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公开(公告)号：US11988909B2
公开(公告)日：2024-05-21
申请号：US16996238
申请日：2020-08-18
发明人： Steffen Erhard
摘要： A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
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公开(公告)号：US20240120700A1
公开(公告)日：2024-04-11
申请号：US18542802
申请日：2023-12-18
发明人： Jonathan MUELLER , Fabian GIUNTA , Morris DAHLINGER , Markus KARL
CPC分类号： H01S3/036 , H01S3/0407 , H01S3/041 , H01S3/2232
摘要： A CO2 beam source includes a discharge tube in which a laser gas serves as a laser medium, a fan for supplying the laser gas into the discharge tube via a supply element and for removing the laser gas from the discharge tube via a removal element in a closed laser gas circuit, and a catalyst for catalysing oxidation of dissociation products formed upon excitation of the laser gas. The catalyst includes precious metal nanoparticles applied to a substrate. The catalyst is arranged with clearance from the discharge tube in the flow direction of the laser gas within the closed laser gas circuit in order to reduce deposition of degradation products formed in the discharge tube upon excitation of the laser gas compared to an arrangement within the discharge tube. A temperature of the at least one catalyst during operation of the CO2 beam source is at least 60° C.
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公开(公告)号：US11243114B2
公开(公告)日：2022-02-08
申请号：US16132965
申请日：2018-09-17
发明人： Viktor Granson , Jonathan Mueller , Dirk Sodtke
IPC分类号： G01J1/42 , G02B7/16 , B23K26/064 , B23K26/402 , G01M11/06
摘要： The invention relates to a method for determining at least one beam propagation parameter (M2, w0, θ, z0) of a laser beam, comprising: directing the laser beam through a lens arrangement towards a spatially resolving detector, imaging the laser beam at a plurality of different focus positions (F1, . . . ) relative to the spatially resolving detector by adjusting a focal length (f1, . . . ) of the lens arrangement, and determining the at least one beam propagation parameter (M2, w0, θ, z0) by evaluating an intensity distribution (l(x,y)) of the laser beam on the spatially resolving detector at the plurality of different focus positions (F1, . . . ). The method comprises adjusting the focal length (f1, . . . ) of the lens arrangement by arranging lens elements (A1, . . . ; B1, . . . ) having different focal lengths (fA1, . . . ; fB1, . . . ) in a beam path of the laser beam.
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公开(公告)号：US20220006254A1
公开(公告)日：2022-01-06
申请号：US17478975
申请日：2021-09-20
发明人： Jonathan Mueller
摘要： A method for adjusting a laser beam includes, following passage of the laser beam through a beam-shaping device, measuring, via a detector of a detector device, a beam profile of the laser beam. The method further includes determining a beam quality property of the laser beam based on the measured beam profile and altering an adjustable optical unit for modifying at least one property of the laser beam prior to the entry into the beam-shaping device. For adjusting the laser beam, the adjustable optical unit is altered based on the determined beam quality property.
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公开(公告)号：US09306367B2
公开(公告)日：2016-04-05
申请号：US13804266
申请日：2013-03-14
发明人： Joachim Schulz , Oliver Mueller
CPC分类号： H01S3/10038 , H01S3/034 , H01S3/076 , H01S3/10015 , H01S3/2232
摘要： A device for amplifying a laser beam is provided. The device includes at least one amplifier chamber in which a laser-active material is provided, at least one transmitting optical member delimiting the amplifier chamber and being arranged at a tilt angle, α, with respect to a plane oriented perpendicularly with respect to an optical axis of the laser beam, and at least one detection unit. The laser beam is reflected by the transmitting optical member into a back reflected laser beam, and the detection unit is arranged such that it detects the back reflected laser beam.
摘要翻译： 提供一种用于放大激光束的装置。 该装置包括至少一个放大器室，其中设置有激光活性材料，至少一个透射光学构件限定放大器室并相对于相对于光学器件垂直定向的平面以倾斜角α 激光束的轴线，以及至少一个检测单元。 激光束被透射光学部件反射成背反射激光束，检测部被配置为检测反射的反射光束。
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公开(公告)号：US20240357726A1
公开(公告)日：2024-10-24
申请号：US18644458
申请日：2024-04-24
发明人： Martin Lambert , Boris Regaard , Tolga Ergin , Oliver Schlosser
CPC分类号： H05G2/008 , G03F7/70033
摘要： An extreme ultraviolet (EUV) light source includes a providing device for providing a target material, a pulsed laser source for emitting a pulsed laser beam, and a beam guidance device for supplying the pulsed laser beam from the pulsed laser source into a radiation generation chamber and for focused irradiation of the target material with the pulsed laser beam. The target material is configured to emit EUV radiation on account of the irradiation. The beam guidance device includes a beam positioning device comprising four mirrors as two mirror pairs for positioning the pulsed laser beam. Each of the four mirrors is rotatable about exactly one axis of rotation. The axes of rotation of the two mirrors of a first mirror pair are aligned along a first spatial direction. The axes of rotation of the two mirrors of a second mirror pair are aligned along a second spatial direction.
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公开(公告)号：US20240198452A1
公开(公告)日：2024-06-20
申请号：US18590983
申请日：2024-02-29
发明人： Morris Dahlinger , Kai Carstens
IPC分类号： B23K26/064 , G02B5/30
CPC分类号： B23K26/064 , G02B5/3058
摘要： A method for changing a polarization of a working laser beam includes generating the working laser beam in a working laser source, and irradiating a Verdet medium of a Faraday rotator using the working laser beam. The method further includes changing a charge carrier density of the Verdet medium by irradiating the Verdet medium using an excitation laser beam, and/or applying an electric field to the Verdet medium using an electrode, and/or changing a temperature of the Verdet medium using a heating element and/or a cooling element.
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公开(公告)号：US11675202B2
公开(公告)日：2023-06-13
申请号：US17076841
申请日：2020-10-22
发明人： Martin Lambert , Tolga Ergin
CPC分类号： G02B27/0905 , G02B27/0983 , H05G2/008
摘要： A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam, and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.
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9.发明申请公开(公告)号：US20210351554A1
公开(公告)日：2021-11-11
申请号：US17381205
申请日：2021-07-21
发明人： Joachim Schulz , Marc Weber , Matthias Schmitt
IPC分类号： H01S3/04
摘要： An arrangement monitors an optical element. The arrangement includes: a light source configured to emit radiation onto a surface of the optical element; a detector configured to detect the radiation that has been at least partially reflected at the surface of the optical element; and a holder for the optical element, in which the light source and the detector are integrated. The holder has a cooling region through which a cooling liquid is configured to flow, the cooling region being in contact with the optical element. The holder has a reservoir, through which a beam path between the light source and the detector extends. The reservoir is configured to receive the cooling liquid leaking out at the optical element in case of a leakage.
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公开(公告)号：US10327318B2
公开(公告)日：2019-06-18
申请号：US15656313
申请日：2017-07-21
发明人： Martin Lambert , Tolga Ergin , Thomas Schwarzbaeck
IPC分类号： G02B7/182 , G02B5/10 , H05G2/00 , G02B17/06 , G02B27/09 , H01S3/00 , H01S3/223 , G02B19/00 , B23K26/06 , G02B5/08
摘要： Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.
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