摘要:
A semiconductor manufacturing system includes a semiconductor manufacturing apparatus, a first controller for controlling the semiconductor manufacturing apparatus, an auxiliary machine for the semiconductor manufacturing apparatus, a second controller for controlling the auxiliary machine, and a third controller for electrically coupling the first and second controllers. The second controller outputs an auxiliary machine-in-operation signal to the third controller when the auxiliary machine is operating, outputs an auxiliary machine-stopping signal to the third controller when the auxiliary machine is stopping, and operates or stops the auxiliary machine according to an instruction signal received from the third controller. The first controller receives the auxiliary machine-in-operation signal or the auxiliary machine-stopping signal via the third controller, and keeps the semiconductor manufacturing apparatus in operation or on standby when the first controller is receiving the auxiliary machine-in-operation signal. The third controller stops the auxiliary machine when the third controller detects that the semiconductor manufacturing apparatus is on standby, and outputs the auxiliary machine-in-operation signal, instead of the auxiliary machine-stopping signal received from the second controller, to the first controller.
摘要:
A reel drum is rotatably supported on a board, and a tensioner case is detachably mounted to the board in the vicinity of the reel drum. Wires are extended from the reel drum in directions opposite to each other. A pair of tension rollers pressed onto the respective wires and roller holders rotatably supporting the respective tension rollers are attached to the tensioner case to be allowed to move in directions substantially orthogonal to the respective wires when the wires are tensioned. Moreover, the tensioner case is provided with biasing means to bias the roller holders in directions that the tension rollers are pressed onto the respective wires. The biasing means is a torsion spring. A contact portion of each roller holder which a wire end extended portion of the torsion spring is in contact with has an angle shape with a ridge aligned in a direction orthogonal to the wire end extended portion of the torsion spring.
摘要:
An opening/closing body for opening/closing an opening provided in a vehicle body, a pair of guide members, and a reel drum attached onto a board of a drive unit provided between both of the guide members, are provided. Respective one ends of a pair of wires are connected to the opening/closing body, and the wires are wound around the pair of guide members. Then, respective other ends of the pair of wires are connected to the reel drum so as to be reeled in directions reverse to each other. On the board of the drive unit, an extended portion extended toward one of the guide members is provided, and one of the guide members is attached onto the extended portion.
摘要:
A work aligning system capable of easily altering the kind of works to be aligned. The work aligning system (1) comprises a storage device (10) in which nuts (11) are stored, a take-out base (30) on which the nuts (11) are placed, and a robot (20) for grasping and taking out the nuts from the take-out base (30) and aligning the nuts. An electromagnet (53) is provided at the tip end of the robot arm (23) of the robot (20). The storage device (10) is equipped with a plurality of buckets (131-134) in which nuts (11) of different kinds are stored, and a feed screw mechanism (14) for moving one bucket selected from the plurality of buckets (131-134) to a position near the take-out base (30). The take-out base (30) is equipped with a part (31) on which the nuts (11) are placed and a drive device (32) for discharging the nuts (11) on the part (31) to one bucket selected from the plurality of buckets (131-134).
摘要:
Provided is a work measuring method by which a deviation quantity of a work measuring point from a reference position can be measured in a short time. A work surface is set as a reference point when the measuring point is positioned at the reference position, and a distance from a photographing device to a reference surface is set as a reference distance. A deviation quantity of the measurement point in a direction intersecting a photographing direction on the reference surface is measured by the photographing device, and a deviation quantity of the measuring point in the photographing direction is measured by a laser distance sensor. Then, based on the deviation quantity measured by the photographing device, the deviation quantity measured by the laser distance sensor, and the reference distance, a deviation quantity of the measuring point in a direction intersecting the photographing direction is calculated.
摘要:
According to one embodiment, an optical disc apparatus includes a main frame, a medium drive unit, and an ascent/descent retaining member which supports the medium drive unit for ascent and descent. The ascent/descent retaining member includes a pair of arm portions, a connecting portion, and pivotal portions supported on the sidewalls, individually. One of the front wall of the main frame and the connecting portion integrally has a guide boss projecting toward the other of them and a press projection which is elastically deformable in a direction in which the connecting portion extends. The other of the front wall and the connecting portion has a guide groove which extends in the ascent and descent direction and is engaged with the guide boss, and a guide rib having a guide surface for deforming the press projection to generate an elastic force and provided adjacent to the guide groove.
摘要:
To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member.The glass substrate storage case includes: a bottom member 12 on which a reticle R is placed; a cover member 20 overlaid on the bottom member 12 so as to cover the reticle R placed on the bottom member 12 and to form a space portion between the cover member 20 and the bottom member 12; a sealing member 18 provided in the bottom member 12 and/or the cover member 20 to keep the space portion airtight in a state where the cover member 20 is overlaid on the bottom member 12; and hook members 24 provided on the cover member 20 and hooked to the bottom member 12 to maintain the state where the cover member 20 is overlaid on the bottom member 12.
摘要:
A semiconductor manufacturing system includes a semiconductor manufacturing apparatus, a first controller for controlling the semiconductor manufacturing apparatus, an auxiliary machine for the semiconductor manufacturing apparatus, a second controller for controlling the auxiliary machine, and a third controller for electrically coupling the first and second controllers. The second controller outputs an auxiliary machine-in-operation signal to the third controller when the auxiliary machine is operating, outputs an auxiliary machine-stopping signal to the third controller when the auxiliary machine is stopping, and operates or stops the auxiliary machine according to an instruction signal received from the third controller. The first controller receives the auxiliary machine-in-operation signal or the auxiliary machine-stopping signal via the third controller, and keeps the semiconductor manufacturing apparatus in operation or on standby when the first controller is receiving the auxiliary machine-in-operation signal. The third controller stops the auxiliary machine when the third controller detects that the semiconductor manufacturing apparatus is on standby, and outputs the auxiliary machine-in-operation signal, instead of the auxiliary machine-stopping signal received from the second controller, to the first controller.
摘要:
A workpiece mounting system which is highly versatile and can reduce a cycle time. A workpiece mounting system (1) mounts a sunroof member (3) to an inner panel (2A) of a body (2). The workpiece mounting system (1) is provided with a first robot (5), a second robot (6), and a control device (7) for controlling the first and second robots. The control device (7) performs a step of calculating as positional information the position of the sunroof member (3) and the position of the inner panel (2A) by means of a CCD camera of the first robot (5), a step of holding and conveying the sunroof member (3) by means of the first robot (5) on the basis of the positional information and positioning the sunroof member (3) relative to the inner panel (2A), a step of temporarily fixing the sunroof member (3) to the inner panel (2A) by means of the first robot (5), and a step of finally fixing the sunroof member (3) to the inner panel (2A) by means of the second robot (6) on the basis of the already calculated positional information.
摘要:
A paper quality determining sensor and a faulty paper sorting device capable of detecting reaction forces of paper sheets themselves which vary according to paper quality using a plurality of rollers so as to detect the stiffness (rigidity) of paper sheets accurately without being affected by thicknesses of the paper sheets.