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11 条记录 (耗时 0.045 秒)

    Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface
    2.
    发明授权
    Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface 失效

    公开(公告)号：US06356347B1

    公开(公告)日：2002-03-12

    申请号：US09285336

    申请日：1999-04-02

    申请人： Masao Watanabe ,  Akiko Okubo

    发明人： Masao Watanabe ,  Akiko Okubo

    IPC分类号： H01J4014

    CPC分类号： G01N21/211 ,  G01B11/303 ,  G01N21/88 ,  G01N21/94 ,  G01N21/9501

    摘要： A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.

    Tetraorganophosponium dicyclic tetraorganoborate catalyst
    6.
    发明授权
    Tetraorganophosponium dicyclic tetraorganoborate catalyst 有权
    四有机磷鎓二环四硼酸盐催化剂

    公开(公告)号：US06524989B2

    公开(公告)日：2003-02-25

    申请号：US09833585

    申请日：2001-04-13

    申请人： Sumiya Miyake ,  Akiko Okubo ,  Hiromi Honda ,  Yoshiyuki Go ,  Hiroshi Nagata ,  Minoru Kobayashi

    发明人： Sumiya Miyake ,  Akiko Okubo ,  Hiromi Honda ,  Yoshiyuki Go ,  Hiroshi Nagata ,  Minoru Kobayashi

    IPC分类号： B01J3120

    CPC分类号： H01L23/293 ,  B01J31/0268 ,  B01J31/06 ,  B01J31/146 ,  C08G59/245 ,  C08G59/68 ,  C08G59/688 ,  C08G73/121 ,  C08L63/00 ,  H01L2924/0002 ,  Y10T428/31511 ,  C08L61/04 ,  H01L2924/00

    摘要： This invention provides a latent catalyst having a structure of phosphonium borate consisting of a monovalent cation portion in which four specific groups are bonded to the phosphorus atom and a monovalent anion portion in which four specific groups are bonded to the boron atom, and a latent catalyst having a structure wherein the above phosphonium borate is the recurring unit and at least two of said recurring unit are connected through at least one of the four specific groups bonded to the boron atom. This invention also provides a thermosetting resin composition comprising such a latent catalyst and an epoxy resin molding material comprising such a latent catalyst and further provides a semiconductor device in which a semiconductor is encapsulated with said epoxy resin molding material.

    摘要翻译： 本发明提供一种潜在催化剂，其具有由一个阳离子部分组成的硼酸鏻结构，其中四个特定基团与磷原子键合，其中四个特定基团与硼原子键合的一价阴离子部分，潜在催化剂 具有其中上述硼酸鏻是重复单元的结构，并且所述重复单元中的至少两个通过键合到硼原子的四个特定基团中的至少一个连接。 本发明还提供一种包含这种潜催化剂和包含这种潜催化剂的环氧树脂模制材料的热固性树脂组合物，并且还提供半导体器件，其中半导体被所述环氧树脂模制材料封装。

    Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface
    7.
    发明授权
    Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface 有权

    公开(公告)号：US06433877B1

    公开(公告)日：2002-08-13

    申请号：US09819245

    申请日：2001-03-28

    申请人： Masao Watanabe ,  Akiko Okubo

    发明人： Masao Watanabe ,  Akiko Okubo

    IPC分类号： G01J404

    摘要： A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.

    Surface inspection using the ratio of intensities of s—and p-polarized light components of a laser beam reflected a rough surface
    8.
    发明授权
    Surface inspection using the ratio of intensities of s—and p-polarized light components of a laser beam reflected a rough surface 失效
    使用激光束的s偏振光分量和p偏振光分量的强度比的表面检测反映了粗糙表面

    公开(公告)号：US06376852B2

    公开(公告)日：2002-04-23

    申请号：US09820052

    申请日：2001-03-28

    申请人： Masao Watanabe ,  Akiko Okubo

    发明人： Masao Watanabe ,  Akiko Okubo

    IPC分类号： G01N2121

    CPC分类号： G01N21/211 ,  G01B11/303 ,  G01N21/88 ,  G01N21/94 ,  G01N21/9501

    摘要： A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the. surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.

    摘要翻译： 表面检查装置将激光束照射到样品的表面上，二维地扫描表面，并检测反射激光束的s偏振光分量和p偏振光分量的强度。 对样品表面的每个位置计算出s（p偏振光分量）和p偏振光分量的反射强度之比（RR）的RR（反射率比），并且在表面上的RR的二维分布 检测样品。 将该测量的RR的分布宽度与清洁样品的自然宽度进行比较。 当作为比较的结果，RR分布宽度与自然宽度分开时，样品的表面被确定为被污染。 因此，可以基于s偏振光分量和p偏振光分量的反射强度的RR快速容易地确定样品的微观粗糙表面上不存在或存在污染。