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    Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers
    1.
    发明授权
    Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers 失效
    用于磁阻换能器的类金刚石碳和氧化物双层绝缘体

    公开(公告)号：US06215630B1

    公开(公告)日：2001-04-10

    申请号：US08741277

    申请日：1996-10-30

    Applicant: Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    Inventor： Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    IPC: G11B533

    CPC classification number: G11B5/3906 ,  G11B5/3163 ,  G11B5/3903 ,  H01F41/34 ,  Y10T409/303752

    Abstract: A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.

    Abstract translation: 通过在第一材料的暴露表面上沉积一层类金刚石碳并将一层第二材料沉积到类金刚石碳层上形成磁性结构。 将光致抗蚀剂施加到第二层的暴露表面，并以期望结构的形式进行图案化。 用不侵蚀类金刚石碳层的湿蚀刻剂去除第二层的暴露部分。 此后，除去任何剩余的光致抗蚀剂。

    Inverted magnetoresistive head
    2.
    发明授权
    Inverted magnetoresistive head 失效
    倒置磁阻头

    公开(公告)号：US5668689A

    公开(公告)日：1997-09-16

    申请号：US695756

    申请日：1996-08-08

    Applicant: Allan E. Schultz ,  Frank S. Stageberg ,  Kenneth P. Ash ,  Brian S. Zak

    Inventor： Allan E. Schultz ,  Frank S. Stageberg ,  Kenneth P. Ash ,  Brian S. Zak

    IPC: G11B5/39

    CPC classification number: G11B5/3903 ,  G11B5/3967

    Abstract: An inverted magnetoresistive head is disclosed. The inverted magnetoresistive head includes a reader positioned on top of a writer. The writer includes a bottom pole, a polymer insulator, a write gap, a pole tip and a top pole. The reader includes a bottom shield, a first reader gap, a magnetoresistive element, electrical contacts, a second reader gap and a shield.

    Abstract translation: 公开了一种反转磁阻磁头。 反转磁阻头包括位于写入器顶部的读取器。 作者包括底极，聚合物绝缘体，写间隙，极尖和顶极。 读取器包括底部屏蔽，第一读取器间隙，磁阻元件，电触点，第二读取器间隙和屏蔽。

    No-field, low power FeMn deposition giving high exchange films
    3.
    发明授权
    No-field, low power FeMn deposition giving high exchange films 失效
    无场，低功率FeMn沉积给予高交换膜

    公开(公告)号：US5666247A

    公开(公告)日：1997-09-09

    申请号：US437646

    申请日：1995-05-09

    Applicant: Allan E. Schultz

    Inventor： Allan E. Schultz

    IPC: C23C14/34 ,  G11B5/39 ,  H01F10/32

    CPC classification number: B82Y25/00 ,  G11B5/399 ,  H01F10/3218 ,  G11B5/3932

    Abstract: A method of producing a magnetoresistive read transducer with improved longitudinal bias due to high exchange coupling is disclosed. A layer of antiferromagnetic material is sputtered deposited onto a layer of ferromagnetic material in the absence of a magnetic field and at a power density below 0.7 W/cm.sup.2. The layers of ferromagnetic material and antiferromagnetic material are annealed at a low temperature of between 200.degree. C. and 250.degree. C. for between 6 and 26 hours.

    Abstract translation: 公开了一种由于高交换耦合而产生具有改进的纵向偏置的磁阻读取传感器的方法。 在不存在磁场和功率密度低于0.7W / cm 2的情况下溅射沉积在铁磁材料层上的一层反铁磁性材料。 铁磁材料和反铁磁性材料层在200〜250℃的低温下退火6〜26小时。

    Diamond-like carbon for ion milling magnetic material
    4.
    发明授权
    Diamond-like carbon for ion milling magnetic material 失效
    用于离子研磨磁性材料的类金刚石碳

    公开(公告)号：US5658470A

    公开(公告)日：1997-08-19

    申请号：US571395

    申请日：1995-12-13

    Applicant: Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    Inventor： Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    IPC: C23F4/00 ,  G11B5/31 ,  B44C1/22 ,  C23F1/00

    CPC classification number: C23F4/00 ,  G11B5/3163 ,  G11B5/3116

    Abstract: A diamond-like carbon mask is formed on the surface of the magnetic material for ion-milling the magnetic material into a magnetic pole of a transducer. The mask is formed by depositing a layer of diamond-like carbon over the magnetic material. Successive layers of photoresist, SiO.sub.2 and photoresist are applied over the magnetic material. The second layer of photoresist is patterned in the shape of the pole being formed. The exposed insulating layer is etched with an etchant that does not attack the diamond-like carbon, the exposed portions of the photoresist are exposed and removed, and the exposed portion of the diamond-like carbon is etched with an oxygen etchant. The remaining photoresist is washed away to remove the remaining insulating material. In one form of the invention, a layer of SiO.sub.2 may additionally be formed over the diamond-like carbon to protect the diamond-like carbon from being affected by any undercut of the photoresist by the oxygen etchant. The SiO.sub.2 layer is etched prior to etching the diamond-like carbon. The mask is used to ion mill the magnetic material to the desired pole.

    Abstract translation: 在磁性材料的表面上形成类金刚石碳掩模，用于将磁性材料离子研磨成换能器的磁极。 掩模通过在磁性材料上沉积一层类金刚石碳而形成。 光致抗蚀剂，SiO 2和光致抗蚀剂的连续层被施加在磁性材料上。 第二层光致抗蚀剂被图案化成形成的极的形状。 暴露的绝缘层用不侵蚀类金刚石碳的蚀刻剂蚀刻，光刻胶的暴露部分被暴露和去除，并且用氧蚀刻剂蚀刻类金刚石碳的暴露部分。 洗去剩余的光致抗蚀剂以除去剩余的绝缘材料。 在本发明的一种形式中，还可以在类金刚石碳之上形成SiO 2层，以保护类金刚石碳免受氧蚀刻剂的光刻胶的任何底切的影响。 在蚀刻类金刚石碳之前蚀刻SiO 2层。 该掩模用于将磁性材料离子研磨到所需的极点。

    Diamond-like carbon wet etchant stop for formation of magnetic transducers
    6.
    发明授权
    Diamond-like carbon wet etchant stop for formation of magnetic transducers 失效
    钻石状碳湿蚀刻剂停止形成磁性换能器

    公开(公告)号：US5681426A

    公开(公告)日：1997-10-28

    申请号：US571469

    申请日：1995-12-13

    Applicant: Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    Inventor： Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    IPC: G11B5/31 ,  G11B5/39 ,  H01F41/34 ,  B44C1/22

    CPC classification number: G11B5/3906 ,  G11B5/3163 ,  H01F41/34 ,  G11B5/3903 ,  Y10T409/303752

    Abstract: A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.

    Abstract translation: 通过在第一材料的暴露表面上沉积一层类金刚石碳并将一层第二材料沉积到类金刚石碳层上而形成磁性结构。 将光致抗蚀剂施加到第二层的暴露表面，并以期望结构的形式进行图案化。 用不侵蚀类金刚石碳层的湿蚀刻剂去除第二层的暴露部分。 此后，除去任何剩余的光致抗蚀剂。

    Diamond-like carbon encapsulation of magnetic heads
    7.
    发明授权
    Diamond-like carbon encapsulation of magnetic heads 失效
    钻石状碳封装磁头

    公开(公告)号：US5640292A

    公开(公告)日：1997-06-17

    申请号：US587270

    申请日：1996-01-17

    Applicant: Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    Inventor： Allan E. Schultz ,  L. Vincent Ruscello ,  William H. Nunne

    IPC: G11B5/31 ,  G11B5/127

    CPC classification number: G11B5/3106

    Abstract: A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.

    Abstract translation: 支撑在基板上的薄膜磁换能器包括终止在衬底上的衬垫上的线圈。 一层类似钻石的碳材料封装了头部，基底和线圈，但不包括垫片。 在传感器，线圈和基板的暴露部分上沉积一层类似金刚石的碳。 描述了三种技术，用于曝光焊盘，包括采用光致抗蚀剂掩模，在导电路径上沉积硅粘合剂层而不是焊盘，并且使用光致抗蚀剂掩模在焊盘上蚀刻类金刚石碳层并分解硅 具有设计电压的粘合剂层。

    MR element-to-contact alignment test structure
    8.
    发明授权
    MR element-to-contact alignment test structure 失效
    MR元件对接触对准测试结构

    公开(公告)号：US5390420A

    公开(公告)日：1995-02-21

    申请号：US198946

    申请日：1994-02-18

    Applicant: Allan E. Schultz

    Inventor： Allan E. Schultz

    IPC: G01B7/31 ,  G01R33/09 ,  G01C15/00

    CPC classification number: G01R33/09 ,  G01B7/31

    Abstract: A device and method for determining alignment accuracy between magnetoresistive elements and contacts of magnetoresistive heads formed on a wafer are disclosed. A first alignment test structure is defined using a first photomask. The first alignment test structure is formed from a first material having a first characteristic sheet resistivity. A second alignment test structure is defined using a second photomask. The second alignment test structure is formed from a second material having a second characteristic sheet resistivity lower than the first characteristic sheet resistivity. The second alignment test structure is formed in contact with the first alignment test structure. A resistance value is dependent upon the first and second characteristic sheet resistivities and upon alignment between the first alignment test structure and the second alignment test structure such that changes in alignment between the first and second alignment test structures result in changes in the resistance value. Changes in the resistance value are indicative of changes in alignment between magnetoresistive elements and contacts formed on the wafer.

    Abstract translation: 公开了一种用于确定磁阻元件和形成在晶片上的磁阻头的触点之间的对准精度的装置和方法。 使用第一光掩模来定义第一对准测试结构。 第一对准测试结构由具有第一特征薄片电阻率的第一材料形成。 使用第二光掩模来定义第二对准测试结构。 第二对准测试结构由具有低于第一特征薄片电阻率的第二特征薄片电阻率的第二材料形成。 第二对准测试结构形成为与第一对准测试结构接触。 电阻值取决于第一和第二特征片电阻率，以及第一对准测试结构和第二对准测试结构之间的对准，使得第一和第二对准测试结构之间的对准变化导致电阻值的变化。 电阻值的变化表示磁阻元件和形成在晶片上的触点之间的对准变化。

    Narrow track inductive write head having a two-piece pole
    9.
    发明授权
    Narrow track inductive write head having a two-piece pole 有权
    窄轨感应写头，具有两片极

    公开(公告)号：US06301076B1

    公开(公告)日：2001-10-09

    申请号：US09246448

    申请日：1999-02-09

    Applicant: Frank E. Stageberg ,  Kenneth P. Ash ,  James K. Price ,  Feng Wang ,  Elzbieta J. Haftek ,  Allan E. Schultz ,  Richard P. Larson

    Inventor： Frank E. Stageberg ,  Kenneth P. Ash ,  James K. Price ,  Feng Wang ,  Elzbieta J. Haftek ,  Allan E. Schultz ,  Richard P. Larson

    IPC: G11B5147

    CPC classification number: G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3153 ,  G11B5/3163 ,  Y10T29/49025 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044

    Abstract: A two-piece pole for an inductive write head has a first pole piece in the tip region contiguous the gap and confronting the other pole across the gap. The first pole piece has a width defining the gap width of the write head at the air bearing surface. A second pole piece is connected to the first pole piece and extends to the back gap. At least a portion of the second pole piece is connected to the first pole piece and has a width larger than the width of the first pole piece. The second pole piece means has surfaces within the pole tip region that intersect at external corners facing the gap, at least two surfaces of each of these external corners being joined at an obtuse angle so that none of said external corner is a sharp external corner, thereby minimizing fringe fields. In one form, a pole cap between the first and second pole pieces has a trapezoidal configuration forming the obtuse angles.

    Abstract translation: 用于感应式写入头的两片式极头具有尖端区域中的与间隙连接的第一极片，并且将另一极对面跨越间隙。 第一极片具有限定写入头在空气支承表面处的间隙宽度的宽度。 第二极靴连接到第一极靴并延伸到后隙。 第二极靴的至少一部分连接到第一极靴，其宽度大于第一极靴的宽度。 第二极靴装置具有在极尖区域内的面向间隙的外角处的表面，这些外角中的每一个的至少两个表面以钝角连接，使得所述外角部都不是尖锐的外角， 从而最小化边缘场。 在一种形式中，第一和第二极片之间的极帽具有形成钝角的梯形构造。

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