Micro Wideband Spectroscopic Analysis Device

    公开(公告)号:US20210033457A1

    公开(公告)日:2021-02-04

    申请号:US16964001

    申请日:2019-01-25

    Applicant: Jed Khoury

    Inventor: Jed Khoury

    Abstract: According to some embodiments, a Micro Wideband Spectroscopic Analysis Device (MWSAD) is designed to operate from the visible to the far infrared. The MWSAD is the first unified platform to implement nearly all kind of molecular spectroscopy. This design is based on combining/integrating Diffractive Focusing Element (DFE) such as Fresnel lens/Zone plate with wide and finite range tuning devices. The wide range tuning devices are tunable lenses and/or a long stroke linear motor. The finite tuning devices are micro pinhole controlled by MEMS/PZT actuator. The MEMS/PZT actuator is used for finite tuning the micro pinhole location across the chromatic focuses of the Fresnel lens/DFE. The long stroke linear motor is used for wide range tuning the pinhole location across the chromatics focuses. The tunable lens is used for wideband tuning the chromatics focuses locations within the micro pinhole.

    SPECTROMETERS HAVING A VARIABLE FOCUS LENS WITH A SINGLE AIR GAP

    公开(公告)号:US20210018720A1

    公开(公告)日:2021-01-21

    申请号:US17032406

    申请日:2020-09-25

    Abstract: The technology provides a spectroscopy system having two or more spectrometers with substantially uniform focal lengths. The spectrometers include a detector that converts optical signals into electrical signals to render spectral data. The spectroscopy system includes a computing device that is electrically coupled to one or more detectors to receive the spectral data and compare the spectral data against other spectral data. The other spectral data originates from spectrometers that have substantially similar focal lengths, slit widths, excitation laser wavelengths, or any combination of these. The technology includes an application server that is communicatively coupled to a second spectroscopy system. The application server includes software that enables data sharing among the two or more spectroscopy systems, including sharing the spectral data and the other spectral data. The application server compares sampled spectral data against stored spectral data to identify a match.

    SPECTRAL FEATURE CONTROL APPARATUS
    83.
    发明申请

    公开(公告)号:US20210011302A1

    公开(公告)日:2021-01-14

    申请号:US17034132

    申请日:2020-09-28

    Applicant: Cymer, LLC

    Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

    SPECTROMETER
    84.
    发明申请

    公开(公告)号:US20210003446A1

    公开(公告)日:2021-01-07

    申请号:US16891931

    申请日:2020-06-03

    Abstract: A spectrometer is disclosed. The spectrometer includes a fiber input, a collimator lens, a rotating shaft, a grating, a focal lens and a focal plane which have arranged in order. A broadband incident light of the fiber input becomes a first parallel beam through the collimator lens and separated by the grating into multiple parallel beams of different wavelengths and then focused by the focal lens to emit an output beams to an imaging position on the focal plane. The spectrometer can rotate the collimator lens and fiber input to change the imaging position on the focal plane.

    Monochromator
    88.
    发明授权

    公开(公告)号:US10782186B2

    公开(公告)日:2020-09-22

    申请号:US16676463

    申请日:2019-11-07

    Abstract: A monochromator 100 includes: a diffraction grating 2 placed within a housing 1 so as to receive light from an entrance 11 and disperse the light into a spectrum from which a component of light having a set wavelength is to be extracted through an exit 12; an optical filter 92 to be removably inserted between the grating and the exit to remove light within a specific wavelength band which is out of the set wavelength; a rotary drive 5 for rotating the grating using a stepping motor; a wavelength-movement information setter 73 which sets wavelength-movement information to be used for rotating the grating from an original position to a rotational position corresponding to the set wavelength; and a wavelength-movement controller 71 which controls the rotary drive to initially rotate the grating to the original position and subsequently rotate it to the aforementioned rotational position based on the wavelength-movement information.

    Spectrometer, and spectrometer production method

    公开(公告)号:US10775236B2

    公开(公告)日:2020-09-15

    申请号:US15911714

    申请日:2018-03-05

    Abstract: A spectrometer includes a light detection element provided with a light passing part, a first light detection part, and a second light detection part, a support fixed to the light detection element such that a space is formed, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the first light detection part in the space. A plurality of second light detection parts is disposed in a region surrounding the second reflection part.

    Compact wideband VUV spectrometer
    90.
    发明授权

    公开(公告)号:US10753798B2

    公开(公告)日:2020-08-25

    申请号:US16618480

    申请日:2018-07-10

    Applicant: RnD-ISAN, LTD

    Abstract: The invention relates to a compact wideband vacuum ultraviolet (VUV) and soft X-ray grazing incidence spectrometer based on a plane amplitude diffraction grating. The spectrometer enables simultaneous detection of a VUV spectrum in a positive first order of diffraction and a negative first order of diffraction. The technical result of the invention is that of recording a spectrum in a wide spectral range (3-200 nm) with a moderate spectral resolution (λ/δλ˜15-30) and with a significantly higher spectral resolution (λ/δλ˜100-200) in a narrow soft X-ray or extreme ultraviolet range with the possibility of measuring the absolute radiation output in these regions of the spectrum.

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