Abstract:
Methods of improving the adhesion of low resistivity tungsten/tungsten nitride layers are provided. Low resistivity tungsten/tungsten nitride layers with good adhesion are formed by treating a tungsten or tungsten nitride layer before depositing low resistivity tungsten. Treatments include a plasma treatment and a temperature treatment. According to various embodiments, the treatment methods involve different gaseous atmospheres and plasma conditions.
Abstract:
The present invention provides an illuminating device and heat-dissipating structure thereof. The heat-dissipating structure includes a plurality of heat-dissipating units stacked together. Each heat-dissipating unit includes a cone-like portion with an opening and a plurality of protrusions connected to the cone-like portion, wherein at least one of the protrusions of one heat-dissipating unit is coupled to that of the adjacent heat-dissipating unit to form one or more zonal planes for allowing a light source to be disposed thereon to constitute the illuminating device, and the openings of the heat-dissipating units are liked together to form an airflow passage.
Abstract:
A motor. The motor includes a stator, a rotor, a top magnetic structure, and a bottom magnetic structure. The stator is disposed in a frame. The rotor is also disposed in the frame, corresponding to the stator. The rotor comprises a shaft, extended axially from the rotor. The shaft does not contact the stator or the frame. The bottom magnetic structure is at the bottom of the frame. The top magnetic structure is on the top of the frame. The top and bottom magnetic structures are opposite to each other in an axial direction. Magnetic attraction generated between the first magnetic structure and the second magnetic structure attracts and positions the shaft therebetween such that the first magnetic structure, the second magnetic structure, and the shaft are coaxially aligned.
Abstract:
An optical system includes a light source and a dielectric optical film. The light source generates at least one first light ray having a first spectral distribution, which has a plurality of first peaks with different levels. The dielectric optical film is disposed on an optical path of the first light ray and converts the first light ray into a second light ray, which has a second spectral distribution. The second spectral distribution has a plurality of second peaks with similar levels. In addition, a liquid crystal display apparatus is also disclosed.
Abstract:
A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.
Abstract:
An optical projection display member includes an optical focusing structure, an optical panel, and a light-absorbing layer. The optical focusing structure has a plurality of micro-optical focusing components. The light-absorbing layer is located between the optical focusing structure and the optics panel. The light-absorbing layer has a plurality of optical transmitting windows corresponding with the micro-optical focusing components. The optical transmitting windows are formed by an optical exposure-developing step.
Abstract:
A switching system. The switching system includes an optical component, an electromagnetic switch, an auxiliary adjustment structure, and a control circuit. The optical component reflects or refracts a light. The electromagnetic switch, on one side of the optical component, controls the optical component to rotate or move in a direction. The auxiliary adjustment structure, on the optical component, controls the optical component to rotate or move in other direction. The control circuit, coupled to the electromagnetic switch, adjusts an on-off signal of the electromagnetic switch by a native frequency of the switching system, wherein the native frequency is obtained from an initial signal.
Abstract:
A new method to manufacture a product is achieved. The method comprises providing a control system and a process tool. The process tool comprises multiple chambers. The process tool stores a plurality of recipes. The control system comprises a database. A set of chambers and a recipe name are selected based on the database. A recipe body is uploaded from the process tool to the control system based on the recipe name. The recipe body is modified to generate a runtime recipe body that specifies the set of chambers. The runtime recipe body is downloaded from the control system to the process tool. A product is processed in the process tool using the runtime recipe body.
Abstract:
A new method to manufacture a product is achieved. The method comprises providing a control system and a process tool. The process tool comprises multiple chambers. The process tool stores a plurality of recipes. The control system comprises a database. A set of chambers and a recipe name are selected based on the database. A recipe body is uploaded from the process tool to the control system based on the recipe name. The recipe body is modified to generate a runtime recipe body that specifies the set of chambers. The runtime recipe body is downloaded from the control system to the process tool. A product is processed in the process tool using the runtime recipe body.
Abstract:
A film deposition method for an optical component is used to balance two side film stresses of a substrate. A predetermined number of layers of films is deposited on an upper side of the substrate, and then layers of films with similar thickness are deposited on a lower side of the substrate to balance side film stresses of the substrate.