A METHOD FOR MEASURING THE MASS THICKNESS OF A TARGET SAMPLE FOR ELECTRON MICROSCOPY

    公开(公告)号:US20170269011A1

    公开(公告)日:2017-09-21

    申请号:US15329902

    申请日:2015-07-29

    发明人: Peter Statham

    IPC分类号: G01N23/225 H01J37/26

    摘要: A method is provided of measuring the mass thickness of a target sample for use in electron microscopy. Reference data are obtained which is representative of the X-rays (28) generated within a reference sample (12) when a particle beam (7) is caused to impinge upon a region (14) of the reference sample (12). The region (14) is of a predetermined thickness of less than 300 nm and has a predetermined composition. The particle beam (7) is caused to impinge upon a region (18) of the target sample (16). The resulting X-rays (29) generated within the target sample (16) are monitored (27) so as to produce monitored data. Output data are then calculated based upon the monitored data and the reference data, the output data including the mass thickness of the region (18) of the target sample (16).

    Method for characterizing flame and spray structures in windowless chambers
    84.
    发明授权
    Method for characterizing flame and spray structures in windowless chambers 有权
    在无窗室中表征火焰和喷雾结构的方法

    公开(公告)号:US09459216B2

    公开(公告)日:2016-10-04

    申请号:US13798403

    申请日:2013-03-13

    申请人: En'Urga, Inc.

    IPC分类号: G01N23/04 G01N9/24

    摘要: Method for detecting variations in gas density within a volume surrounded by a closed metal wall opaque to optical light includes a source of x-rays positioned at a selected location outside the closed metal wall. Positioning a detector outside the closed metal wall at a location suitable to detect x-rays from the source passing entirely through a portion of the volume surrounded by the closed metal wall. Providing the detector with a plurality of sensors arranged in at least one row to capture a dimensionally distributed view of detected x-rays. Coupling a processor to an output of the detector to analyze the data which can be displayed in a suitable graphical or pictorial presentation, including processing the data to correct for any beam hardening of the x-rays as they pass through the closed metal wall, to apply the Maximum Likelihood Estimation method to generate on the display a reconstructed image of the gas density, and to use Inverse Radon Transforms for deconvolution. A dopant can be added to enhance the interaction with the x-rays.

    摘要翻译: 用于检测由光学不透明的闭合金属壁包围的体积内的气体密度的变化的方法包括位于封闭金属壁外部的选定位置的x射线源。 将检测器定位在闭合的金属壁之外的适合于检测来自源的X射线的位置,其完全通过由闭合的金属壁包围的体积的一部分。 向检测器提供布置在至少一行中的多个传感器以捕获检测到的x射线的尺寸分布的视图。 将处理器耦合到检测器的输出端以分析可以以合适的图形或图形呈现显示的数据,包括处理数据以校正X射线通过闭合金属壁时的任何束硬化,至 应用最大似然估计方法在显示器上产生气体密度的重建图像,并使用逆氡变换进行去卷积。 可以添加掺杂剂以增强与x射线的相互作用。

    ON-LINE COATING ADHESION DETERMINATION APPARATUS OF GALVANNEALED STEEL SHEET, AND GALVANNEALED STEEL SHEET MANUFACTURING LINE
    85.
    发明申请
    ON-LINE COATING ADHESION DETERMINATION APPARATUS OF GALVANNEALED STEEL SHEET, AND GALVANNEALED STEEL SHEET MANUFACTURING LINE 有权
    镀锌钢板的在线涂装粘合测定装置和钢铁生产线

    公开(公告)号:US20160252469A1

    公开(公告)日:2016-09-01

    申请号:US15030737

    申请日:2013-10-25

    IPC分类号: G01N23/207

    摘要: An on-line coating adhesion determination apparatus of a galvannealed steel sheet, includes: an X-ray tube which irradiates a galvannealed steel sheet that travels on a transportation line, with X-rays; an optical system which allows the X-rays emitted from the X-ray tube to irradiate the galvannealed steel sheet as a parallel beam and be diffracted; and a detector which measures the intensity of the diffracted X-rays and is installed at a position at which the X-ray diffraction peak corresponding to a crystal lattice spacing d of 1.5 Å or higher is detected, in which an emitted beam luminance of the X-rays is 20 W/mm2 or higher, and the width-direction gain of the X-rays in the optical system is 0.15 or higher. The crystal lattice spacing d may be 1.914 Å. In addition, the energy of the incident X-rays from the X-ray tube may be lower than the excitation energy of Fe-Kα fluorescence X-ray.

    摘要翻译: 一种合金化热浸镀锌钢板的在线涂布粘合力测定装置,其特征在于,包括:X射线照射在运送线上行进的合金化热浸镀锌钢板的X射线管; 允许从X射线管发射的X射线照射合金化热镀锌钢板作为平行光束并被衍射的光学系统; 和检测衍射X射线强度的检测器,其安装在与晶格间距d为1.5以上的X射线衍射峰相对应的位置处,其中发射的光束亮度为 X射线为20W / mm 2以上,光学系统中的X射线的宽度方向增益为0.15以上。 晶格间距d可以为1.914埃。 此外,来自X射线管的入射X射线的能量可能低于Fe-Kα荧光X射线的激发能。

    X-RAY FLUORESCENCE ANALYZER AND METHOD OF DISPLAYING SAMPLE THEREOF
    87.
    发明申请
    X-RAY FLUORESCENCE ANALYZER AND METHOD OF DISPLAYING SAMPLE THEREOF 有权
    X射线荧光分析仪及其样品的显示方法

    公开(公告)号:US20160061753A1

    公开(公告)日:2016-03-03

    申请号:US14833665

    申请日:2015-08-24

    发明人: Isao YAGI

    摘要: An X-ray fluorescence analyzer includes a sample stage, a sample moving mechanism, an X-ray source, a detector detecting a fluorescent X-ray generated from the sample irradiated with a primary X-ray, an imaging device imaging the sample, a display device displaying the image on a screen, a pointing device designating a specific position on the screen for allowing an input at the specific position, an image processing device displaying a mark at the input position on the screen by the pointing device and a control device controlling the sample moving mechanism and the image processing device and, when the sample stage is moved, controlling the image processing device to display the mark on the screen with moving the mark in the same moving direction as that of the sample stage by the same moving distance.

    摘要翻译: X射线荧光分析装置包括:样品台,样品移动机构,X射线源,检测从用X射线照射的样品产生的荧光X射线的检测器,对该样品成像的成像装置 在屏幕上显示图像的显示装置,指定屏幕上的特定位置以允许在特定位置的输入的指示装置,通过指示装置在屏幕上的输入位置处显示标记的图像处理装置,以及控制装置 控制样品移动机构和图像处理装置,并且当样品台移动时,控制图像处理装置以与样品台相同的移动方向移动标记以在同一移动中显示标记 距离。

    METHOD AND DEVICE FOR PERFORMING AN X-RAY FLUORESCENCE ANALYSIS
    88.
    发明申请
    METHOD AND DEVICE FOR PERFORMING AN X-RAY FLUORESCENCE ANALYSIS 有权
    用于进行X射线荧光分析的方法和装置

    公开(公告)号:US20150300966A1

    公开(公告)日:2015-10-22

    申请号:US14648264

    申请日:2013-10-22

    发明人: Jens Kessler

    IPC分类号: G01N23/223

    摘要: The invention relates to a method for performing an x-ray fluorescence analysis, in which method a primary radiation (16) is directed at a specimen (12) by an x-radiation source (14) and in which method a secondary radiation (18) emitted by the specimen (12) is detected by a detector (20) and evaluated by means of an evaluating unit (21), wherein at least one filter (23) having at least one filter layer (25) forming a filter plane is brought into the beam path of the secondary radiation (18) and acts as a band-pass filter in dependence on an angle α of the filter layer (25) to the secondary radiation (18) and an interfering wavelength of the secondary radiation (18) is coupled out by Bragg reflection, the angle α of the filter layer (25) of the filter (23) is set by means of a setting apparatus (31) to reflect at least one interfering wavelength of the secondary radiation (18) by Bragg reflection, and the coupled-out wavelength of the secondary radiation (18) is detected by a second detector (32) and the signals determined therefrom are forwarded to the evaluating unit (21).

    摘要翻译: 本发明涉及一种用于进行X射线荧光分析的方法,其中主辐射(16)通过x辐射源(14)指向样本(12),并且在该方法中,辅助辐射(18) )由检测器(20)检测并通过评估单元(21)进行评估,其中至少一个具有至少一个形成过滤器平面的过滤层(25)的过滤器(23)是 进入次级辐射(18)的光束路径,并且根据过滤层(25)与次级辐射(18)的角度α和次级辐射(18)的干涉波长而作为带通滤波器 )通过布拉格反射耦合出来,滤波器(23)的滤波器层(25)的角度α通过设定装置(31)设定,以将二次辐射(18)的至少一个干涉波长反射到 二次辐射(18)的布拉格反射和耦合输出波长被检测 检测器(32)和从其确定的信号被转发到评估单元(21)。

    METHOD FOR THE MEASUREMENT OF A MEASUREMENT OBJECT BY MEANS OF X-RAY FLUORESCENCE

    公开(公告)号:US20150247812A1

    公开(公告)日:2015-09-03

    申请号:US14634979

    申请日:2015-03-02

    发明人: Volker Roessiger

    IPC分类号: G01N23/223

    摘要: The invention relates to a method for the measurement of a measurement object (24) by means of X-ray fluorescence, in particular for the measurement of the thickness of thin layers or determination of an element concentration of a measurement object (24), in which a primary beam (22) is directed from an X-ray radiation source (21) onto the measurement object (24), for which a secondary radiation (26) emitted by the measurement object (24) is detected by a detector (27) and is relayed to an evaluation device (29) in which the primary beam (22) is moved within a grid surface (31) which is divided into grid partial surfaces (1 . . . n) as well as subdivided into at least one line (Z1 . . . Zn) and at least one column (S1 . . . Sn), and for each grid partial surface (1 . . . n), a primary beam (22) is directed onto the grid surface (31), wherein a measuring spot (36) of the primary beam fills at least the grid point, wherein a lateral dimension of the measurement surface (25) of the measurement object (24) is detected, the lateral dimension of the measurement surface (25) of the measurement object (24) is compared to the size of the measuring spot (36) of the primary beam (22) appearing on the measurement object (24), for the determination of the size of the measurement surface (25) of the measurement object (24) which is smaller than the measuring spot (36), a size of the grid surface (31) is selected which covers at least the measurement surface (25) of the measurement object (24), a scaling factor α is determined from a ratio of the size of the grid surface (31) to the size of the measurement surface (25) of the measurement object (24), the detected spectrum of the secondary radiation (26) is added up from the respective grid partial surfaces (1 . . . n), averaged and subsequently multiplied by the scaling factor α and the spectrum of the secondary radiation (26) from the grid partial surfaces (1 . . . n) which is corrected with the scaling factor α is provided for the quantitative evaluation.