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1.发明申请公开(公告)号：US20210351554A1
公开(公告)日：2021-11-11
申请号：US17381205
申请日：2021-07-21
发明人： Joachim Schulz , Marc Weber , Matthias Schmitt
IPC分类号： H01S3/04
摘要： An arrangement monitors an optical element. The arrangement includes: a light source configured to emit radiation onto a surface of the optical element; a detector configured to detect the radiation that has been at least partially reflected at the surface of the optical element; and a holder for the optical element, in which the light source and the detector are integrated. The holder has a cooling region through which a cooling liquid is configured to flow, the cooling region being in contact with the optical element. The holder has a reservoir, through which a beam path between the light source and the detector extends. The reservoir is configured to receive the cooling liquid leaking out at the optical element in case of a leakage.
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2.发明授权公开(公告)号：US11322902B2
公开(公告)日：2022-05-03
申请号：US17381205
申请日：2021-07-21
发明人： Joachim Schulz , Marc Weber , Matthias Schmitt
IPC分类号： H01S3/04
摘要： An arrangement monitors an optical element. The arrangement includes: a light source configured to emit radiation onto a surface of the optical element; a detector configured to detect the radiation that has been at least partially reflected at the surface of the optical element; and a holder for the optical element, in which the light source and the detector are integrated. The holder has a cooling region through which a cooling liquid is configured to flow, the cooling region being in contact with the optical element. The holder has a reservoir, through which a beam path between the light source and the detector extends. The reservoir is configured to receive the cooling liquid leaking out at the optical element in case of a leakage.
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