Abstract:
The invention describes a sputtering target comprising a ceramic body having tin oxide as a major constituent and between 0.5 and 15 wt % of at least two other oxides, one of which being antimony oxide, the target having a density of at least 90%, and preferably at least 95%, of the theoretical density (TD) and an electrical resistivity of less than 50 Ohm·cm, and the target having a planar or rotary configuration with a sputtering area of at least 10 cm2, and preferably at least 20 cm2. Also described is a process for manufacturing this sputtering target according comprising the steps of: —providing for a slurry comprising tin oxide and said at least two other oxides, —shaping of a green body from said slurry, and drying said green body, —firing of said green body at a temperature between 1050 and 1250° C., thereby obtaining a pre-shaped target, and —grinding of said pre-shaped target to its final dimensions.
Abstract:
The present invention provides a method of removing spectator ions and contaminants from aqueous suspensions of solid particles. In accordance with the method of the invention, the solid particles are transported across a phase boundary into a non-polar organic solvent, leaving the spectator ions and contaminants in the aqueous phase. To facilitate the efficient transportation of the solid particles across the phase boundary, the surface of the solid particles is coated with an amphiphilic polyelectrolyte. If desired, the solid particles can be recovered from the organic phase by evaporating the organic solvent.