公开(公告)号：US06555407B1

公开(公告)日：2003-04-29

申请号：US09693233

申请日：2000-10-20

申请人： Nicolae Pantazi Chitica ,  Fredrik Salomonsson ,  Anita Risberg

发明人： Nicolae Pantazi Chitica ,  Fredrik Salomonsson ,  Anita Risberg

IPC分类号： H01L2100

CPC分类号： C30B33/005 ,  B01J3/006 ,  B01J15/00 ,  C30B29/40 ,  H01L21/02178 ,  H01L21/02241 ,  H01L21/02255 ,  H01L21/31666

摘要： A method of carrying out the controlled oxidation of A material, such as Al(Ga)As is oxidized in a controlled manner placing it in a reactor, and causing a carrier gas containing an oxidizing vapour, such as water, at a controlled partial pressure to flow over the oxidizable Material. In this way, the reaction process can be made sensitive to only one variable.

摘要翻译： 实施Al（Ga）As的A材料的受控氧化的方法以受控的方式被氧化，将其放置在反应器中，并且以受控的分压使包含氧化蒸气如水的载气 以流过可氧化材料。 以这种方式，可以使反应过程仅对一个变量敏感。