公开(公告)号：US20090050804A1

公开(公告)日：2009-02-26

申请号：US12196440

申请日：2008-08-22

申请人： Toyoo MIYAJIMA ,  Yasutoshi KOTAKA

发明人： Toyoo MIYAJIMA ,  Yasutoshi KOTAKA

IPC分类号： G01N23/00 ,  G01B15/00

CPC分类号： G01B15/025

摘要： A method of evaluating an element that includes the step of preparing a thin evaluation sample including a first portion in which a first layer containing a first material and a second layer containing a second material are laminated, a second portion containing the first material, and a third portion containing the second material; and calculating the thickness of the first layer in the first portion.

摘要翻译： 一种评价元件的方法，包括准备薄层评估样本的步骤，所述薄评估样本包括第一部分，其中包含第一材料的第一层和包含第二材料的第二层的第一层，包含第一材料的第二部分和 包含第二材料的第三部分; 并计算第一部分中的第一层的厚度。

公开(公告)号：US20070280415A1

公开(公告)日：2007-12-06

申请号：US11444611

申请日：2006-05-31

申请人： Keith Waterson

发明人： Keith Waterson

IPC分类号： G01B15/02 ,  G01N23/06

CPC分类号： B21B38/04 ,  B21B38/02 ,  G01B15/025 ,  G01B15/08

摘要： A method of and apparatus for measuring the true thickness, as well as angles of orientation, of a strip article, e.g. a moving metal sheet emerging from a rolling apparatus. The thickness and angles are measured by three penetrating radiation beams (e.g. X-rays) that cross at a common point of intersection, generally but not necessarily, within the body of the sheet article. One beam is generally normal to the sheet article and the others are oriented in the longitudinal and transverse directions of the sheet article. The angles between the beams are generally fixed and known. -The thicknesses measured by the three beams can be used, along with their respective angles of orientation, to calculate the true thickness of the sheet article as well as the angles of sag or off-flatness in the transverse and longitudinal directions at the point of measurement. By measuring these values at various points on the strip article, a thickness and orientation profile of the strip article may be produced.

摘要翻译： 用于测量条带制品的真实厚度以及取向角度的方法和装置，例如， 从轧制设备出来的移动金属板。 厚度和角度通过三个穿透辐射束（例如X射线）来测量，该穿透辐射束（例如X射线）在通常但不必须在片材制品的主体内的相交点交叉。 一个梁通常垂直于片材制品，而另一个梁在片材制品的纵向和横向方向上取向。 梁之间的角度通常是固定和已知的。 - 可以使用由三个光束测量的厚度及其相应的取向角度来计算片材的真实厚度以及横向和纵向方向上的垂直或非平面度的角度 测量。 通过在带状物品上的各个点测量这些值，可以制造带状物品的厚度和取向轮廓。

公开(公告)号：US20020050160A1

公开(公告)日：2002-05-02

申请号：US09988316

申请日：2001-11-19

申请人： TRIUMF, RAMOT, University Authority for Applied Research and Industrial Development Ltd.

发明人： Itzhak Kelson ,  Yuval Levy

IPC分类号： B05D001/00 ,  G01N003/62

CPC分类号： G01N23/06 ,  C23C14/52 ,  C30B23/02 ,  G01B15/025 ,  Y10S436/804

摘要： An apparatus and method for using null-particle energy loss to measure the thickness and stoichiometry of films grown by molecular beam epitaxy and other methods. The apparatus for measuring the thickness of films grown on a substrate in a growth chamber, comprises a protective housing having an aperture opening into the growth chamber, a solid state detector disposed in the protective housing, a shutter for opening and closing the aperture, a shield disposed in the housing between the aperture and the solid state detector for shielding the detector, and a calibration source disposed between the shield and the detector for calibrating the measurements made by the detector. A second calibration source disposed between the shutter and the shield, for measuring deposition on the shield.

公开(公告)号：US6167113A

公开(公告)日：2000-12-26

申请号：US310278

申请日：1999-05-12

申请人： Charles J. Armentrout ,  Thomas Basinger ,  James H. Beyer ,  Brian D. Colesa ,  Paul Olsztyn ,  Karen G. Smith ,  Carl Strandberg ,  David Sullivan

发明人： Charles J. Armentrout ,  Thomas Basinger ,  James H. Beyer ,  Brian D. Colesa ,  Paul Olsztyn ,  Karen G. Smith ,  Carl Strandberg ,  David Sullivan

IPC分类号： G01B15/02 ,  G01N23/223

CPC分类号： G01N23/223 ,  G01B15/025 ,  G01N2223/076

摘要： An apparatus and method are disclosed for measuring the area density of a low density material sample. The system includes an x-ray emitter which emits x-rays in the range of 3 kilovolts to 20 kilovolts and the x-rays pass through the sample. An imaging device converts the x-rays which pass through the sample to visible light to produce a visible image corresponding to the sample and in which the visible image has an intensity which varies as a function of the area density across the sample. A camera produces an output signal representative of the intensity of the visible image across the sample while a computer processor processes the signal from the camera after digitization to produce an analysis of the area density of the sample.

摘要翻译： 公开了用于测量低密度材料样品的面积密度的装置和方法。 该系统包括发射在3千伏至20千伏范围内的x射线并且x射线穿过样品的x射线发射器。 成像装置将通过样品的x射线转换成可见光，以产生对应于样品的可见光图像，其中可见光图像的强度随样品的面积密度而变化。 相机产生表示样品的可见图像的强度的输出信号，而计算机处理器在数字化之后处理来自相机的信号，以产生样品的面积密度的分析。

公开(公告)号：US5848118A

公开(公告)日：1998-12-08

申请号：US878655

申请日：1997-06-19

申请人： Samvel Goukassian

发明人： Samvel Goukassian

IPC分类号： G01B15/02 ,  G01B15/06

CPC分类号： G01B15/06 ,  G01B15/025

摘要： A method and apparatus is provided for inspection in real-time of inhomogeneities at particular locations of objects using x-radiation. An object is fixed on a conveyor by a system of clamps, and a manipulator positions an x-ray source and detector such that the particular location to be inspected is between the two. X-ray photons passing through the spot to be inspected are recorded by the detector. When the manipulator is at the required position, the electronic control system (ECS) gives a `start` signal and the monitor begins to count the pulses from the detector. After a specified time, a `stop` signal passes from the ECS, and the monitor stops counting, while the manipulator passes to the following position to be inspected. The information coming from the detector is processed in the monitor. If no inhomogeneities are detected, the monitor gives permission for inspection of the following object, otherwise an alarm signal is triggered.

摘要翻译： 提供了一种方法和装置，用于使用x-辐射实时检查物体的特定位置处的不均匀性。 物体通过夹具系统固定在输送机上，并且操纵器定位x射线源和检测器，使得要检查的特定位置在两者之间。 通过检测点的X射线光子被检测器记录。 当操纵器处于所需位置时，电子控制系统（ECS）给出“启动”信号，监视器开始计数来自检测器的脉冲。 在指定时间后，“停止”信号从ECS通过，监视器停止计数，同时机械手通过以下位置进行检查。 来自检测器的信息在监视器中处理。 如果没有检测到不均匀性，则监视器允许检查以下物体，否则触发报警信号。

公开(公告)号：US5795531A

公开(公告)日：1998-08-18

申请号：US534021

申请日：1995-09-26

申请人： Hannes Salzmann ,  Ulrich Jung ,  Wilfried Kotter

发明人： Hannes Salzmann ,  Ulrich Jung ,  Wilfried Kotter

IPC分类号： G01B15/00 ,  G01B15/02 ,  G05D5/03 ,  H01B13/14 ,  B29C47/06 ,  B29C47/92

CPC分类号： H01B13/144 ,  B29C47/92 ,  G01B15/00 ,  G01B15/025 ,  G05D5/03 ,  H01B13/146 ,  B29C2947/92152 ,  B29C2947/92428 ,  B29C2947/92542 ,  B29C2947/92647 ,  B29C2947/92923 ,  B29C2947/92952

摘要： A method and an apparatus for an exact measurement of the thickness of a plurality of individual semi-conductor and insulation layers and the determination of the centricity/eccentricity of a medium-voltage and/or high-voltage insulated conductor. The individual semi-conductor and insulation layers of the insulated conductor emerging from an extrusion device are penetrated with X-rays in at least two directions laying within a plane orthogonal to the axis of the insulated conductor. On carrying out a line-scan intensity detection of the X-rays having penetrated the insulated conductor, the thickness of the individual layers as well as the position of the conductor is computed. These values are compared with target ones, and, if necessary, the position of the extruder heads can be corrected accordingly.

摘要翻译： 一种用于精确测量多个单独的半导体和绝缘层的厚度以及确定中压和/或高压绝缘导体的中心/偏心度的方法和装置。 从挤出装置出来的绝缘导体的单个半导体绝缘层和绝缘导体的绝缘层在垂直于绝缘导体的轴线的平面内的至少两个方向上被穿透X射线。 在对穿透绝缘导体的X射线进行线扫描强度检测时，计算各层的厚度以及导体的位置。 将这些值与目标值进行比较，如果需要，可以相应地校正挤出机头的位置。

公开(公告)号：US5418830A

公开(公告)日：1995-05-23

申请号：US057810

申请日：1993-05-07

申请人： Jean-Jacques Florent

发明人： Jean-Jacques Florent

IPC分类号： G01B15/02 ,  H01J35/08

CPC分类号： H01J35/08 ,  G01B15/025 ,  H01J2235/081

摘要： Radiometric gage for contactless measurement of the surface density or the thickness of a flat product, includes:an X-radiation emitter, whose tube, is directed toward the flat productan X-radiation receiver, whose detector is disposed in order to receive X-radiation scattered or transmitted in attenuated form through said flat product, said receiver delivering a measurement signala member for processing the measurement signal, in order to obtain information representing the surface density or the thickness of the flat productThe anticathode of the tube is made of a material with atomic number as high as possible, preferably greater than 70, which is a good conductor of heat and has a high melting point. A member for adjusting the voltage (V) between the cathode and the anticathode is designed to operate in a predetermined range of relatively low voltages, in order to obtain, in conjunction with the anticathode, an X-ray emission spectrum essentially limited to continuous bremmstrahlung whose maximum energy is fixed by the value of the voltage (V) between cathode and anticathode.

摘要翻译： 用于非接触式测量平面产品的表面密度或厚度的辐射计包括：X射线发射器，其管被指向平面产品X射线接收器，其X射线接收器被设置为接收X射线， 散射或以衰减形式通过所述扁平产品传播的辐射，所述接收器将测量信号传递给用于处理测量信号的部件，以获得表示扁平产品的表面密度或厚度的信息。管的抗阴极由 原子序数尽可能高的材料，优选大于70，其是良好的导热体并具有高熔点。 用于调节阴极和反电极之间的电压（V）的构件被设计为在相对低的电压的预定范围内操作，以便与抗阴极结合获得基本上限于连续的微波辐射的X射线发射光谱 其最大能量由阴极和阴极之间的电压（V）的值固定。

公开(公告)号：US5376798A

公开(公告)日：1994-12-27

申请号：US990889

申请日：1992-12-15

申请人： John W. Pettit

发明人： John W. Pettit

IPC分类号： G01B15/02 ,  G01N9/24 ,  G01N23/16 ,  G01N23/203 ,  G01N33/44 ,  G05D5/03 ,  G01G9/00 ,  G01N23/10 ,  H01L31/117

CPC分类号： G01N23/16 ,  G01B15/025 ,  G01N23/203 ,  G05D5/03 ,  G01N33/44 ,  G01N9/24

摘要： A low voltage, compact measuring apparatus for measuring the weight of a material is disclosed which uses a PIN diode in conjunction with a low noise processing circuit to detect particle radiation emitted from a source, which source has its detection intensity affected by a material to be measured. A light blocking, particle radiation permeable material protects the PIN diode from detecting light radiation.

摘要翻译： 公开了一种用于测量材料重量的低电压，紧凑的测量装置，其使用PIN二极管结合低噪声处理电路来检测从源发射的粒子辐射，该源的检测强度受到材料的影响 测量。 遮光的，粒子辐射透过的材料保护PIN二极管不会检测光线。

公开(公告)号：US5099504A

公开(公告)日：1992-03-24

申请号：US341776

申请日：1989-04-21

申请人： John W. Pettit

发明人： John W. Pettit

IPC分类号： G01B15/02 ,  G01N9/24 ,  G01N23/16 ,  G01N23/203 ,  G01N33/44 ,  G05D5/03

CPC分类号： G01N23/16 ,  B29C47/92 ,  G01B15/025 ,  G01N23/203 ,  G05D5/03 ,  B29C2947/92152 ,  B29C2947/92409 ,  B29C2947/92438 ,  B29C2947/92647 ,  B29C2947/92904 ,  B29C2947/92933 ,  G01N33/44 ,  G01N9/24

摘要： A low-voltage, compact measuring apparatus for measuring any one of thickness, density and denier of a material is disclosed which uses a PIN diode in conjunction with a low noise processing circuit to detect particle radiation emitted from a source, which source has its detection intensity affected by a material to be measured. A light blocking, particle radiation permeable material protects the PIN diode from detecting light radiation. A system for controlling the extrusion of a film using the measuring apparatus, and for correcting for erroneous measurement caused by web flutter, are also disclosed.

摘要翻译： 公开了一种用于测量材料的厚度，密度和旦数中的任何一种的低电压，紧凑的测量装置，其使用PIN二极管与低噪声处理电路结合以检测从源发射的粒子辐射，该源具有其检测 强度受被测材料影响。 遮光的，粒子辐射透过的材料保护PIN二极管不会检测光线。 还公开了一种使用测量装置控制膜的挤出并且用于校正由卷筒纸颤动引起的错误测量的系统。

公开(公告)号：US4866747A

公开(公告)日：1989-09-12

申请号：US142740

申请日：1988-01-11

申请人： August Von Wartburg

发明人： August Von Wartburg

IPC分类号： G01B5/00 ,  G01B15/02

CPC分类号： G01B15/025 ,  G01B5/0002

摘要： An instrument for measuring thin layer thickness according to the X-ray fluorescence method. Such device has means for observing the area of the surface of the layer through which the geometrical central axis of the X-rays pass, and a table for supporting objects which are to be measured, which has a portion defining a cut-out around the geometrical central axis. The device has illuminating means for lighting the surface through the cut out. An electronic eye is located in the path of light rays from the illuminating means on the ocular side. An image screen is controlled by the electronic eye. Depressor means is provided above the cut-out and has a pressure-applying face adapted for movement between an upper and a lower position, the upper position being at least high enough that the object to be measured can be pushed between the pressure-applying face and the table. The pressure-applying face is adapted to apply force when in the lower position to press the object to be measured against the top of the table and hold the object in a non-positive manner. Switchable means is provided for moving the depressor means in the upper and the lower positions. The pressure-applying face is located about the geometrical central axis of the X-rays, the distance between the pressure-applying face and the geometrical central axis being far less than the distance from the geometrical central axis to the edge of the table. The cut-out in the table has a very much larger area than the cross-section of the X-ray beam.

摘要翻译： 根据X射线荧光法测量薄层厚度的仪器。 这种装置具有用于观察X射线的几何中心轴通过的层的表面的区域的装置，以及用于支撑要测量的物体的台，其具有限定围绕 几何中心轴。 该装置具有用于通过切割来照亮表面的照明装置。 电子眼位于来自眼侧的照明装置的光线的路径中。 图像屏幕由电子眼控制。 抑制器装置设置在切口上方并且具有适于在上部和下部位置之间移动的压力施加面，上部位置至少足够高以使被测量物体能够被推压在压力施加面 和桌子。 压力施加面适于在较低位置施加力，以抵抗桌子的顶部按压被测量物体，并且以非正的方式保持物体。 提供可切换装置，用于在上部和下部位置移动按压装置。 压力施加面围绕X射线的几何中心轴线定位，压力施加面和几何中心轴之间的距离远小于从几何中心轴到台面边缘的距离。 表中的切口具有比X射线束的横截面大得多的面积。