Laser and environmental monitoring system
    81.
    发明授权
    Laser and environmental monitoring system 有权
    激光和环境监测系统

    公开(公告)号:US07583710B2

    公开(公告)日:2009-09-01

    申请号:US10884798

    申请日:2004-07-02

    IPC分类号: H01S3/10 G01N33/50 G01N31/00

    摘要: A laser and monitoring system is provided. In another aspect of the present invention, the system includes a laser, pulse shaper and detection device. A further aspect of the present invention employs a femtosecond laser and binary pulse shaping (BPS). Still another aspect of the present invention uses a laser beam pulse, a pulse shaper and a SHG crystal. In yet another aspect of the present invention, a multiphoton intrapulse interference phase scan (hereinafter “MIIPS”) method is used to characterize the spectral phase of femtosecond laser pulses and to correct them. A further aspect of the system of the present invention is employed to monitor environmental chemicals and biological agents, including toxins, explosives, and diseases.

    摘要翻译: 提供激光和监控系统。 在本发明的另一方面,该系统包括激光器,脉冲整形器和检测装置。 本发明的另一方面采用飞秒激光和二进制脉冲整形(BPS)。 本发明的另一方面是使用激光束脉冲,脉冲整形器和SHG晶体。 在本发明的另一方面,使用多光子脉冲间干涉相位扫描(以下称为“MIIPS”)方法表征飞秒激光脉冲的光谱相位并对其进行校正。 本发明的系统的另一方面用于监测环境化学物质和生物制剂,包括毒素,爆炸物和疾病。

    Demodulation method and apparatus for fiber optic sensors
    82.
    发明授权
    Demodulation method and apparatus for fiber optic sensors 有权
    光纤传感器的解调方法和装置

    公开(公告)号:US07561276B2

    公开(公告)日:2009-07-14

    申请号:US11639419

    申请日:2006-12-15

    申请人: Clark Davis Boyd

    发明人: Clark Davis Boyd

    IPC分类号: G01B9/02

    摘要: An interferometric sensing arrangement includes an interferometric sensor having an optical path length that varies depending on one or more physical parameters to be measured using the interferometric sensor. One or more light sources are used to generate light at three or more predetermined different fixed wavelengths. In a preferred example embodiment, four fixed wavelength lasers are used to generate light at four predetermined different fixed wavelengths. An optical coupler couples the multiple wavelength light to the interferometric sensor, and a detector measures an amplitude response of an interferometric signal produced by the interferometric sensor. A controller determines the optical path length based on the measured amplitude response.

    摘要翻译: 干涉测量装置包括具有根据要使用干涉测量传感器测量的一个或多个物理参数而变化的光程长度的干涉测量传感器。 一个或多个光源用于产生三个或更多个预定的不同固定波长的光。 在优选的示例性实施例中,使用四个固定波长激光器来产生四个预定的不同固定波长的光。 光耦合器将多波长光耦合到干涉测量传感器,并且检测器测量由干涉测量传感器产生的干涉信号的振幅响应。 控制器基于所测量的振幅响应来确定光路长度。

    Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry
    83.
    发明授权
    Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry 失效
    用于在干涉测量中由对象共同测量反射/散射和透射光束的场的共轭正交的装置和方法

    公开(公告)号:US07495769B2

    公开(公告)日:2009-02-24

    申请号:US12023803

    申请日:2008-01-31

    申请人: Henry A. Hill

    发明人: Henry A. Hill

    IPC分类号: G01B11/02

    摘要: An interferometery system for making interferometric measurements of an object, the system including: a beam generation module which during operation delivers an output beam that includes a first beam at a first frequency and a second beam at a second frequency that is different from the first frequency, the first and second beams within the output beam being coextensive, the beam generation module including a beam conditioner which during operation introduces a sequence of different shifts in a selected parameter of each of the first and second beams, the selected parameter selected from a group consisting of phase and frequency; a detector assembly having a detector element; and an interferometer constructed to receive the output beam at least a part of which represents a first measurement beam at the first frequency and a second measurement beam at the second frequency, the interferometer further constructed to image both the first and second measurement beams onto a selected spot on the object to produce therefrom corresponding first and second return measurement beams, and to then simultaneously image the first and second return measurement beams onto said detector element.

    摘要翻译: 一种用于对物体进行干涉测量的干涉仪系统,所述系统包括:光束产生模块,其在操作期间传送包括第一频率的第一光束和不同于第一频率的第二频率的第二光束的输出光束 输出光束内的第一和第二光束共同延伸,光束产生模块包括光束调节器,其在操作期间引入第一和第二光束中的每一个的选定参数中的不同偏移序列,所选参数选自组 由相位和频率组成; 具有检测器元件的检测器组件; 以及干涉仪,其被构造为接收输出光束,所述输出光束的至少一部分表示第一频率处的第一测量光束和在第二频率处的第二测量光束,所述干涉仪还被构造成将所述第一和第二测量光束成像到所选择的 对象上产生相应的第一和第二返回测量光束,然后同时将第一和第二返回测量光束成像到所述检测器元件上。

    Systems and methods for high-precision length measurement
    85.
    发明授权
    Systems and methods for high-precision length measurement 有权
    用于高精度长度测量的系统和方法

    公开(公告)号:US07460242B2

    公开(公告)日:2008-12-02

    申请号:US11512966

    申请日:2006-08-30

    申请人: Peter J. Delfyett

    发明人: Peter J. Delfyett

    IPC分类号: G01B11/02 G01C3/08

    摘要: Provided are systems and methods for performing high-precision length measurement. One such system includes: an optical receiver, configure to receive a reflected optical pulse from a target; an optical combiner, configured to generate a combined optical pulse using the reflected optical pulse and a reference optical pulse; and a signal analyzer configured to determine a distance to the target using a depth of modulation value of the combined signal. A method as disclosed herein includes the steps of determining a first length component of a combined optical signal using a depth of modulation value and determining a second length component of the combined optical signal using a modulation period value.

    摘要翻译: 提供用于执行高精度长度测量的系统和方法。 一种这样的系统包括:光接收器,被配置为从目标接收反射光脉冲; 光学组合器,被配置为使用所述反射的光脉冲和参考光脉冲来产生组合的光脉冲; 以及信号分析器,被配置为使用组合信号的调制深度值来确定到目标​​的距离。 本文公开的方法包括以下步骤:使用调制深度值确定组合光信号的第一长度分量,并使用调制周期值确定组合光信号的第二长度分量。

    SYSTEMS AND METHODS FOR HIGH-PRECISION LENGTH MEASUREMENT
    86.
    发明申请
    SYSTEMS AND METHODS FOR HIGH-PRECISION LENGTH MEASUREMENT 有权
    高精度测量的系统和方法

    公开(公告)号:US20080273209A1

    公开(公告)日:2008-11-06

    申请号:US11512966

    申请日:2006-08-30

    申请人: Peter J. Delfyett

    发明人: Peter J. Delfyett

    IPC分类号: G01B11/02 G01C3/08

    摘要: Provided are systems and methods for performing high-precision length measurement. One such system includes: an optical receiver, configure to receive a reflected optical pulse from a target; an optical combiner, configured to generate a combined optical pulse using the reflected optical pulse and a reference optical pulse; and a signal analyzer configured to determine a distance to the target using a depth of modulation value of the combined signal. A method as disclosed herein includes the steps of determining a first length component of a combined optical signal using a depth of modulation value and determining a second length component of the combined optical signal using a modulation period value.

    摘要翻译: 提供用于执行高精度长度测量的系统和方法。 一种这样的系统包括:光接收器,被配置为从目标接收反射光脉冲; 光学组合器,被配置为使用所述反射的光脉冲和参考光脉冲来产生组合的光脉冲; 以及信号分析器,被配置为使用组合信号的调制深度值来确定到目标​​的距离。 本文公开的方法包括以下步骤:使用调制深度值确定组合光信号的第一长度分量,并使用调制周期值确定组合光信号的第二长度分量。

    System and method for optical coherence imaging
    88.
    发明授权
    System and method for optical coherence imaging 有权
    光学相干成像系统和方法

    公开(公告)号:US07365859B2

    公开(公告)日:2008-04-29

    申请号:US11225840

    申请日:2005-09-12

    IPC分类号: G01B11/02

    摘要: A system and method for imaging of a sample, e.g., biological sample, are provided. In particular, at least one source electro-magnetic radiation forwarded to the sample and a reference may be generated. A plurality of detectors may be used, at least one of the detectors capable of detecting a signal associated with a combination of at least one first electro-magnetic radiation received from the sample and at least one second electro-magnetic radiation received from the reference. At least one particular detector may have a particular electrical integration time, and can receive at least a portion of the signal for a time duration which has a first portion with a first power level greater than a predetermined threshold and a second portion immediately preceding or following the first portion. The second portion may have a second power level that is less than the predetermined threshold, and extends for a time period which may be, e.g., approximately more than 10% of the particular electrical integration time.

    摘要翻译: 提供了用于成像样品例如生物样品的系统和方法。 特别地,可以产生转发到样品的至少一个源电磁辐射和参考。 可以使用多个检测器,所述检测器中的至少一个检测器能够检测与从样本接收的至少一个第一电磁辐射的组合相关联的信号和从参考接收的至少一个第二电磁辐射。 至少一个特定检测器可以具有特定的电积分时间,并且可以接收信号的至少一部分持续一段持续时间,该持续时间具有第一部分具有大于预定阈值的第一功率电平,以及紧接在之前或之后的第二部分 第一部分。 第二部分可以具有小于预定阈值的第二功率电平,并且延伸可以是例如大约超过特定电积分时间的10%的时间段。

    Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
    89.
    发明授权
    Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry 失效
    基于光学干涉测量的覆盖,对准标记和关键尺寸计量的装置和方法

    公开(公告)号:US07298496B2

    公开(公告)日:2007-11-20

    申请号:US11135605

    申请日:2005-05-23

    申请人: Henry Allen Hill

    发明人: Henry Allen Hill

    IPC分类号: G01B11/02

    摘要: Methods and apparatus based on optical homodyne displacement interferometry, optical coherent-domain reflectometry (OCDR), and optical interferometric imaging are disclosed for overlay, alignment mark, and critical dimension (CD) metrologies that are applicable to microlithography applications and integrated circuit (IC) and mask fabrication and to the detection and location of defects in/on unpatterned and patterned wafers and masks. The metrologies may also be used in advanced process control (APC), in determination of wafer induced shifts (WIS), and in the determination of optical proximity corrections (OPC).

    摘要翻译: 公开了适用于微光刻应用和集成电路(IC)的覆盖,对准标记和临界尺寸(CD)计量的基于光学零差位移干涉测量,光学相干域反射测量(OCDR)和光学干涉成像的方法和装置, 和掩模制造以及在未图案化和图案化的晶片和掩模上/之上的缺陷的检测和定位。 计量学也可用于先进的过程控制(APC),确定晶片诱发位移(WIS)以及在光学邻近校正(OPC)的确定中。

    Control system and apparatus for use with laser excitation of ionization
    90.
    发明授权
    Control system and apparatus for use with laser excitation of ionization 有权
    用于激光激发或电离的控制系统和装置

    公开(公告)号:US07105811B2

    公开(公告)日:2006-09-12

    申请号:US10628874

    申请日:2003-07-28

    IPC分类号: H01J49/16

    摘要: A control system and apparatus for use with laser ionization is provided. In another aspect of the present invention, the apparatus includes a laser, pulse shaper, detection device and control system. A further aspect of the present invention employs a femtosecond laser and a mass spectrometer. In yet other aspects of the present invention, the control system and apparatus are used in MALDI, chemical bond cleaving, protein sequencing, photodynamic therapy, optical coherence tomography and optical communications processes.

    摘要翻译: 提供了一种用于激光电离的控制系统和装置。 在本发明的另一方面,该装置包括激光器,脉冲整形器,检测装置和控制系统。 本发明的另一方面采用飞秒激光和质谱仪。 在本发明的另一方面,控制系统和装置用于MALDI,化学键切割,蛋白质测序,光动力学治疗,光学相干断层摄影和光通信过程。