公开(公告)号：US5718029A

公开(公告)日：1998-02-17

申请号：US746029

申请日：1996-11-06

Applicant: Cheng-Chang Hung ,  Horng-Jong Wang ,  Yu-Cheng Su

Inventor： Cheng-Chang Hung ,  Horng-Jong Wang ,  Yu-Cheng Su

IPC: H01L21/677 ,  B23Q17/00 ,  F16L5/00

CPC classification number: H01L21/67727 ,  H01L21/67017 ,  Y10T137/6969 ,  Y10T29/49764 ,  Y10T29/4978

Abstract: A procedure for the installation of clean room processing tools which require rough pumping equipment located in areas outside of the clean room. Instead of simultaneously installing and testing the pumping equipment and the processing tool, the pumping equipment is installed first along with its associated support services. Foreline piping, terminating in the proximity of the processing tool vacuum port is also installed and capped off at this time. Functional testing and qualification of the rough pumping equipment is done and then the processing tool is moved into place and connected to the pumping line on the clean room floor. This independent and sequential installation procedure reduces perturbations of on-going manufacturing activity in the clean room area and also minimizes the risk of costly damage to the processing tool by faulty, un-tested, pumping equipment. In addition, since the rough pumping equipment can be procured and installed before hand, time can be saved by getting the processing tool on-line faster.

公开(公告)号：US5883919A

公开(公告)日：1999-03-16

申请号：US859007

申请日：1997-05-20

Applicant: Cheng-Chang Hung ,  Lien-Fang Lin

Inventor： Cheng-Chang Hung ,  Lien-Fang Lin

IPC: C23C16/44 ,  C30B31/16 ,  F27D7/06

CPC classification number: C23C16/4412 ,  C30B31/16

Abstract: A furnace system for preventing gas leakage is disclosed. The furnace system includes a bottom board for holding a furnace tube. A gas injection device is connected to the furnace tube at a first port for injecting reaction gas into the furnace tube. An exhaust subsystem is connected to the furnace tube at a second port. The exhaust subsystem has a first node, a second node, a third node and a fourth node. A vacuum seal is connected to the furnace tube at a third port for preventing the exhaust gas from leaking. The vacuum seal is connected to the exhaust subsystem at the first node and the second node. Finally, an N.sub.2 sealing tube is connected to furnace tube and surrounding the seam between the furnace tube and the bottom board.

Abstract translation: 公开了一种用于防止气体泄漏的炉系统。 炉系统包括用于保持炉管的底板。 气体注入装置在用于将反应气体注入炉管的第一端口连接到炉管。 排气子系统在第二个端口连接到炉管。 排气子系统具有第一节点，第二节点，第三节点和第四节点。 在第三端口处连接到炉管的真空密封件，用于防止废气泄漏。 真空密封件连接到第一节点和第二节点处的排气子系统。 最后，N2密封管连接到炉管并围绕炉管和底板之间的接缝。

公开(公告)号：US5867881A

公开(公告)日：1999-02-09

申请号：US949960

申请日：1997-10-14

Applicant: Cheng-Chang Hung ,  Horng-Jong Wang ,  Yu-Cheng Su

Inventor： Cheng-Chang Hung ,  Horng-Jong Wang ,  Yu-Cheng Su

IPC: H01L21/677 ,  B23Q17/00 ,  F16L5/00

CPC classification number: H01L21/67727 ,  H01L21/67017 ,  Y10T137/6969 ,  Y10T29/49764 ,  Y10T29/4978

Abstract: A procedure for the installation of clean room processing tools which require rough pumping equipment located in areas outside of the clean room. Instead of simultaneously installing and testing the pumping equipment and the processing tool, the pumping equipment is installed first along with its associated support services. Foreline piping, terminating in the proximity of the processing tool vacuum port is also installed and capped off at this time. Functional testing and qualification of the rough pumping equipment is done and then the processing tool is moved into place and connected to the pumping line on the clean room floor. This independent and sequential installation procedure reduces perturbations of on-going manufacturing activity in the clean room area and also minimizes the risk of costly damage to the processing tool by faulty, un-tested, pumping equipment. In addition, since the rough pumping equipment can be procured and installed before hand, time can be saved by getting the processing tool on-line faster.

Abstract translation: 安装洁净室处理工具的程序，需要在洁净室外面的区域进行粗抽水设备。 泵送设备首先与其相关的支持服务一起安装，而不是同时安装和测试泵送设备和加工工具。 此外，在处理工具真空口附近终止的前级管路也安装并封盖。 完成粗抽设备的功能测试和鉴定，然后将处理工具移入到位，并连接到洁净室地板上的抽水管路。 这种独立且顺序的安装程序可以减少洁净室区域内正在进行的制造活动的干扰，并且还可以通过故障，未经测试的泵送设备降低对加工工具的昂贵损坏的风险。 另外，由于可以在手之前采购和安装粗抽设备，所以可以通过更快的在线加工工具节省时间。

公开(公告)号：US6107198A

公开(公告)日：2000-08-22

申请号：US48212

申请日：1998-03-26

Applicant: Wei-Farn Lin ,  Cheng-Chang Hung

Inventor： Wei-Farn Lin ,  Cheng-Chang Hung

IPC: C23C16/34 ,  C23C16/44 ,  H01L21/44 ,  B05C11/00 ,  C23C16/00 ,  H01L21/31

CPC classification number: C23C16/345 ,  C23C16/4412 ,  Y10S438/905 ,  Y10S438/958 ,  Y10S438/963

Abstract: The present invention comprises means for sublimating and handling ammonium chloride (NH.sub.4 Cl) vapor, a bi-product of a silicon nitride growth process, thereby preventing backstreaming into the reactor and ingestion of vapor and particulates by the vacuum pump. The exhaust circuit comprises a novel combination of valves, sublimation and cold traps, cooling and heating elements to facilitate reduction of condensed NH.sub.4 Cl volume from a first path trap thus reducing maintenance, increasing production up-time and enhancing product yield.

Abstract translation: 本发明包括用于升华和处理氯化铵（NH 4 Cl）蒸气的装置，其是氮化硅生长过程的双重产物，从而防止反流进入反应器并通过真空泵摄入蒸气和微粒。 排气回路包括阀，升华和冷阱，冷却和加热元件的新颖组合，以便于从第一路径捕集器减少冷凝的NH 4 Cl体积，从而减少维护，增加生产正常运行时间和提高产品产量。