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公开(公告)号：US10044167B2
公开(公告)日：2018-08-07
申请号：US15367904
申请日：2016-12-02
发明人： Joachim Schulz
摘要： A device includes a driver laser arrangement including a beam source for generating a laser beam and an amplifier arrangement for amplifying the laser beam. The device also includes an apparatus for monitoring the laser beam that includes a transmissive optical element having a normal direction oriented at a tilt angle with respect to a beam axis of the laser beam. The apparatus also includes a spatially resolving detector for registering laser radiation reflected backwards by the transmissive optical element. The transmissive optical element has first and second sides that are oriented at a wedge angle with respect to one another and through which the laser beam passes. The first and second sides reflect first and second partial beams of the incident laser beam. The apparatus has an optical filter that prevents one of the reflected first and second partial beams from reaching the detector.
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2.发明授权公开(公告)号：US11322902B2
公开(公告)日：2022-05-03
申请号：US17381205
申请日：2021-07-21
发明人： Joachim Schulz , Marc Weber , Matthias Schmitt
IPC分类号： H01S3/04
摘要： An arrangement monitors an optical element. The arrangement includes: a light source configured to emit radiation onto a surface of the optical element; a detector configured to detect the radiation that has been at least partially reflected at the surface of the optical element; and a holder for the optical element, in which the light source and the detector are integrated. The holder has a cooling region through which a cooling liquid is configured to flow, the cooling region being in contact with the optical element. The holder has a reservoir, through which a beam path between the light source and the detector extends. The reservoir is configured to receive the cooling liquid leaking out at the optical element in case of a leakage.
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公开(公告)号：US10739572B2
公开(公告)日：2020-08-11
申请号：US15434487
申请日：2017-02-16
发明人： Joachim Schulz
摘要： Methods, devices, and systems for elongating a beam path of a light beam, in particular of a laser beam, are provided. An example method includes coupling the light beam into an interspace between a plurality of first reflective surfaces and a plurality of second reflective surfaces facing the first reflective surfaces, multiply reflecting the light beam between the first reflective surfaces and the second reflective surfaces to elongate the beam path of the light beam, and coupling out the light beam from the interspace. The light beam undergoes the steps of coupling in, repeated reflecting and coupling out at least a first time with a first pass and a second time with a second pass, and the light beam traverses a different beam path in the interspace during the first pass in comparison with during the second pass.
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公开(公告)号：US20170160527A1
公开(公告)日：2017-06-08
申请号：US15434487
申请日：2017-02-16
发明人： Joachim Schulz
摘要： Methods, devices, and systems for elongating a beam path of a light beam, in particular of a laser beam, are provided. An example method includes coupling the light beam into an interspace between a plurality of first reflective surfaces and a plurality of second reflective surfaces facing the first reflective surfaces, multiply reflecting the light beam between the first reflective surfaces and the second reflective surfaces to elongate the beam path of the light beam, and coupling out the light beam from the interspace. The light beam undergoes the steps of coupling in, repeated reflecting and coupling out at least a first time with a first pass and a second time with a second pass, and the light beam traverses a different beam path in the interspace during the first pass in comparison with during the second pass.
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公开(公告)号：US20170149202A1
公开(公告)日：2017-05-25
申请号：US15402368
申请日：2017-01-10
CPC分类号： H01S3/10038 , H01S3/0078 , H01S3/10015 , H01S3/1003 , H01S3/2232 , H01S3/2316 , H01S3/2391 , H05G2/008
摘要： Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.
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公开(公告)号：US20170085054A1
公开(公告)日：2017-03-23
申请号：US15367904
申请日：2016-12-02
发明人： Joachim Schulz
CPC分类号： H01S3/1305 , H01S3/0071 , H01S3/2232 , H01S3/2366 , H05G2/008
摘要： A device includes a driver laser arrangement including a beam source for generating a laser beam and an amplifier arrangement for amplifying the laser beam. The device also includes an apparatus for monitoring the laser beam that includes a transmissive optical element having a normal direction oriented at a tilt angle with respect to a beam axis of the laser beam. The apparatus also includes a spatially resolving detector for registering laser radiation reflected backwards by the transmissive optical element. The transmissive optical element has first and second sides that are oriented at a wedge angle with respect to one another and through which the laser beam passes. The first and second sides reflect first and second partial beams of the incident laser beam. The apparatus has an optical filter that prevents one of the reflected first and second partial beams from reaching the detector.
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公开(公告)号：US09306367B2
公开(公告)日：2016-04-05
申请号：US13804266
申请日：2013-03-14
发明人： Joachim Schulz , Oliver Mueller
CPC分类号： H01S3/10038 , H01S3/034 , H01S3/076 , H01S3/10015 , H01S3/2232
摘要： A device for amplifying a laser beam is provided. The device includes at least one amplifier chamber in which a laser-active material is provided, at least one transmitting optical member delimiting the amplifier chamber and being arranged at a tilt angle, α, with respect to a plane oriented perpendicularly with respect to an optical axis of the laser beam, and at least one detection unit. The laser beam is reflected by the transmitting optical member into a back reflected laser beam, and the detection unit is arranged such that it detects the back reflected laser beam.
摘要翻译： 提供一种用于放大激光束的装置。 该装置包括至少一个放大器室，其中设置有激光活性材料，至少一个透射光学构件限定放大器室并相对于相对于光学器件垂直定向的平面以倾斜角α 激光束的轴线，以及至少一个检测单元。 激光束被透射光学部件反射成背反射激光束，检测部被配置为检测反射的反射光束。
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公开(公告)号：US10027083B2
公开(公告)日：2018-07-17
申请号：US15402368
申请日：2017-01-10
摘要： Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.
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公开(公告)号：US09642235B2
公开(公告)日：2017-05-02
申请号：US14980017
申请日：2015-12-28
发明人： Joachim Schulz , Martin Lambert
CPC分类号： H05G2/008 , H01S3/005 , H01S3/0071
摘要： An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.
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10.发明申请公开(公告)号：US20210351554A1
公开(公告)日：2021-11-11
申请号：US17381205
申请日：2021-07-21
发明人： Joachim Schulz , Marc Weber , Matthias Schmitt
IPC分类号： H01S3/04
摘要： An arrangement monitors an optical element. The arrangement includes: a light source configured to emit radiation onto a surface of the optical element; a detector configured to detect the radiation that has been at least partially reflected at the surface of the optical element; and a holder for the optical element, in which the light source and the detector are integrated. The holder has a cooling region through which a cooling liquid is configured to flow, the cooling region being in contact with the optical element. The holder has a reservoir, through which a beam path between the light source and the detector extends. The reservoir is configured to receive the cooling liquid leaking out at the optical element in case of a leakage.
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