公开(公告)号：US20160349055A1

公开(公告)日：2016-12-01

申请号：US15169033

申请日：2016-05-31

Applicant: Qualtre, Inc.

Inventor： Amir Rahafrooz ,  Diego Emilio Serrano ,  Ijaz Jafri

IPC: G01C19/5719

CPC classification number: G01C19/5698 ,  G01C19/5684

Abstract: A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body.

Abstract translation: 具有面内电极结构的MEMS BAW振动平面陀螺仪，通过利用具有小于陀螺仪谐振体的全高的对准电极进行模式对准。 这种对准电极施加影响具有平面内和平面外运动的模式的力分量。 陀螺仪包括具有高度和周边表面的谐振体，以及邻近谐振体的外周表面设置的电极。 至少一个电极是对准电极并且具有小于谐振体的高度的高度。

公开(公告)号：US20160327390A1

公开(公告)日：2016-11-10

申请号：US15111016

申请日：2015-01-13

Applicant: QUALTRE, INC.

Inventor： Diego E. Serrano ,  Mohammad F. Zaman ,  Farrokh Ayazi ,  Amir Rahafrooz ,  Wang-Kyung Sung ,  Ijaz Jafri

IPC: G01C19/5698 ,  H03H9/02 ,  H03H3/02 ,  H03H9/17

Abstract: A resonant gyroscope apparatus has a decoupling mechanism implemented with spring-like flexure members to effectively isolate an axis-symmetric bulk-acoustic wave (BAW) vibratory gyroscope from its substrate, thereby minimizing the effect that external sources of error have on offset and scale-factor. The spring-like structure enables degeneracy of in-plane resonance modes of the annulus and aids in decoupling the in-plane and out-of-plane resonance modes of the resonant annulus, thereby enabling the mode-matched and/or near mode-matched operation of the structure as a vibratory gyroscope in the pitch, roll and yaw-modes. In various embodiments, the decoupling mechanism may be coupled to either an interior or exterior perimeter of an annulus shaped resonator element of the gyroscope

Abstract translation: 谐振陀螺仪装置具有用弹簧状挠曲构件实现的去耦机构，以有效地将轴对称体声波（BAW）振动陀螺仪与其基板隔离，从而最小化外部误差源对偏移和尺度的影响， 因子。 弹簧状结构使得环面的平面内共振模式的简并性有助于使谐振环的平面内和平面外谐振模式解耦，从而使模式匹配和/或近模式匹配 作为振动陀螺仪在俯仰，摇摆和偏航模式下的结构的操作。 在各种实施例中，去耦机构可以耦合到陀螺仪的环形谐振元件的内部或外部周边