC classification number: G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

Abstract: A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

Abstract translation: 提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率以及小于10um的感测光束光点小直径。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。