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公开(公告)号：US20110022186A1
公开(公告)日：2011-01-27
申请号：US12852895
申请日：2010-08-09
IPC分类号： G05B9/03
CPC分类号： G05B19/0421 , G05B2219/2231 , G05B2219/24187
摘要： Apparatus and methods for controlling a system that operates responsive to a plurality of input control signals are disclosed. During operation the system generates a plurality of output status/control signals. A master controller has at least first and second controllers. The first controller outputs and inputs signals over a first communication path, and the second controller outputs and inputs signals over a second communication path. The first and second controllers output signals based on input signals received over the first and second communication paths, respectively, and also based on stored control data. A plurality of input/output modules are provided. Each of the input/output modules has first and second slave controllers. The first slave controller of each of the input/output modules inputs and outputs signals over the first communication path to the first controller, and the second slave controller outputs and inputs signals over the second communication path. Each of the first slave controllers outputs and inputs signals to and from a first input/output circuit, and each of the second slave controllers outputs and inputs signals to and from a second input/output circuit. Each of the input/output modules also includes a combiner circuit. At least some of the input control signals for controlling the system are generated by the combiner circuit of each input/output module based on signals output from both the first and second input/output circuits. The output control signals for controlling the system are generated based on output status/control signals from the system that are coupled to each of the first and second input/output circuits of the input/output modules.
摘要翻译： 公开了用于控制响应于多个输入控制信号而操作的系统的装置和方法。 在操作期间，系统产生多个输出状态/控制信号。 主控制器至少具有第一和第二控制器。 第一控制器通过第一通信路径输出和输入信号，并且第二控制器通过第二通信路径输出和输入信号。 第一和第二控制器分别基于通过第一和第二通信路径接收的输入信号，并且还基于存储的控制数据来输出信号。 提供多个输入/输出模块。 每个输入/输出模块都有第一个和第二个从属控制器。 每个输入/输出模块的第一从属控制器通过第一通信路径输入和输出信号到第一控制器，而第二从控制器通过第二通信路径输出和输入信号。 每个第一从属控制器输出信号并从第一输入/输出电路输入信号，并且每个第二从属控制器输出信号并从第二输入/输出电路输入信号。 每个输入/输出模块还包括组合器电路。 基于从第一和第二输入/输出电路输出的信号，用于控制系统的至少一些输入控制信号由每个输入/输出模块的组合器电路产生。 用于控制系统的输出控制信号基于耦合到输入/输出模块的第一和第二输入/输出电路中的每一个的来自系统的输出状态/控制信号而产生。
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公开(公告)号：US06764385B2
公开(公告)日：2004-07-20
申请号：US10208156
申请日：2002-07-29
IPC分类号： B24C700
CPC分类号： B24C5/005 , B08B5/02 , B08B7/0035 , B08B7/0092 , B24C1/003 , H01L21/67051
摘要： A plasma assisted cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. The cleaning is conducted by applying to the substrate surface a mixture of gases selected from the group consisting of oxygen, nitrogen, hydrogen, fluorine, hydrofluorocarbon or a mixture of such gases to both remove the photoresist layer and alter the composition of the residues such that the residues are soluble in water and/or have a weakened bonds that they can be removed with a stream of cryogenic medium. The cryogenic and plasma processes can be performed sequentially or simultaneously. In certain embodiments, the cryogenic cleaning medium nozzle is driven in an oscillatory or vibratory manner so the nozzle spray is delivered in a manner to provide pulsing of the spray and to provide as “snow plow” effect on contaminants as the spray delivers the cleaning medium against the surface. The surface may be transported past the nozzle, and the cleaning may occur in an enclosed controlled environment.
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公开(公告)号：US06530823B1
公开(公告)日：2003-03-11
申请号：US09636265
申请日：2000-08-10
IPC分类号： B24B100
CPC分类号： H01L21/67051 , B08B3/02 , B08B7/0092 , B24C1/003 , B24C3/22 , B24C3/322 , G02F1/1333 , H01L21/67028
摘要： A cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. The nozzle is driven in an oscillatory manner at a predetermined amplitude and frequency so the nozzle spray is delivered in a manner to provide pulsing of the spray and to provide as “snow plow” effect on contaminants as the spray delivers the cleaning medium against the surface. The surface is transported past the nozzle, and the cleaning occurs in an enclosed controlled environment.
摘要翻译： 用于执行必须基本上没有污染物的表面的清洁的低温清洁剂和用于在表面上喷射低温清洁介质的弹性安装的喷嘴。 喷嘴以预定的振幅和频率以振荡的方式被驱动，因此喷嘴喷射以一种方式被输送以提供喷雾的脉冲，并且当喷雾器将清洁介质递送到表面上时对污染物提供“雪犁”效应 。 表面经过喷嘴运输，清洁发生在封闭的受控环境中。
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公开(公告)号：US06249990B1
公开(公告)日：2001-06-26
申请号：US09275359
申请日：1999-03-23
IPC分类号： F26B504
CPC分类号： H01L21/67386 , F26B21/14 , F26B25/063 , H01L21/67393 , H01L21/67396 , H01L21/67724
摘要： In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.
摘要翻译： 在一个实施例中，具有装配在第二容器（90）内的第一容器（10）的推车（5）用于运输和存储集成电路基板。 集成电路基板被放置在第一容器（10）内，并且第一容器（10）的门（18）被封闭并相对于门密封件（24）密封。 然后用氮气吹扫第一容器（10）以从第一容器（10）的内部排出水分和反应性气体。 清洗后，将第一容器（10）放置在第二容器（90）内。 然后，第二容器（90）的门（102）被封闭并相对于门密封件（104）密封。 然后用氮气吹扫第二容器（90）以从第二容器（90）的内部排出水分和反应性气体。 然后将包含集成电路基板的推车（5）运送到下一个制造区域。 集成电路和其它制品可以使用本发明的推车系统进行制造。
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公开(公告)号：US06101740A
公开(公告)日：2000-08-15
申请号：US275359
申请日：1999-03-23
IPC分类号： B65G1/00 , F26B21/14 , F26B25/06 , H01L21/02 , H01L21/673 , H01L21/677 , F26B5/04
CPC分类号： H01L21/67386 , F26B21/14 , F26B25/063 , H01L21/67393 , H01L21/67396 , H01L21/67724
摘要： In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.
摘要翻译： 在一个实施例中，具有装配在第二容器（90）内的第一容器（10）的推车（5）用于运输和存储集成电路基板。 集成电路基板被放置在第一容器（10）内，并且第一容器（10）的门（18）被封闭并相对于门密封件（24）密封。 然后用氮气吹扫第一容器（10）以从第一容器（10）的内部排出水分和反应性气体。 清洗后，将第一容器（10）放置在第二容器（90）内。 然后，第二容器（90）的门（102）被封闭并相对于门密封件（104）密封。 然后用氮气吹扫第二容器（90）以从第二容器（90）的内部排出水分和反应性气体。 然后将包含集成电路基板的推车（5）运送到下一个制造区域。 集成电路和其它制品可以使用本发明的推车系统进行制造。
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公开(公告)号：US08942831B2
公开(公告)日：2015-01-27
申请号：US12852895
申请日：2010-08-09
IPC分类号： G05B19/18 , G05D1/00 , G06F7/00 , G06F11/00 , G05B19/042
CPC分类号： G05B19/0421 , G05B2219/2231 , G05B2219/24187
摘要： Apparatus and methods for controlling a system that operates responsive to a plurality of input control signals are disclosed. During operation the system generates a plurality of output status/control signals. A master controller has at least first and second controllers. The first controller outputs and inputs signals over a first communication path, and the second controller outputs and inputs signals over a second communication path. The first and second controllers output signals based on input signals received over the first and second communication paths, respectively, and also based on stored control data. A plurality of input/output modules are provided. Each of the input/output modules has first and second slave controllers. The first slave controller of each of the input/output modules inputs and outputs signals over the first communication path to the first controller, and the second slave controller outputs and inputs signals over the second communication path. Each of the first slave controllers outputs and inputs signals to and from a first input/output circuit, and each of the second slave controllers outputs and inputs signals to and from a second input/output circuit. Each of the input/output modules also includes a combiner circuit. At least some of the input control signals for controlling the system are generated by the combiner circuit of each input/output module based on signals output from both the first and second input/output circuits. The output control signals for controlling the system are generated based on output status/control signals from the system that are coupled to each of the first and second input/output circuits of the input/output modules.
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7.发明授权Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants 失效用于抗蚀剂剥离的方法和用于清洁基本上没有污染物的表面的其它方法公开(公告)号：US07297286B2
公开(公告)日：2007-11-20
申请号：US11045666
申请日：2005-01-28
IPC分类号： C23F1/00
CPC分类号： B24C5/005 , B08B5/02 , B08B7/0035 , B08B7/0092 , B24C1/003 , H01L21/67051
摘要： A method for manufacturing an article having polymeric residue that is to be removed during the manufacture of the article is disclosed. The article is introduced into a controlled environment of a processing tool having one or more processing chambers. Free radicals are generated from one or more reactant gases and introduced into at least one of the one or more processing chambers where they react with the polymeric residue. A cryogenic cleaning medium is supplied into at least one of the one or more processing chambers where the cryogenic cleaning medium removes the polymeric residue present after the free radicals react with the polymeric residue. The reactant gases are selected to facilitate removal of the polymeric residue with the cryogenic cleaning medium. The cryogenic cleaning medium is supplied with a pulsating flow via a nozzle implement that sweeps across the article. The pulsating flow may be generated via a piezo device or a rotating shaft with a hole the periodically enables or interrupts flow through a flow channel.
摘要翻译： 公开了一种制造具有在制品制造期间被除去的聚合物残余物的制品的方法。 将物品引入具有一个或多个处理室的处理工具的受控环境中。 自由基由一种或多种反应气体产生，并被引入至一个或多个处理室中的至少一个，在这些处理室中它们与聚合物残余物反应。 将低温清洁介质供应到一个或多个处理室中的至少一个处理室中，其中低温清洁介质除去自由基与聚合物残余物反应后存在的聚合物残余物。 选择反应物气体以便于用低温清洁介质去除聚合物残余物。 低温清洁介质通过扫过物品的喷嘴工具供应脉动流。 脉动流可以经由压电装置或具有周期性地启动或中断通过流动通道的孔的旋转轴产生。
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公开(公告)号：US07254452B2
公开(公告)日：2007-08-07
申请号：US11242568
申请日：2005-10-03
CPC分类号： G05B19/0421 , G05B2219/2231 , G05B2219/24187
摘要： Apparatus and methods for controlling a system that operates responsive to a plurality of input control signals are disclosed. During operation the system generates a plurality of output status/control signals. A master controller has at least first and second controllers. The first controller outputs and inputs signals over a first communication path, and the second controller outputs and inputs signals over a second communication path. The first and second controllers output signals based on input signals received over the first and second communication paths, respectively, and also based on stored control data. A plurality of input/output modules are provided. Each of the input/output modules has first and second slave controllers. The first slave controller of each of the input/output modules inputs and outputs signals over the first communication path to the first controller, and the second slave controller outputs and inputs signals over the second communication path. Each of the first slave controllers outputs and inputs signals to and from a first input/output circuit, and each of the second slave controllers outputs and inputs signals to and from a second input/output circuit. Each of the input/output modules also includes a combiner circuit. At least some of the input control signals for controlling the system are generated by the combiner circuit of each input/output module based on signals output from both the first and second input/output circuits. The output control signals for controlling the system are generated based on output status/control signals from the system that are coupled to each of the first and second input/output circuits of the input/output modules.
摘要翻译： 公开了用于控制响应于多个输入控制信号而操作的系统的装置和方法。 在操作期间，系统产生多个输出状态/控制信号。 主控制器至少具有第一和第二控制器。 第一控制器通过第一通信路径输出和输入信号，并且第二控制器通过第二通信路径输出和输入信号。 第一和第二控制器分别基于通过第一和第二通信路径接收的输入信号，并且还基于存储的控制数据来输出信号。 提供多个输入/输出模块。 每个输入/输出模块都有第一个和第二个从属控制器。 每个输入/输出模块的第一从属控制器通过第一通信路径输入和输出信号到第一控制器，而第二从控制器通过第二通信路径输出和输入信号。 每个第一从属控制器输出信号并从第一输入/输出电路输入信号，并且每个第二从属控制器输出信号并从第二输入/输出电路输入信号。 每个输入/输出模块还包括组合器电路。 基于从第一和第二输入/输出电路输出的信号，用于控制系统的至少一些输入控制信号由每个输入/输出模块的组合器电路产生。 用于控制系统的输出控制信号基于耦合到输入/输出模块的第一和第二输入/输出电路中的每一个的来自系统的输出状态/控制信号而产生。
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9.发明授权Methods for residue removal and corrosion prevention in a post-metal etch process 有权在金属后蚀刻工艺中残留物去除和防腐蚀的方法公开(公告)号：US07134941B2
公开(公告)日：2006-11-14
申请号：US11045684
申请日：2005-01-28
IPC分类号： C25F1/00
CPC分类号： B08B5/02 , B08B7/0035 , B08B7/0092 , B24C1/003 , B24C5/005 , H01L21/67051
摘要： A method of plasma assisted CO2 cleaning for dry removal of residual photoresist and sidewall polymer with an etch gas mixture comprising fluorine containing gas, oxygen and hydrogen in N2 or H2O. The process removes polymer residues present on a metal layer on a substrate and on the sidewalls of metal lines and inhibits chlorine-based corrosion while being very selective to exposed Ti, TiN, Al and SiO2. The invention is particularly suited for removing post metal etch polymer residue from top and sidewall of metal lines.
摘要翻译： 使用包含含氮气体，氧气和氢气在N 2或H 2中的蚀刻气体混合物干燥除去残余光致抗蚀剂和侧壁聚合物的等离子体辅助CO 2清洗方法， SUB> 2 O。 该方法除去存在于基底和金属线的侧壁上的金属层上的聚合物残余物，并且对暴露的Ti，TiN，Al和SiO 2非常有选择性，并且抑制氯基腐蚀。 本发明特别适用于从金属线的顶部和侧壁除去后金属蚀刻聚合物残余物。
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10.发明授权Methods for resist stripping and cleaning surfaces substantially free of contaminants 失效抗蚀剂剥离和清洁表面基本上没有污染物的方法公开(公告)号：US07040961B2
公开(公告)日：2006-05-09
申请号：US10894626
申请日：2004-07-19
IPC分类号： B24B7/00
CPC分类号： B24C5/005 , B08B5/02 , B08B7/0035 , B08B7/0092 , B24C1/003 , H01L21/67051
摘要： A plasma assisted cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. The cleaning is conducted by applying to the substrate surface a mixture of gases selected from the group consisting of oxygen, nitrogen, hydrogen, fluorine, hydrofluorocarbon or a mixture of such gases to both remove the photoresist layer and alter the composition of the residues such that the residues are soluble in water and/or have a weakened bonds that they can be removed with a stream of cryogenic medium. The cryogenic and plasma processes can be performed sequentially or simultaneously. In certain embodiments, the cryogenic cleaning medium nozzle is driven in an oscillatory or vibratory manner so the nozzle spray is delivered in a manner to provide pulsing of the spray and to provide as “snow plow” effect on contaminants as the spray delivers the cleaning medium against the surface. The surface may be transported past the nozzle, and the cleaning may occur in an enclosed controlled environment.
摘要翻译： 一种等离子体辅助低温清洁器以及执行基本上不含污染物的表面的清洁的方法具有用于在表面上喷射低温清洁介质的弹性安装的喷嘴。 通过将选自氧，氮，氢，氟，氢氟碳化合物或这些气体的混合物的气体混合物施加到衬底表面进行清洁，以去除光致抗蚀剂层并改变残余物的组成，使得 残留物可溶于水和/或具有弱化键，它们可以用低温介质流除去。 低温和等离子体处理可以顺序或同时进行。 在某些实施例中，低温清洁介质喷嘴以振荡或振动的方式被驱动，因此喷嘴喷雾以一种方式被输送以提供喷雾的脉冲，并且当喷雾输送清洁介质时，为污染物提供“雪犁”效应 反对表面。 表面可以被传送通过喷嘴，并且清洁可以在封闭的受控环境中发生。
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