Semiconductor manufacturing system, controller, semiconductor manufacturing system control method, and processing liquid collection method
    1.
    发明授权
    Semiconductor manufacturing system, controller, semiconductor manufacturing system control method, and processing liquid collection method 失效
    半导体制造系统,控制器,半导体制造系统控制方法和处理液体采集方法

    公开(公告)号:US07853347B2

    公开(公告)日:2010-12-14

    申请号:US12033421

    申请日:2008-02-19

    IPC分类号: G06F19/00

    摘要: A semiconductor manufacturing system includes a semiconductor manufacturing apparatus, a first controller for controlling the semiconductor manufacturing apparatus, an auxiliary machine for the semiconductor manufacturing apparatus, a second controller for controlling the auxiliary machine, and a third controller for electrically coupling the first and second controllers. The second controller outputs an auxiliary machine-in-operation signal to the third controller when the auxiliary machine is operating, outputs an auxiliary machine-stopping signal to the third controller when the auxiliary machine is stopping, and operates or stops the auxiliary machine according to an instruction signal received from the third controller. The first controller receives the auxiliary machine-in-operation signal or the auxiliary machine-stopping signal via the third controller, and keeps the semiconductor manufacturing apparatus in operation or on standby when the first controller is receiving the auxiliary machine-in-operation signal. The third controller stops the auxiliary machine when the third controller detects that the semiconductor manufacturing apparatus is on standby, and outputs the auxiliary machine-in-operation signal, instead of the auxiliary machine-stopping signal received from the second controller, to the first controller.

    摘要翻译: 半导体制造系统包括半导体制造装置,用于控制半导体制造装置的第一控制器,用于半导体制造装置的辅助机器,用于控制辅助机器的第二控制器,以及用于将第一和第二控制器电耦合的第三控制器 。 第二控制器在辅助机器运行时向第三控制器输出辅助机器操作信号,当辅助机器停止时向第三控制器输出辅助停机信号,并根据辅助机器停止辅助机器 从第三控制器接收的指令信号。 第一控制器通过第三控制器接收辅助机器操作信号或辅助停机信号,并且当第一控制器正在接收辅助机器操作信号时,保持半导体制造装置运行或待机。 当第三控制器检测到半导体制造装置处于待机状态时,第三控制器停止辅助机器,并将辅助机器操作信号代替从第二控制器接收的辅助停机信号输出到第一控制器 。

    Wire reciprocating device
    2.
    发明申请

    公开(公告)号:US20060068958A1

    公开(公告)日:2006-03-30

    申请号:US11224898

    申请日:2005-09-13

    IPC分类号: F16H7/12

    摘要: A reel drum is rotatably supported on a board, and a tensioner case is detachably mounted to the board in the vicinity of the reel drum. Wires are extended from the reel drum in directions opposite to each other. A pair of tension rollers pressed onto the respective wires and roller holders rotatably supporting the respective tension rollers are attached to the tensioner case to be allowed to move in directions substantially orthogonal to the respective wires when the wires are tensioned. Moreover, the tensioner case is provided with biasing means to bias the roller holders in directions that the tension rollers are pressed onto the respective wires. The biasing means is a torsion spring. A contact portion of each roller holder which a wire end extended portion of the torsion spring is in contact with has an angle shape with a ridge aligned in a direction orthogonal to the wire end extended portion of the torsion spring.

    Opening/closing device for vehicle
    3.
    发明申请
    Opening/closing device for vehicle 失效
    车辆开/关装置

    公开(公告)号:US20060055202A1

    公开(公告)日:2006-03-16

    申请号:US11226002

    申请日:2005-09-14

    IPC分类号: B60J5/06

    摘要: An opening/closing body for opening/closing an opening provided in a vehicle body, a pair of guide members, and a reel drum attached onto a board of a drive unit provided between both of the guide members, are provided. Respective one ends of a pair of wires are connected to the opening/closing body, and the wires are wound around the pair of guide members. Then, respective other ends of the pair of wires are connected to the reel drum so as to be reeled in directions reverse to each other. On the board of the drive unit, an extended portion extended toward one of the guide members is provided, and one of the guide members is attached onto the extended portion.

    摘要翻译: 提供了一种用于打开/关闭设置在车体中的开口的开闭体,一对引导构件和安装在设置在两个引导构件之间的驱动单元的基板上的卷轴鼓。 一对电线的一端与打开/关闭主体相连,电线缠绕在一对引导件上。 然后,一对电线的各个另一端连接到卷筒,以便沿彼此相反的方向卷绕。 在驱动单元的基板上,设置有朝向一个引导构件延伸的延伸部,并且其中一个引导构件附接到延伸部。

    Work aligning system and method of moving work
    4.
    发明授权
    Work aligning system and method of moving work 有权
    工作对齐系统和移动工作方法

    公开(公告)号:US08721252B2

    公开(公告)日:2014-05-13

    申请号:US12922516

    申请日:2009-02-16

    IPC分类号: B65G47/14

    摘要: A work aligning system capable of easily altering the kind of works to be aligned. The work aligning system (1) comprises a storage device (10) in which nuts (11) are stored, a take-out base (30) on which the nuts (11) are placed, and a robot (20) for grasping and taking out the nuts from the take-out base (30) and aligning the nuts. An electromagnet (53) is provided at the tip end of the robot arm (23) of the robot (20). The storage device (10) is equipped with a plurality of buckets (131-134) in which nuts (11) of different kinds are stored, and a feed screw mechanism (14) for moving one bucket selected from the plurality of buckets (131-134) to a position near the take-out base (30). The take-out base (30) is equipped with a part (31) on which the nuts (11) are placed and a drive device (32) for discharging the nuts (11) on the part (31) to one bucket selected from the plurality of buckets (131-134).

    摘要翻译: 一种工作对准系统,能够轻松地改变要对齐的作品种类。 工件对准系统(1)包括储存有螺母(11)的存储装置(10),放置有螺母(11)的取出基座(30),以及用于把持和 从取出座(30)取出螺母并对准螺母。 在机器人(20)的机器人手臂(23)的前端设有电磁体(53)。 存储装置(10)配备有多个桶(131-134),其中存储有不同种类的螺母(11),以及用于移动从多个桶(131)中选择的一个桶的进给螺杆机构(14) -134)到靠近取出基座(30)的位置。 所述取出座(30)配备有其上放置有螺母(11)的部分(31)和用于将所述部件(31)上的所述螺母(11)排放到一个铲斗上的驱动装置(32) 多个水桶(131-134)。

    WORK MEASURING METHOD, METHOD FOR ATTACHING SUSPENSION ASSEMBLY AND APPARATUS FOR ATTACHING SUSPENSION ASSEMBLY
    5.
    发明申请
    WORK MEASURING METHOD, METHOD FOR ATTACHING SUSPENSION ASSEMBLY AND APPARATUS FOR ATTACHING SUSPENSION ASSEMBLY 失效
    工作测量方法,连接悬挂组件的方法和连接悬架总成的装置

    公开(公告)号:US20110022218A1

    公开(公告)日:2011-01-27

    申请号:US12934576

    申请日:2009-03-23

    IPC分类号: G06F17/00 G01C3/08

    摘要: Provided is a work measuring method by which a deviation quantity of a work measuring point from a reference position can be measured in a short time. A work surface is set as a reference point when the measuring point is positioned at the reference position, and a distance from a photographing device to a reference surface is set as a reference distance. A deviation quantity of the measurement point in a direction intersecting a photographing direction on the reference surface is measured by the photographing device, and a deviation quantity of the measuring point in the photographing direction is measured by a laser distance sensor. Then, based on the deviation quantity measured by the photographing device, the deviation quantity measured by the laser distance sensor, and the reference distance, a deviation quantity of the measuring point in a direction intersecting the photographing direction is calculated.

    摘要翻译: 提供了一种工件测量方法,通过该方法可以在短时间内测量工件测量点与参考位置的偏差量。 当测量点位于参考位置时,工作表面被设置为参考点,并且将从拍摄装置到参考表面的距离设置为参考距离。 通过拍摄装置测量与基准面上的拍摄方向相交的方向上的测量点的偏离量,并且通过激光距离传感器测量拍摄方向上的测量点的偏离量。 然后,根据由拍摄装置测得的偏差量,由激光距离传感器测得的偏差量和基准距离,计算与拍摄方向相交的方向上的测量点的偏差量。

    OPTICAL DISC APPARATUS
    6.
    发明申请
    OPTICAL DISC APPARATUS 审中-公开
    光盘设备

    公开(公告)号:US20090089820A1

    公开(公告)日:2009-04-02

    申请号:US12195731

    申请日:2008-08-21

    IPC分类号: G11B7/08

    CPC分类号: G11B17/0515

    摘要: According to one embodiment, an optical disc apparatus includes a main frame, a medium drive unit, and an ascent/descent retaining member which supports the medium drive unit for ascent and descent. The ascent/descent retaining member includes a pair of arm portions, a connecting portion, and pivotal portions supported on the sidewalls, individually. One of the front wall of the main frame and the connecting portion integrally has a guide boss projecting toward the other of them and a press projection which is elastically deformable in a direction in which the connecting portion extends. The other of the front wall and the connecting portion has a guide groove which extends in the ascent and descent direction and is engaged with the guide boss, and a guide rib having a guide surface for deforming the press projection to generate an elastic force and provided adjacent to the guide groove.

    摘要翻译: 根据一个实施例,一种光盘装置包括主框架,介质驱动单元和支撑介质驱动单元上升和下降的上升/下降保持构件。 上升/下降保持构件包括一对臂部分,连接部分和支撑在侧壁上的枢转部分。 主框架的前壁和连接部分中的一个整体地具有朝向另一个突出的引导凸台和沿连接部分延伸的方向可弹性变形的按压突起。 前壁和连接部分中的另一个具有沿上升和下降方向延伸并与导向凸起接合的导向槽,以及具有用于使压力凸起变形以产生弹性力的引导表面的引导肋, 邻近导槽。

    Glass Substrate Storage Case, Glass Substrate Transfer Apparatus, Glass Substrate Management Apparatus, Glass Substrate Distribution Method , Sealing Member, And Sealing Structure
    7.
    发明申请
    Glass Substrate Storage Case, Glass Substrate Transfer Apparatus, Glass Substrate Management Apparatus, Glass Substrate Distribution Method , Sealing Member, And Sealing Structure 审中-公开
    玻璃基板储存盒,玻璃基板转印装置,玻璃基板管理装置,玻璃基板分配方法,密封件和密封结构

    公开(公告)号:US20080173560A1

    公开(公告)日:2008-07-24

    申请号:US11662266

    申请日:2005-09-09

    IPC分类号: B65D85/38 B07C5/342 H01L21/02

    摘要: To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member.The glass substrate storage case includes: a bottom member 12 on which a reticle R is placed; a cover member 20 overlaid on the bottom member 12 so as to cover the reticle R placed on the bottom member 12 and to form a space portion between the cover member 20 and the bottom member 12; a sealing member 18 provided in the bottom member 12 and/or the cover member 20 to keep the space portion airtight in a state where the cover member 20 is overlaid on the bottom member 12; and hook members 24 provided on the cover member 20 and hooked to the bottom member 12 to maintain the state where the cover member 20 is overlaid on the bottom member 12.

    摘要翻译: 为了提供能够防止玻璃基板的质量恶化的玻璃基板收纳盒,玻璃基板搬送装置将玻璃基板从玻璃基板收容箱自动转印到另一个壳体; 分别管理玻璃基板的玻璃基板管理装置,玻璃基板的交易玻璃基板分配方法,同时将玻璃基板保存在专用的玻璃基板收纳箱内,密封部件的密封效果的提高以及使用该密封部件的密封结构。 玻璃基板收容箱包括:底部部件12,在其上放置标线片R; 覆盖在底部构件12上的盖构件20,以覆盖放置在底部构件12上的标线片R并且在盖构件20和底部构件12之间形成空间部分; 设置在底部构件12和/或盖构件20中的密封构件18,以将盖部件20重叠在底部构件12上的状态下保持空间部分气密; 以及钩构件24,其设置在盖构件20上并且钩挂到底部构件12,以保持覆盖构件20覆盖在底部构件12上的状态。

    Semiconductor manufacturing system and method for waste liquid collection
    8.
    发明授权
    Semiconductor manufacturing system and method for waste liquid collection 有权
    半导体制造系统及废液收集方法

    公开(公告)号:US08234013B2

    公开(公告)日:2012-07-31

    申请号:US12940494

    申请日:2010-11-05

    IPC分类号: G06F19/00

    摘要: A semiconductor manufacturing system includes a semiconductor manufacturing apparatus, a first controller for controlling the semiconductor manufacturing apparatus, an auxiliary machine for the semiconductor manufacturing apparatus, a second controller for controlling the auxiliary machine, and a third controller for electrically coupling the first and second controllers. The second controller outputs an auxiliary machine-in-operation signal to the third controller when the auxiliary machine is operating, outputs an auxiliary machine-stopping signal to the third controller when the auxiliary machine is stopping, and operates or stops the auxiliary machine according to an instruction signal received from the third controller. The first controller receives the auxiliary machine-in-operation signal or the auxiliary machine-stopping signal via the third controller, and keeps the semiconductor manufacturing apparatus in operation or on standby when the first controller is receiving the auxiliary machine-in-operation signal. The third controller stops the auxiliary machine when the third controller detects that the semiconductor manufacturing apparatus is on standby, and outputs the auxiliary machine-in-operation signal, instead of the auxiliary machine-stopping signal received from the second controller, to the first controller.

    摘要翻译: 半导体制造系统包括半导体制造装置,用于控制半导体制造装置的第一控制器,用于半导体制造装置的辅助机器,用于控制辅助机器的第二控制器,以及用于将第一和第二控制器电耦合的第三控制器 。 第二控制器在辅助机器运行时向第三控制器输出辅助机器操作信号,当辅助机器停止时向第三控制器输出辅助停机信号,并根据辅助机器停止辅助机器 从第三控制器接收的指令信号。 第一控制器通过第三控制器接收辅助机器操作信号或辅助停机信号,并且当第一控制器正在接收辅助机器操作信号时,保持半导体制造装置运行或待机。 当第三控制器检测到半导体制造装置处于待机状态时,第三控制器停止辅助机器,并且将辅助机器操作信号代替从第二控制器接收到的辅助停机信号输出到第一控制器 的。

    WORKPIECE MOUNTING SYSTEM, WORKPIECE MOUNTING METHOD, SUNROOF UNIT HOLDING DEVICE, AND SUNROOF UNIT HOLDING METHOD
    9.
    发明申请
    WORKPIECE MOUNTING SYSTEM, WORKPIECE MOUNTING METHOD, SUNROOF UNIT HOLDING DEVICE, AND SUNROOF UNIT HOLDING METHOD 审中-公开
    工作安装系统,工作安装方法,SUNROOE单元保持装置和SUNROOE单元保持方法

    公开(公告)号:US20110160905A1

    公开(公告)日:2011-06-30

    申请号:US13061636

    申请日:2009-08-25

    IPC分类号: B25J9/10 B60J7/043

    摘要: A workpiece mounting system which is highly versatile and can reduce a cycle time. A workpiece mounting system (1) mounts a sunroof member (3) to an inner panel (2A) of a body (2). The workpiece mounting system (1) is provided with a first robot (5), a second robot (6), and a control device (7) for controlling the first and second robots. The control device (7) performs a step of calculating as positional information the position of the sunroof member (3) and the position of the inner panel (2A) by means of a CCD camera of the first robot (5), a step of holding and conveying the sunroof member (3) by means of the first robot (5) on the basis of the positional information and positioning the sunroof member (3) relative to the inner panel (2A), a step of temporarily fixing the sunroof member (3) to the inner panel (2A) by means of the first robot (5), and a step of finally fixing the sunroof member (3) to the inner panel (2A) by means of the second robot (6) on the basis of the already calculated positional information.

    摘要翻译: 工件安装系统,通用性高,可以缩短循环时间。 工件安装系统(1)将天窗构件(3)安装到主体(2)的内板(2A)上。 工件安装系统(1)设置有第一机器人(5),第二机器人(6)和用于控制第一和第二机器人的控制装置(7)。 控制装置(7)执行通过第一机器人(5)的CCD照相机计算天窗部件(3)的位置和内板(2A)的位置的位置信息的步骤,步骤 基于所述位置信息,通过所述第一机器人(5)保持和传送所述天窗构件(3)并且相对于所述内板(2A)定位所述天窗构件(3);将所述天窗构件 (3)通过第一机器人(5)连接到内板(2A),并且通过第二机器人(6)将天窗部件(3)最终固定到内板(2A)上的步骤 已经计算出的位置信息的基础。

    Paper quality determination sensor and faulty banknote sorting device
    10.
    发明授权
    Paper quality determination sensor and faulty banknote sorting device 失效
    纸张质量测定传感器和有缺陷的纸币分类装置

    公开(公告)号:US06574569B1

    公开(公告)日:2003-06-03

    申请号:US09646772

    申请日:2001-01-22

    IPC分类号: G01L504

    CPC分类号: G07D7/182

    摘要: A paper quality determining sensor and a faulty paper sorting device capable of detecting reaction forces of paper sheets themselves which vary according to paper quality using a plurality of rollers so as to detect the stiffness (rigidity) of paper sheets accurately without being affected by thicknesses of the paper sheets.

    摘要翻译: 一种纸质量确定传感器和故障纸分选装置,其能够检测纸张本身的反作用力,其根据纸张质量而使用多个辊变化,以便能够精确地检测纸张的刚度(刚度)而不受厚度的影响 纸张。