公开(公告)号：US09343961B1

公开(公告)日：2016-05-17

申请号：US14486571

申请日：2014-09-15

Applicant: Ronald J. Lipka ,  Akhil K. Garlapati

Inventor： Ronald J. Lipka ,  Akhil K. Garlapati

IPC: G05F1/10 ,  H02M3/07

CPC classification number: H02M3/07

Abstract: An charge pump architecture capable of generating ultra high DC voltages but implemented in low voltage CMOS technology uses a cascade of NMOS stages with the bulk terminal of the latter stages biased to a voltage just below the reverse breakdown of the parasitic bulk diode. The bias voltage is tapped from a lower voltage point within the charge pump. The upper limit of the output voltage is then increased to the maximum allowable oxide voltage plus the parasitic diode reverse bias breakdown voltage.

Abstract translation: 能够产生超高直流电压但在低电压CMOS技术中实现的电荷泵架构使用级联的NMOS级，后级的体端被偏压到刚好低于寄生体二极管反向击穿的电压。 偏置电压从电荷泵内的较低电压点抽头。 然后将输出电压的上限提高到最大允许氧化物电压加上寄生二极管反向偏压击穿电压。

公开(公告)号：US20090280594A1

公开(公告)日：2009-11-12

申请号：US12503382

申请日：2009-07-15

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/30

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: 公开了MEMS加速度计及其制造方法。 示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且与基板周围的基板间隔开。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。 静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US20160349055A1

公开(公告)日：2016-12-01

申请号：US15169033

申请日：2016-05-31

Applicant: Qualtre, Inc.

Inventor： Amir Rahafrooz ,  Diego Emilio Serrano ,  Ijaz Jafri

IPC: G01C19/5719

CPC classification number: G01C19/5698 ,  G01C19/5684

Abstract: A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body.

Abstract translation: 具有面内电极结构的MEMS BAW振动平面陀螺仪，通过利用具有小于陀螺仪谐振体的全高的对准电极进行模式对准。 这种对准电极施加影响具有平面内和平面外运动的模式的力分量。 陀螺仪包括具有高度和周边表面的谐振体，以及邻近谐振体的外周表面设置的电极。 至少一个电极是对准电极并且具有小于谐振体的高度的高度。

公开(公告)号：US09304527B1

公开(公告)日：2016-04-05

申请号：US13798361

申请日：2013-03-13

Applicant: Ronald Joseph Lipka ,  Akhil Garlapati

Inventor： Ronald Joseph Lipka ,  Akhil Garlapati

IPC: G05F3/04 ,  G05F3/02

CPC classification number: G05F3/02 ,  G05F3/24 ,  G05F3/262

Abstract: The present disclosure provides a varying high voltage source implemented with low voltage domain electronic components that are less costly to manufacture. According to one aspect, the present disclosure provides a high voltage circuit apparatus comprising a pull up resistance module, a plurality of cascode cell stages, a first of the cascode cell stages being coupled to the pull up resistance module, a low voltage domain current sink module coupled to a last of the cascode cell stages, and a clamping voltage source coupled to the last of the cascode cell stages. The circuit apparatus is devoid of high-voltage transistor components.

Abstract translation: 本公开提供了一种用低电压域电子元件实现的变化的高电压源，其制造成本较低。 根据一个方面，本公开提供了一种高压电路装置，包括上拉电阻模块，多个共源共栅电池级，第一级联单体级耦合到上拉电阻模块，低电压域电流吸收器 耦合到最后一个级联单元级的模块以及耦合到最后一个级联单元级的钳位电压源。 电路装置没有高压晶体管元件。

公开(公告)号：US08372677B2

公开(公告)日：2013-02-12

申请号：US13466595

申请日：2012-05-08

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/00 ,  G01P15/13

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: MEMS accelerometers have a substrate, and a proof mass portion thereof which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: MEMS加速度计具有基板和其与其周围的基板间隔开的检验质量部分。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US09284182B1

公开(公告)日：2016-03-15

申请号：US13971088

申请日：2013-08-20

Applicant: Ashish A. Shah

Inventor： Ashish A. Shah

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81C1/00277 ,  B81B3/0005 ,  B81B3/0035 ,  B81B3/0072 ,  B81B7/0077 ,  B81C1/00182 ,  B81C1/0019 ,  B81C2203/0136

Abstract: Disclosed is an isolation mechanism and technique for packaging a MEMS transducer, such as a bulk acoustic wave gyroscope or accelerometer, to provide isolation from externally applied (or internally induced) stress, strain, vibration, shock and thermal transients. The disclosed methods and techniques enable the location of voids/air cavity/environmental isolations inside an encapsulant or over mold compound to be custom selected by treating at least a portion of the exterior surfaces of the MEMS device package with anti-stiction coatings to create opposing hydrophobic and hydrophilic conditions which during encapsulant and transfer molding steps create voids or air bubbles in the proximity of the anti-stiction coating due to the opposing water resistive characteristic of encapsulant.

Abstract translation: 公开了用于封装诸如体声波陀螺仪或加速度计的MEMS换能器的隔离机构和技术，以提供与外部施加的（或内部诱发的）应力，应变，振动，冲击和热瞬态的隔离。 所公开的方法和技术使得通过用抗静电涂层处理MEMS器件封装的至少一部分外表面来形成密封剂或模制化合物内的空隙/空气/环境隔离物的定位是可选的，以形成相对的 疏水和亲水的条件，其在密封剂和传递模塑步骤期间由于密封剂的相反的耐水性而在抗静电涂层附近产生空隙或气泡。

公开(公告)号：US08816492B1

公开(公告)日：2014-08-26

申请号：US13836848

申请日：2013-03-15

Applicant: Anthony D. Minervini

Inventor： Anthony D. Minervini

IPC: H01L23/12 ,  H01L23/053 ,  B81B3/00 ,  B81C1/00

CPC classification number: B81C1/00261 ,  B81B7/0077 ,  B81B2207/012 ,  H01L2224/05554 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2224/8592 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00012

Abstract: An isolation mechanism and technique for packaging a MEMS transducer, such as a bulk acoustic wave gyroscope or accelerometer, which allows rotational information to be sensed by the transducer while providing the necessary isolation from externally applied (or internally induced) stress, strain, vibration, shock and thermal transients. The isolation mechanism is constructed of interposing materials that may be implemented with elastomeric-strain-absorbing-materials (ESAM) layers having different elastic moduli, with the most compliant ESAM layer disposed closest to the MEMS transduce. In another embodiment, one or more ESAM layers may have air pockets dispersed therein. The isolation mechanism enables mechanical, thermal and vibrational isolation of the MEMS transducer from the package substrate, while still permitting electrical continuity between the MEMS device and the external environment.

Abstract translation: 用于封装MEMS换能器（例如体声波陀螺仪或加速度计）的隔离机构和技术，其允许由换能器感测旋转信息，同时提供从外部施加的（或内部诱发的）应力，应变，振动， 冲击和热瞬变。 隔离机构由可以用具有不同弹性模量的弹性体 - 应变吸收材料（ESAM）层来实现的插入材料构成，最合适的ESAM层设置成最靠近MEMS转换。 在另一个实施例中，一个或多个ESAM层可以具有分散在其中的气穴。 隔离机构使得MEMS换能器能够从封装衬底进行机械，热和振动隔离，同时仍然允许MEMS器件与外部环境之间的电连续性。

公开(公告)号：US07892876B2

公开(公告)日：2011-02-22

申请号：US12503382

申请日：2009-07-15

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/00 ,  H01L21/56

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: 公开了MEMS加速度计及其制造方法。 示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且其与通过间隙围绕其的基板分离。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。 静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US09143057B1

公开(公告)日：2015-09-22

申请号：US13965811

申请日：2013-08-13

Applicant: Ashish A. Shah ,  Anthony D. Minervini

Inventor： Ashish A. Shah ,  Anthony D. Minervini

IPC: G01L1/00 ,  H02N1/00 ,  B81B3/00 ,  B81C1/00

CPC classification number: B81C1/00134 ,  B81B7/0054

Abstract: A microelectromechanical (MEMS) package including a compressive system preferentially directs external forces, towards the MEMS sensor in a manner that affects several components of the Quality Factor (Q) of the MEMS system. Relatively rigid materials (force transfer elements) are added or deposited in strategic places along any of the edges, faces or corners of a MEMS sensor, followed by the addition of material, which by virtue of the annealing process, applies a compressive stress to all objects encased therein. As a result, vibrational modes are affected due to changes in the effective mass and spring constants of the total MEMS apparatus system, dampening particular modes and stabilizing the MEMS transducer since such modes cannot be spuriously activated due to environmental changes. By attenuating, or at least causing them to be constant, the spurious modes and their absorption of vibrational energy are predictable over all operating conditions and thus amenable to electronic controls, e.g., electrical compensation.

Abstract translation: 包括压缩系统的微机电（MEMS）封装以影响MEMS系统的质量因子（Q）的几个部件的方式优先地引导外力，朝向MEMS传感器。 相对刚性的材料（力传递元件）沿着MEMS传感器的任何边缘，面或拐角的战略位置被添加或沉积，然后添加材料，其通过退火过程将压应力施加到所有 封装在其中的物体 结果，由于整个MEMS装置系统的有效质量和弹簧常数的变化，振动模式受到影响，抑制特定模式和稳定MEMS换能器，因为这种模式不会由于环境变化而被虚假地激活。 通过衰减或至少使它们恒定，杂散模式及其振动能的吸收在所有操作条件下是可预测的，并且因此适用于电子控制，例如电补偿。

公开(公告)号：US08901681B1

公开(公告)日：2014-12-02

申请号：US13796262

申请日：2013-03-12

Applicant: Michael John Foster

Inventor： Michael John Foster

IPC: H01L29/84 ,  B81B3/00 ,  B81C1/00

CPC classification number: B81B7/0048

Abstract: A pedestal projection having reduced cross-sectional area secures a MEMs device to a housing surface in a manner which reduces strain on the MEMS die due to differences in coefficients of thermal expansion while more evenly distributing to the MEMS sensor any external forces mechanically coupled through the housing structure. The pedestal projection may be integrally formed with a surface on either MEMS die or housing member and is axially aligned with the structure which anchors the MEMS sensor to the MEMS die.

Abstract translation: 具有减小的横截面面积的基座突起以一种减小MEMS芯片上的应变的方式将MEM器件固定到壳体表面，这是由于热膨胀系数的差异而更均匀地分配给MEMS传感器的任何外力通过 住房结构。 基座突起可以与MEMS管芯或壳体构件上的表面一体地形成，并且与将MEMS传感器锚定到MEMS管芯的结构轴向对准。